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    • 3. 发明申请
    • ULTRAVIOLET LIGHT SENSITIVE ONIUM SALTS AND THE USE THEREOF AS PHOTOINITIATORS
    • 超紫外线敏感性钠盐及其作为光敏剂的用途
    • WO1994007183A1
    • 1994-03-31
    • PCT/US1993008092
    • 1993-08-30
    • EASTMAN KODAK COMPANY
    • EASTMAN KODAK COMPANYSAEVA, Franklin, Donald
    • G03F07/029
    • C07C381/12G03F7/0045G03F7/0381G03F7/039G03G5/026
    • A composition of matter including an onium salt and a method of forming images. The onium salt has a chromophore which absorbs ultraviolet radiation, an S, Se, As, N or P atom which is free of substituents exhibiting a higher energy occupied molecular orbital than the chromophore; an insulating group which links the chromophore to the S, Se, As, N or P atom of the salt and substantially prevents (pi) resonance from the chromophore through the S, Se, As, N or P atom; and an anion. The onium salt is capable of forming a Bronsted acid upon exposure to ultraviolet radiation in the presence of a proton source. In the method of forming images, the onium salt is exposed to ultraviolet radiation in the presence of a proton source, to convert said onium salt to a Bronsted acid.
    • 包含鎓盐的物质组合物和形成图像的方法。 鎓盐具有吸收紫外线辐射的发色团,不具有比发色团具有更高能量占据分子轨道的取代基的S,Se,As,N或P原子; 将发色团连接到盐的S,Se,As,N或P原子的绝缘基团,并且基本上防止(pi)从发色团通过S,Se,As,N或P原子的共振; 和阴离子。 鎓盐在质子源存在下暴露于紫外线辐射下能够形成布朗斯台德酸。 在形成图像的方法中,鎓盐在质子源存在下暴露于紫外线辐射,以将所述鎓盐转化成布朗斯台德酸。
    • 9. 发明申请
    • Light-Sensitive Component for Use in Photoresists
    • 用于光致抗蚀剂的光敏组分
    • US20090253073A1
    • 2009-10-08
    • US12084614
    • 2006-11-06
    • Wolfgang ZahnRalf GrottenmüllerDieter Wagner
    • Wolfgang ZahnRalf GrottenmüllerDieter Wagner
    • G03F7/20C08G8/02G03F7/004
    • G03F7/0233C07C309/76C08K5/42G03F7/0381
    • A compound of the formula (I) where the symbols and indices are each defined as follows: A is A′, R or O—R; where R is a straight-chain, branched or cyclic, saturated or unsaturated aliphatic radical having 1-8 carbon atoms; A′ is the same or different and is B is a bond, —O—C(O)—, —C(O)—O—, —O—C(O)—, —C(O)—NH—, —NH—C(O)—, —C(O)—O—CH2—CH(OH)—CH2—O, —O—CH2—CH(OH)—CH2—O—(O)C—, —O—C(O)—O—, —O—C(O)—NH— or —NH—C(O)—O—; R1 is H or OH; m is 1, 2, 3, 4 or 5; Y is n is a positive rational number ≧3; E is the same or different and is —CH—CHR2—, —CHR2—CH2—, —CH2—CHR2—O—, —O—CHR2—CH2—, —(CH2)r—O— or —O—(CH2)—; R2 is H or CH3 and r is 1 or 4, is suitable as a light-sensitive component for photoresists.
    • 符号和指数各自定义如下:式(I)的化合物:A是A',R或O-R; 其中R是具有1-8个碳原子的直链,支链或环状饱和或不饱和的脂族基团; A'相同或不同,B为键,-OC(O) - , - C(O)-O-,-OC(O) - , - C(O)-NH-,-NH-C (O) - , - C(O)-O-CH 2 -CH(OH)-CH 2 -O,-O-CH 2 -CH(OH)-CH 2 -O-(O) O-,-OC(O)-NH-或-NH-C(O)-O-; R1是H或OH; m为1,2,3,4或5; Y是n是正有理数> = 3; E相同或不同,为-CH-CHR 2 - , - CHR 2 -CH 2 - , - CH 2 -CHR 2 -O - , - O-CHR 2 -CH 2 - , - (CH 2)r O-或-O-(CH 2) ; R2是H或CH3,r是1或4,适用作光致抗蚀剂的光敏组分。