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1. 发明申请

WO2012036908A2 SPRAY DEPOSITION MODULE FOR AN IN-LINE PROCESSING SYSTEM 审中-公开
标题翻译：用于在线处理系统的喷涂沉积模块
公开(公告)号：WO2012036908A2
公开(公告)日：2012-03-22
申请号：PCT/US2011049984
申请日：2011-08-31
申请人： APPLIED MATERIALS INC , BACHRACH ROBERT Z , WANG CONNIE P , LOPATIN SERGEY D , BOLANDI HOOMAN , BABAYANTS RUBEN , BROWN KARL M , KUTNEY MICHAEL C , OLGADO DONALD J K
发明人： BACHRACH ROBERT Z , WANG CONNIE P , LOPATIN SERGEY D , BOLANDI HOOMAN , BABAYANTS RUBEN , BROWN KARL M , KUTNEY MICHAEL C , OLGADO DONALD J K
IPC分类号： H01M4/04 , B05C5/02 , B05D1/26 , H01M10/04 , H01M10/052
CPC分类号： H01M4/0419 , H01M10/0404
摘要： In one embodiment, an apparatus for simultaneously depositing an anodically or cathodically active material on opposing sides of a flexible conductive substrate is provided. The apparatus comprises a chamber body defining one or more processing regions in which a flexible conductive substrate is exposed to a dual sided spray deposition process, wherein each of the one or more processing regions are further divided into a first spray deposition region and a second spray deposition region for simultaneously spraying an anodically active or cathodically active material onto opposing sides of a portion of the flexible conductive substrate, wherein each of the first and second spray deposition regions comprise a spray dispenser cartridge for delivering the activated material toward the flexible conductive substrate and a movable collection shutter.
摘要翻译：在一个实施例中，提供了一种用于在柔性导电衬底的相对侧上同时沉积阳极或阴极活性材料的装置。该设备包括限定一个或多个处理区域的腔室主体，其中柔性导电基板暴露于双面喷射沉积工艺，其中一个或多个处理区域中的每一个进一步分成第一喷射沉积区域和第二喷射用于将阳极活性材料或阴极活性材料同时喷射到柔性导电基底的一部分的相对侧上，其中第一和第二喷射沉积区中的每一个包括用于将活化材料输送到柔性导电基底的喷射分配器盒，以及可移动的收集快门。

2. 发明申请

WO2011068685A3 COMPRESSED POWDER 3D BATTERY ELECTRODE MANUFACTURING 审中-公开
标题翻译：压缩粉末3D电池电极制造
公开(公告)号：WO2011068685A3
公开(公告)日：2011-11-24
申请号：PCT/US2010057063
申请日：2010-11-17
申请人： APPLIED MATERIALS INC , BACHRACH ROBERT Z , LOPATIN SERGEY D , WANG CONNIE P , OLGADO DONALD J K
发明人： BACHRACH ROBERT Z , LOPATIN SERGEY D , WANG CONNIE P , OLGADO DONALD J K
IPC分类号： H01M4/02 , H01G9/04 , H01M4/04 , H01M4/64 , H01M10/0525
CPC分类号： H01M4/70 , H01M4/134 , H01M4/139 , H01M4/485 , H01M4/505 , H01M4/525 , H01M4/5825 , H01M4/587 , H01M4/661
摘要： Embodiments of the invention contemplate forming an electrochemical device and device components, such as a battery cell or supercapacitor, using thin-film or layer deposition processes and other related methods for forming the same. In one embodiment, a battery bi-layer cell is provided. The battery bi-layer cell comprises an anode structure comprising a conductive collector substrate, a plurality of pockets formed on the conductive collector substrate by conductive microstructures comprising a plurality of columnar projections, and an anodically active powder deposited in and over the plurality of pockets, an insulative separator layer formed over the plurality of pockets, and a cathode structure joined over the insulative separator.
摘要翻译：本发明的实施例考虑使用薄膜或层沉积工艺和用于形成其的相关方法形成电化学装置和装置部件，例如电池单元或超级电容器。在一个实施例中，提供了一种电池双层电池。该电池双层电池包括阳极结构和阳极结构，阳极结构包括导电集电极衬底，通过导电微结构形成在导电集电极衬底上的多个凹穴，所述导电微结构包括多个柱状突起以及沉积在多个凹穴中和上方的阳极活性粉末，形成在所述多个凹穴上方的绝缘分隔层以及接合在所述绝缘分隔物上的阴极结构。

