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1. 发明申请

WO2010118266A3 USE SPECIAL ION SOURCE APPARATUS AND IMPLANT WITH MOLECULAR IONS TO PROCESS HDD (HIGH DENSITY MAGNETIC DISKS) WITH PATTERNED MAGNETIC DOMAINS 审中-公开
标题翻译：使用特殊离子源装置和分子离子注入具有图形磁场的HDD（高密度磁性磁盘）
公开(公告)号：WO2010118266A3
公开(公告)日：2011-01-13
申请号：PCT/US2010030442
申请日：2010-04-08
申请人： APPLIED MATERIALS INC , MOFFATT STEPHEN , FOAD MAJEED A
发明人： MOFFATT STEPHEN , FOAD MAJEED A
IPC分类号： G11B5/84 , G11B5/73
CPC分类号： G11B5/855 , B82Y10/00 , G11B5/746 , H01F10/16 , H01F10/265 , H01F41/34
摘要： A method and apparatus for manufacturing magnetic storage media is provided. A structural substrate is coated with a magnetically susceptible material, and a patterned resist layer is formed over the magnetically susceptible material. Atom groups are directed toward the substrate, penetrating the resist and implanting into the magnetically susceptible layer. Thick portions of the resist prevent implantation in some areas to form a pattern of magnetic properties on the substrate. Energy and composition of the atom groups, thickness and hardness of the resist, and lattice energy of the magnetically susceptible material may all be adjusted to yield desired fragmentation and implantation of the atom groups, including in some embodiments mere impact on the surface without implanting. A protective layer and a lubricating layer are formed over the patterned magnetically susceptible layer.
摘要翻译：提供了一种用于制造磁存储介质的方法和装置。用磁敏材料涂覆结构基材，并且在磁敏感材料上形成图案化的抗蚀剂层。原子团指向衬底，穿透抗蚀剂并注入到磁敏感层中。抗蚀剂的厚部分防止在一些区域中的注入以在基底上形成磁性的图案。原子组的能量和组成，抗蚀剂的厚度和硬度以及磁敏材料的晶格能都可以被调整以产生所需的原子团的分裂和注入，包括在一些实施方案中仅仅对表面的冲击而不会进行注入。在图案化的易磁化层上形成保护层和润滑层。

2. 发明申请

WO2010098993A3 HDD PATTERN IMPLANT SYSTEM 审中-公开
标题翻译： HDD图案植入系统
公开(公告)号：WO2010098993A3
公开(公告)日：2010-11-11
申请号：PCT/US2010024163
申请日：2010-02-12
申请人： APPLIED MATERIALS INC , FOAD MAJEED A , NEWMAN JACOB , MARIN JOSE ANTONIO , HOFFMAN DANIEL J , MOFFATT STEPHEN , VERHAVERBEKE STEVEN
发明人： FOAD MAJEED A , NEWMAN JACOB , MARIN JOSE ANTONIO , HOFFMAN DANIEL J , MOFFATT STEPHEN , VERHAVERBEKE STEVEN
IPC分类号： G11B5/73 , G11B5/82 , G11B5/84
CPC分类号： G11B5/82 , C23C14/48 , C23C14/50 , C23C16/00 , C23F1/00 , G11B5/84 , G11B5/855 , H01L21/673 , H01L21/677 , H01L21/687
摘要： Methods and apparatus for forming substrates having magnetically patterned surfaces is provided. A magnetic layer comprising one or more materials having magnetic properties is formed on a substrate. The magnetic layer is subjected to a patterning process in which selected portions of the surface of the magnetic layer are altered such that the altered portions have different magnetic properties from the non-altered portions without changing the topography of the substrate. A protective layer and a lubricant layer are deposited over the patterned magnetic layer. The patterning is accomplished through a number of processes that expose substrates to energy of varying forms. Apparatus and methods disclosed herein enable processing of two major surfaces of a substrate simultaneously, or sequentially by flipping. In some embodiments, magnetic properties of the substrate surface may be uniformly altered by plasma exposure and then selectively restored by exposure to patterned energy.
摘要翻译：提供了用于形成具有磁性图案化表面的基板的方法和设备。包含一种或多种具有磁性的材料的磁性层形成在基板上。对磁性层进行构图工艺，其中改变磁性层表面的选定部分，使得改变部分具有与未改变部分不同的磁性，而不改变衬底的形貌。在图案化的磁性层上沉积保护层和润滑剂层。图案化是通过许多将基材暴露于不同形式能量的过程来完成的。本文公开的装置和方法能够同时处理基板的两个主表面，或者通过翻转来顺序处理。在一些实施例中，衬底表面的磁性可以通过等离子体暴露均匀地改变，然后通过暴露于图案化的能量而选择性地恢复。

