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    • 1. 发明申请
    • LIGHT SENSITIVE COMPONENT FOR USE IN PHOTORESISTS
    • 光敏元件在光电中的使用
    • WO2007051646A1
    • 2007-05-10
    • PCT/EP2006/010607
    • 2006-11-06
    • AZ ELECTRONIC MATERIALS (GERMANY) GMBHZAHN, WolfgangGROTTENMÜLLER, RalfWAGNER, Dieter
    • ZAHN, WolfgangGROTTENMÜLLER, RalfWAGNER, Dieter
    • G03F7/023
    • G03F7/0233C07C309/76C08K5/42G03F7/0381
    • A compound of the formula (I) where the symbols and indices are each defined as follows: A is A', R or O-R; where R is a straight-chain, branched or cyclic, saturated or unsaturated aliphatic radical having 1 -8 carbon atoms; A' is the same or different and is (Formula Ia), B is a bond, -O-C(O)-, -C(O)-O-, -O-C(O)-, -C(O)-NH-, -NH-C(O)-, -C(O)-O-CH 2 -CH(OH)-CH 2 -O, -0-CH2-CH(OH)-CH 2 -O-(O)C-, -0-C(O)-O-, -0-C(O)-NH- or -NH-C(O)-O-; R 1 is H or OH; m is 1 , 2, 3, 4 or 5; Y is Formulae (II), (III), (IV), (V), n is a positive rational number ≥ 3; E is the same or different and is -CH-CHR 2 -, -CHR 2 -CH 2 -, -CH 2 -CHR 2 -O-, -O-CHR 2 -CH 2 -, -(CH 2 ) t -O- or -0-(CH 2 )-; R 2 is H or CH3 and r is 1 or 4, is suitable as a light-sensitive component for photoresists.
    • 符号和指数各自定义如下:式(I)的化合物:A是A',R或O-R; 其中R是具有1-8个碳原子的直链,支链或环状饱和或不饱和的脂族基团; A'相同或不同,为(式Ia),B为键,-OC(O) - , - C(O)-O-,-OC(O) - , - C(O) ,-NH-C(O) - , - C(O)-O-CH 2 -CH(OH)-CH 2 -O,-O-CH 2 - CH(OH)-CH 2 -O-(O)C - , - O-C(O)-O-,-O-C(O)-NH-或-NH-C( O)-O-; R 1是H或OH; m为1,2,3,4或5; Y是式(II),(III),(IV),(V),n是正有理数= 3; E相同或不同,为-CH-CHR 2 - , - CH 2 - , - CH 2 - , - CH 2 -CHR 2 -O - , - O-CHR 2 -CH 2 - , - (CH 2) /或-O - (CH 2) - ; R 2是H或CH 3,r是1或4,适合作为光致抗蚀剂的光敏组分。