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    • 9. 发明申请
    • APPARATUS FOR REDUCING HEAT LOSS
    • 减少热损失的装置
    • WO9948139A3
    • 2000-03-09
    • PCT/US9903979
    • 1999-02-23
    • APPLIED MATERIALS INC
    • SHAPER CHARLES DEL-AWADY KHALIDBOLANDI HOOMANKNOOT PETER
    • H01L21/00
    • H01L21/67103
    • An apparatus for reducing heat loss around the perimeter of a material substrate during thermal cycling is provided. The apparatus for reducing heat loss comprises a perimeter apparatus for surrounding the substrate. The apparatus rests in the same plane as a material substrate during thermal cycling and can be made of the same material as the substrate. Additionally, the apparatus can be one continuous piece or can be several perimeter pieces. To sense the temperature of a substrate during thermal cycling, a representative temperature can be obtained by embedding sensors in an auxiliary heater or in a heat exchanger, both of which are components of a thermal cycling module. A relatively flat sensor can be embedded between film layers in a foil heater. Additionally, sensors can be embedded inserted into a passageway in a heat exchanger so that they are flush with the each exchanger's top surface. The wires to the sensor can then be enclosed in casing that also removably secures the sensor in the heat exchanger.
    • 提供了一种用于在热循环期间减少材料基板的周边周围的热损失的装置。 用于减少热损失的装置包括围绕基板的周边装置。 该装置在热循环期间与材料基板在同一平面上,并且可由与基底相同的材料制成。 另外,该装置可以是一个连续件,也可以是几个周边件。 为了在热循环期间感测衬底的温度,可以通过将传感器嵌入辅助加热器或热交换器中来获得代表性的温度,这两者都是热循环模块的组件。 相对平坦的传感器可以嵌入在箔加热器中的膜层之间。 此外,传感器可以嵌入插入热交换器的通道中,使得它们与每个交换器的顶表面齐平。 然后,传感器的电线可以封闭在外壳中,也可以将传感器固定在热交换器中。