3. 发明申请

WO2011028529A3 IN-SITU DEPOSITION OF BATTERY ACTIVE LITHIUM MATERIALS BY THERMAL SPRAYING 审中-公开
标题翻译：电喷活性锂离子电池原位沉积
公开(公告)号：WO2011028529A3
公开(公告)日：2011-06-23
申请号：PCT/US2010046501
申请日：2010-08-24
申请人： APPLIED MATERIALS INC , SHANG QUANYUAN , YANG LU , BROWN KARL M , OLGADO DONALD J K , PEBENITO VICTOR , BOLANDI HOOMAN , ISHIKAWA TETSUYA , BACHRACH ROBERT Z , CHEN LIANG-YUH
发明人： SHANG QUANYUAN , YANG LU , BROWN KARL M , OLGADO DONALD J K , PEBENITO VICTOR , BOLANDI HOOMAN , ISHIKAWA TETSUYA , BACHRACH ROBERT Z , CHEN LIANG-YUH
IPC分类号： C23C4/12 , B05D1/08 , B05D3/00 , B05D7/14 , C23C4/04 , C23C4/18
CPC分类号： H01M4/0419 , H01M4/1391
摘要： A method and apparatus for forming an electrochemical layer of a thin film battery is provided. A precursor mixture comprising electrochemically active precursor particles dispersed in a carrying medium is provided to a processing chamber and thermally treated using a combustible gas mixture also provided to the chamber. The precursor is converted to nanocrystals by the thermal energy, and the nanocrystals are deposited on a substrate. A second precursor may be blended with the nanocrystals as they deposit on the surface to enhance adhesion and conductivity.
摘要翻译：提供一种用于形成薄膜电池的电化学层的方法和装置。将包含分散在承载介质中的电化学活性前体颗粒的前体混合物提供到处理室，并使用也提供给室的可燃气体混合物进行热处理。通过热能将前体转化成纳米晶体，并将纳米晶体沉积在基底上。当第二前体沉积在表面上以增强粘附性和导电性时，可与纳米晶体共混。

4. 发明申请

WO2011028527A2 IN-SITU DEPOSITION OF BATTERY ACTIVE LITHIUM MATERIALS BY PLASMA SPRAYING 审中-公开
标题翻译：等离子喷涂原位沉积电池活性锂材料
公开(公告)号：WO2011028527A2
公开(公告)日：2011-03-10
申请号：PCT/US2010046498
申请日：2010-08-24
申请人： APPLIED MATERIALS INC , SHANG QUANYUAN , YANG LU , BROWN KARL M , OLGADO DONALD J K , PEBENITO VICTOR , BOLANDI HOOMAN , ISHIKAWA TETSUYA , BACHRACH ROBERT Z , CHEN LIANG-YUH
发明人： SHANG QUANYUAN , YANG LU , BROWN KARL M , OLGADO DONALD J K , PEBENITO VICTOR , BOLANDI HOOMAN , ISHIKAWA TETSUYA , BACHRACH ROBERT Z , CHEN LIANG-YUH
IPC分类号： C23C4/12 , B05D1/04 , B05D3/00 , B05D7/14 , C23C4/04 , C23C4/18
CPC分类号： H01M4/0419 , H01M4/1391
摘要： A method and apparatus for forming an electrochemical layer of a thin film battery is provided. A precursor mixture comprising precursor particles dispersed in a carrying medium is activated in an activation chamber by application of an electric field to ionize at least a portion of the precursor mixture. The activated precursor mixture is then mixed with a combustible gas mixture to add thermal energy to the precursor particles, converting them to nanocrystals, which deposit on a substrate. A second precursor may be blended with the nanocrystals as they deposit on the surface to enhance adhesion and conductivity
摘要翻译：提供了一种用于形成薄膜电池的电化学层的方法和设备。包含分散在载体介质中的前体颗粒的前体混合物通过施加电场在活化室中被活化以电离至少一部分前体混合物。然后将活化的前体混合物与可燃气体混合物混合以向前体颗粒添加热能，将它们转化为沉积在基底上的纳米晶体。当它们沉积在表面上时，第二前体可以与纳米晶体混合以增强粘附性和导电性

