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1. 发明授权

US09513331B2 Test head for electrical testing of a test specimen 有权
标题翻译：试样的电气试验用试验头
公开(公告)号：US09513331B2
公开(公告)日：2016-12-06
申请号：US13957868
申请日：2013-08-02
申请人： Stefan Trenz , Gunther Böhm , Achim Weiland
发明人： Stefan Trenz , Gunther Böhm , Achim Weiland
IPC分类号： G01R31/00 , G01R31/28 , G01R1/073
CPC分类号： G01R31/2886 , G01R1/07314 , G01R1/07357
摘要： The present disclosure relates to a test head for electrical testing of a test specimen, in particular a wafer, having at least two guide plates, which are spaced apart by means of at least one spacer and have guide holes distributed over the surfaces thereof, in which test contact pins for physical contact with the test specimen are guided in a sliding manner. Provision is made for the spacer to be formed by a multiplicity of point supports arranged in a manner distributed over the surfaces of the guide plates and secured on the guide plates.
摘要翻译：本公开涉及一种用于电测试的测试头，特别是具有至少两个引导板的测试样本的测试头，所述至少两个引导板通过至少一个间隔件间隔开并且在其表面上分布有引导孔，用于与测试样品物理接触的测试接触销被滑动地引导。通过多个点支撑件形成间隔件，其布置方式分布在导向板的表面上并固定在导向板上。

2. 发明授权

US07622936B2 Contact device for touch contacting an electrical test specimen, and corresponding method 失效
标题翻译：用于触摸接触电试样的接触装置及相应的方法
公开(公告)号：US07622936B2
公开(公告)日：2009-11-24
申请号：US12002481
申请日：2007-12-17
申请人： Achim Weiland , Gunther Böhm
发明人： Achim Weiland , Gunther Böhm
IPC分类号： G01R31/02 , G01R31/28
CPC分类号： G01R31/2863 , G01R31/2874 , G01R31/2889
摘要： A contacting device for touch contacting an electrical test specimen includes a contact head and a connecting device. The contact head with the test specimen have electrically touch contactable test contacts, the positions of which are distributed across a testing surface and are determined by at least one guide element that belongs to the contact head and that is fastened to a holding device of the contact head. The test contacts, on their side facing away from the test specimen, are to be brought into electrical touch contact with contact surfaces of the connecting device. It is provided that the guide element is composed of individual segments that each have a part of the testing surface and are each connected to at least one of the holding device and the connecting device by at least one fixed bearing.
摘要翻译：用于触摸接触电测试样本的接触装置包括接触头和连接装置。具有测试样本的接触头具有电触摸可接触的测试触点，其位置分布在测试表面上并且由至少一个属于接触头的导向元件确定并且紧固到触点的保持装置头。测试触点在其背离测试样本的一侧将与连接装置的接触表面进行电触触接触。提供了引导元件由各自具有测试表面的一部分并且通过至少一个固定轴承连接到保持装置和连接装置中的至少一个的各个段构成。

3. 发明授权

US07977957B2 Method and apparatus for electrical testing of a unit under test, as well as a method for production of a contact-making apparatus which is used for testing 有权
标题翻译：被测单元的电气测试方法和装置，以及用于生产用于测试的接触制备装置的方法
公开(公告)号：US07977957B2
公开(公告)日：2011-07-12
申请号：US11479659
申请日：2006-06-29
申请人： Gunther Böhm
发明人： Gunther Böhm
IPC分类号： G01R31/308 , G01R31/00
CPC分类号： G01R31/2808 , G01R1/06794 , G01R1/073 , G01R1/07314
摘要： A contact-making apparatus for electrical connection of a unit under test to an electrical test device, having a plurality of electrical contacts which are associated with at least one holding element. The contact-making apparatus and preferably the holding element thereof, is provided with at least one marking which is in a defined position with respect to at least one of the contacts. The marking is detected for alignment of the apparatus and the unit. A corresponding method of use and a method of manufacture are also disclosed.
摘要翻译：一种用于将被测单元电连接到电测试装置的接触制造装置，具有与至少一个保持元件相关联的多个电触点。接触制备装置并且优选地其保持元件设置有至少一个相对于至少一个触点的限定位置的标记。检测到标记用于设备和单元的对准。还公开了相应的使用方法和制造方法。

4. 发明授权

US07164280B2 Electrical test device 有权
标题翻译：电气测试装置
公开(公告)号：US07164280B2
公开(公告)日：2007-01-16
申请号：US11127901
申请日：2005-05-12
申请人： Gunther Böhm
发明人： Gunther Böhm
IPC分类号： G01R31/02
CPC分类号： G01R1/07307 , G01R1/07357 , G01R1/44
摘要： An electrical test device, in particular for testing wafers, having a contact head, which is associated with the test object and is provided with pin-shaped contact elements that are arrayed to form a contact pin arrangement. An electrical connection apparatus, including contact faces which are in touching contact with ends of the contact elements which face away from the test object. A centering device, which permits only radial play for thermal expansion by sliding guides, for centrally aligning the contact head and the connection apparatus with respect to one another.
摘要翻译：一种电测试装置，特别是用于测试晶片的电测试装置，其具有接触头，该接触头与测试对象相关联，并且设置有排列成形成接触针布置的销状接触元件。一种电连接装置，包括与接触元件的远离测试对象的端部触摸接触的接触面。一种定心装置，其仅允许通过滑动导轨进行热膨胀的径向游隙，用于使接触头和连接装置相对于彼此居中对准。

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