3. 发明申请

WO2010120725A4 HDD PATTERN APPARATUS USING LASER, E-BEAM, OR FOCUSED ION BEAM 审中-公开
标题翻译：使用激光，电子束或聚焦离子束的硬盘图案设备
公开(公告)号：WO2010120725A4
公开(公告)日：2011-03-03
申请号：PCT/US2010030823
申请日：2010-04-13
申请人： APPLIED MATERIALS INC , FOAD MAJEED A , MOFFATT STEPHEN
发明人： FOAD MAJEED A , MOFFATT STEPHEN
IPC分类号： G11B5/84 , G11B5/73 , G11B5/82
CPC分类号： G03B27/42 , G11B5/8404 , H01F10/187 , H01F41/34
摘要： A method and apparatus for manufacturing magnetic storage media is provided. A structural substrate is coated with a magnetically active material, and a magnetic pattern is formed in the magnetically active material by treating portions of the material with energy from a laser, e-beam, or focused ion beam. The beam may be divided into a packet of beamlets by passing the beam through a divider, which may be a diffraction grating for laser energy, a thin film single crystal for electrons, or a perforated plate for ions, or the beam may be generated by an array of emitters. The beamlets are then focused to a desired dimension and distribution by optics or electric fields. The resulting beam packet may be shaped further by passing through an aperture of any desired shape. The resulting beam may be applied sequentially to exposure zones to treat an entire substrate or plurality of substrates.
摘要翻译：提供了一种用于制造磁存储介质的方法和装置。用磁性活性材料涂覆结构基材，通过用激光，电子束或聚焦离子束的能量处理材料的部分，在磁性活性材料中形成磁性图案。通过将光束通过分隔器（可以是用于激光能量的衍射光栅），用于电子的薄膜单晶或用于离子的多孔板，可以将光束分成束分束，或者可以通过一组发射器。然后通过光学或电场将子束聚焦到期望的尺寸和分布。所得到的束束可以进一步通过穿过任何所需形状的孔。所得到的光束可以顺序施加到曝光区域以处理整个基板或多个基板。