5. 发明申请

WO2011139574A3 HYDROTHERMAL SYNTHESIS OF ACTIVE MATERIALS AND IN SITU SPRAYING DEPOSITION FOR LITHIUM ION BATTERY 审中-公开
标题翻译：活性材料的氢热合成和锂离子电池的喷涂沉积
公开(公告)号：WO2011139574A3
公开(公告)日：2012-04-05
申请号：PCT/US2011033304
申请日：2011-04-20
申请人： APPLIED MATERIALS INC , YANG LU , BOLANDI HOOMAN , BROWN KARL , PEBENITO VICTOR , OLGADO DONALD J K
发明人： YANG LU , BOLANDI HOOMAN , BROWN KARL , PEBENITO VICTOR , OLGADO DONALD J K
IPC分类号： H01M4/139 , H01M4/48 , H01M4/58 , H01M10/0525
CPC分类号： C23C4/121 , C23C4/123 , C23C26/02 , H01M4/0419 , H01M4/0421 , H01M4/139 , H01M4/625 , Y02E60/122 , Y02P70/54
摘要： A method and apparatus for forming an electrochemical layer of a lithium ion battery is provided. A precursor mixture in a carrying medium is activated in a reactor chamber by application of energy to synthesize active materials. The activated precursor mixture is then spray deposited on a substrate. A binder and conductive materials may be blended, or sprayed separately, with the nano- or micro-crystals as they deposit on the surface to enhance adhesion and conductivity.
摘要翻译：提供了一种用于形成锂离子电池的电化学层的方法和装置。携带介质中的前体混合物通过施加能量在反应器室中活化以合成活性材料。然后将活化的前体混合物喷雾沉积在基底上。当粘合剂和导电材料沉积在表面上时，粘合剂和导电材料可以与纳米或微晶分别共混或喷涂，以增强粘合性和导电性。

6. 发明申请

WO2012021321A3 COMPOSITE SUBSTRATES FOR DIRECT HEATING AND INCREASED TEMPERATURE UNIFORMITY 审中-公开
标题翻译：用于直接加热和增加温度均匀性的复合基材
公开(公告)号：WO2012021321A3
公开(公告)日：2012-06-28
申请号：PCT/US2011046116
申请日：2011-08-01
申请人： APPLIED MATERIALS INC , SU JIE , OLGADO DONALD J K , KUTNEY MICHAEL C
发明人： SU JIE , OLGADO DONALD J K , KUTNEY MICHAEL C
IPC分类号： H01L21/205 , H01L21/683
CPC分类号： F27B17/0025 , C23C16/4586 , C23C16/46 , C30B23/063 , C30B25/105 , H01L21/67115 , H01L21/68764 , H01L21/68771 , H01L21/68785
摘要： Embodiments of the present invention generally relate to apparatus and methods for uniformly heating substrates. The apparatus include a transferable puck having at least one electrode and a dielectric coating. The transferable puck can be biased with a biasing assembly relative to a substrate, and transferred independently of the biasing assembly during a fabrication process while maintaining the bias relative to the substrate. The puck absorbs radiant heat from a heat source and uniformly conducts the heat to a substrate coupled to the puck. The puck has high emissivity and high thermal conductivity for absorbing and transferring the radiant heat to the substrate. The high thermal conductivity allows for a uniform temperature profile across the substrate, thereby increasing deposition uniformity. The method includes disposing a light-absorbing material on an optically transparent substrate, and radiating the light-absorbing material with a radiant heat source to heat the optically transparent substrate.
摘要翻译：本发明的实施例一般涉及用于均匀加热衬底的装置和方法。该装置包括具有至少一个电极和介电涂层的可转移圆盘。可转移的圆盘可以相对于基板偏压组件偏置，并且在制造过程中独立于偏置组件传递，同时保持相对于基板的偏压。圆盘吸收来自热源的辐射热，并将热量均匀地传导到耦合到冰球的基底。圆盘具有高辐射率和高导热性，用于吸收并将辐射热传递到基底。高导热性允许跨基板的均匀温度分布，从而增加沉积均匀性。该方法包括将光吸收材料设置在光学透明基板上，并且用辐射热源辐射光吸收材料以加热光学透明基板。

7. 发明申请

WO2012009371A3 COMPARTMENTALIZED CHAMBER 审中-公开
标题翻译：隔音室
公开(公告)号：WO2012009371A3
公开(公告)日：2012-04-19
申请号：PCT/US2011043734
申请日：2011-07-12
申请人： APPLIED MATERIALS INC , OLGADO DONALD J K
发明人： OLGADO DONALD J K
IPC分类号： H01L21/205 , H01L21/3065
CPC分类号： C23C16/46 , C23C16/45508 , C23C16/45565 , C23C16/4557
摘要： Embodiments of the present invention generally relate to apparatus for improving processing uniformity and reducing needs of chamber cleaning. Particularly, embodiments of the present invention relate to a processing chamber having a loading compartment and a processing compartment in substantial fluid isolation and methods of depositing films in the processing chamber.
摘要翻译：本发明的实施例一般涉及用于改善加工均匀性并减少腔室清洁需求的装置。特别地，本发明的实施例涉及一种处理室，该处理室具有大量流体隔离的装载室和处理隔室以及在处理室中沉积膜的方法。

8. 发明申请

WO2012125771A3 SUBSTRATE SUPPORT ASSEMBLY FOR THIN FILM DEPOSITION SYSTEMS 审中-公开
标题翻译：薄膜沉积系统的基板支撑组件
公开(公告)号：WO2012125771A3
公开(公告)日：2012-11-15
申请号：PCT/US2012029134
申请日：2012-03-14
申请人： APPLIED MATERIALS INC , NGUYEN TUAN ANH , OLGADO DONALD J K , QUACH DAVID H
发明人： NGUYEN TUAN ANH , OLGADO DONALD J K , QUACH DAVID H
IPC分类号： H01L21/683 , C23C16/458 , H01L21/205
CPC分类号： C30B25/12 , C23C16/4583
摘要： Substrate support assemblies and deposition chambers employing such support assemblies to improve temperature uniformity during film depositions, such as epitaxial growths of group-V material stacks for LEDs. In one embodiment, the support assembly includes a first component having a first thermal resistance and a top surface upon which the substrate is to be disposed at a first location. The support assembly further includes a second component to be disposed over the first component to cover a second location of the susceptor while the substrate is disposed over the first location and having a second thermal resistance to insulate regions of the susceptor adjacent to the substrate by an amount approximating that of the substrate during a deposition process. In embodiments, the second component is removable from the first component and supports the substrate in absence of the first component during transfer of the substrate between multiple deposition systems.
摘要翻译：使用这种支撑组件的衬底支撑组件和沉积室改善膜沉积期间的温度均匀性，例如用于LED的V族材料堆叠的外延生长。在一个实施例中，支撑组件包括具有第一热阻的第一部件和顶部表面，基板将被放置在第一位置。所述支撑组件还包括第二部件，所述第二部件设置在所述第一部件上方以覆盖所述基座的第二位置，同时所述基板设置在所述第一位置上并且具有第二热阻以使所述基座的与所述基板相邻的区域绝缘在沉积过程中的量与基底的量近似。在实施例中，第二部件可从第一部件移除并且在多个沉积系统之间的衬底传送期间不存在第一部件时支撑衬底。

9. 发明申请

WO2011059749A2 VERTICALLY INTEGRATED PROCESSING CHAMBER 审中-公开
标题翻译：垂直整体式加工室
公开(公告)号：WO2011059749A2
公开(公告)日：2011-05-19
申请号：PCT/US2010054508
申请日：2010-10-28
申请人： APPLIED MATERIALS INC , OLGADO DONALD J K
发明人： OLGADO DONALD J K
CPC分类号： H05H1/46 , C23C16/4587 , C23C16/54 , H01J37/32
摘要： A method and apparatus for plasma processing of substrates in a substantially vertical orientation is described. Substrates are positioned on a carrier comprising at least two frames oriented substantially vertically. The carrier is disposed in a plasma chamber with an antenna structure positioned between the substrates. Multiple plasma chambers may be coupled to a transfer chamber with a turntable for directing the carrier to a target chamber. A loader moves substrates between the carrier and a load-lock chamber in which substrates are staged in a substantially horizontal position.
摘要翻译：描述了用于基本垂直取向的基板的等离子体处理的方法和装置。基板定位在包括至少两个基本上垂直定向的框架的载体上。载体设置在等离子体室中，天线结构位于基板之间。多个等离子体室可以连接到具有用于将载体引导到目标室的转盘的转移室。装载机在载体和负载锁定室之间移动基板，其中基板在基本上水平的位置上分段。

10. 发明申请

WO2005002794A3 CELL, SYSTEM AND ARTICLE FOR ELECTROCHEMICAL MECHANICAL PROCESSING (ECMP) 审中-公开
标题翻译：电化学机械加工用电池，系统及其制品（ECMP）
公开(公告)号：WO2005002794A3
公开(公告)日：2005-03-31
申请号：PCT/US2004022722
申请日：2004-07-01
申请人： APPLIED MATERIALS INC , WANG YAN , NEO SIEW S , LIU FENG Q , TSAI STAN D , HU YONGQI , DUBOUST ALAIN , MANENS ANTOINE P , WADENSWEILER RALPH M , MAVLIV RASHID , CHEN LIANG-YUH , OLGADO DONALD J K , BUTTERFIELD PAUL D , TSENG MING-KUEI , CHANG SHOU-SUNG , SUN LIZHONG
发明人： WANG YAN , NEO SIEW S , LIU FENG Q , TSAI STAN D , HU YONGQI , DUBOUST ALAIN , MANENS ANTOINE P , WADENSWEILER RALPH M , MAVLIV RASHID , CHEN LIANG-YUH , OLGADO DONALD J K , BUTTERFIELD PAUL D , TSENG MING-KUEI , CHANG SHOU-SUNG , SUN LIZHONG
IPC分类号： B23H5/08 , B24B37/04 , B24B53/007 , C25F7/00 , H01L21/321
CPC分类号： B24B37/04 , B23H5/08 , B24B53/017 , C25F7/00
摘要： The invention provides a cell, a system and an article for processing a substrate in an electrochemical mechanical polishing system. A cell for polishing a substrate includes a polishing pad disposed on a top surface of a platen assembly. A plurality of conductive elements are arranged in a spaced-apart relation across the upper polishing surface and adapted to bias the substrate relative to an electrode disposed between the pad and the platen assembly. A plurality of passages are formed through the platen assembly between the top surface and a plenum defined within the platen assembly. A system is provided having a bulk polishing cell and a residual polishing cell. The residual polishing cell includes a biased conductive polishing surface. In further embodiments, the conductive element is protected from attack by process chemistries.
摘要翻译：本发明提供一种用于在电化学机械抛光系统中处理基底的电池，系统和制品。用于抛光基板的单元包括设置在压板组件的顶表面上的抛光垫。多个导电元件跨过上抛光表面以间隔的关系布置，并且适于相对于设置在垫和压板组件之间的电极偏置衬底。多个通道通过压板组件形成在顶表面和限定在压板组件内的气室之间。提供了具有大量抛光单元和残余抛光单元的系统。残余抛光单元包括偏置的导电抛光表面。在另外的实施方案中，保护导电元件免受过程化学物质的侵蚀。

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