4. 发明申请

WO2010120725A3 HDD PATTERN APPARATUS USING LASER, E-BEAM, OR FOCUSED ION BEAM 审中-公开
标题翻译： HDD模式设备使用激光，电子束或聚焦离子束
公开(公告)号：WO2010120725A3
公开(公告)日：2011-01-13
申请号：PCT/US2010030823
申请日：2010-04-13
申请人： APPLIED MATERIALS INC , FOAD MAJEED A , MOFFATT STEPHEN
发明人： FOAD MAJEED A , MOFFATT STEPHEN
IPC分类号： G11B5/84 , G11B5/73 , G11B5/82
CPC分类号： G03B27/42 , G11B5/8404 , H01F10/187 , H01F41/34
摘要： A method and apparatus for manufacturing magnetic storage media is provided. A structural substrate is coated with a magnetically active material, and a magnetic pattern is formed in the magnetically active material by treating portions of the material with energy from a laser, e-beam, or focused ion beam. The beam may be divided into a packet of beamlets by passing the beam through a divider, which may be a diffraction grating for laser energy, a thin film single crystal for electrons, or a perforated plate for ions, or the beam may be generated by an array of emitters. The beamlets are then focused to a desired dimension and distribution by optics or electric fields. The resulting beam packet may be shaped further by passing through an aperture of any desired shape. The resulting beam may be applied sequentially to exposure zones to treat an entire substrate or plurality of substrates.
摘要翻译：提供了一种用于制造磁存储介质的方法和设备。用磁性活性材料涂覆结构衬底，通过用来自激光器，电子束或聚焦离子束的能量处理材料的一部分，在磁性活性材料中形成磁性图案。可以通过使光束通过分隔器（其可以是用于激光能量的衍射光栅，用于电子的薄膜单晶或用于离子的多孔板）来将光束分成一束小光束，或者光束可以通过一系列发射器。然后通过光学或电场将子束聚焦到期望的尺寸和分布。所得到的束束可以通过穿过任何期望形状的孔而进一步成形。所产生的光束可以被顺序施加到曝光区以处理整个基板或多个基板。

5. 发明申请

WO2012177743A3 NOVEL THERMAL PROCESSING APPARATUS 审中-公开
标题翻译：新型热处理装置
公开(公告)号：WO2012177743A3
公开(公告)日：2013-04-04
申请号：PCT/US2012043323
申请日：2012-06-20
申请人： APPLIED MATERIALS INC , MOFFATT STEPHEN , HOLMGREN DOUGLAS E , HOWELLS SAMUEL C , TONG EDRIC , ADAMS BRUCE E , LI JIPING , HUNTER AARON MUIR
发明人： MOFFATT STEPHEN , HOLMGREN DOUGLAS E , HOWELLS SAMUEL C , TONG EDRIC , ADAMS BRUCE E , LI JIPING , HUNTER AARON MUIR
IPC分类号： H01L21/324 , H01L21/26
CPC分类号： H01L21/477 , B23K26/0006 , B23K26/0081 , B23K26/03 , B23K26/032 , B23K26/04 , B23K26/0608 , B23K26/0622 , B23K26/08 , B23K26/127 , B23K2201/40 , B23K2203/56 , H01L21/268 , H01S3/0057
摘要： The present invention generally relates to an optical system that is able to reliably deliver a uniform amount of energy across an anneal region contained on a surface of a substrate. The optical system is adapted to deliver, or project, a uniform amount of energy having a desired two-dimensional shape on a desired region on the surface of the substrate. An energy source for the optical system is typically a plurality of lasers, which are combined to form the energy field.
摘要翻译：本发明一般涉及能够在包含在基板的表面上的退火区域上可靠地输送均匀的能量的光学系统。光学系统适于在衬底的表面上的期望区域上传送或投影具有期望的二维形状的均匀量的能量。用于光学系统的能量源通常是多个激光器，其被组合以形成能量场。

6. 发明申请

WO2007103643B1 METHOD AND APPARATUS FOR THERMAL PROCESSING STRUCTURES FORMED ON A SUBSTRATE 审中-公开
标题翻译：在基片上形成的热处理结构的方法和装置
公开(公告)号：WO2007103643B1
公开(公告)日：2008-06-26
申请号：PCT/US2007062672
申请日：2007-02-23
申请人： APPLIED MATERIALS INC , MAYUR ABHILASH , YAM MARK , BALAKRISHNA AJIT , CAREY PAUL , JENNINGS DEAN , MOFFATT STEPHEN , SCHAFFER WILLIAM , LERNER ALEXANDER N , THOMAS TIMOTHY N , HUNTER AARON MUIR
发明人： MAYUR ABHILASH , YAM MARK , BALAKRISHNA AJIT , CAREY PAUL , JENNINGS DEAN , MOFFATT STEPHEN , SCHAFFER WILLIAM , LERNER ALEXANDER N , THOMAS TIMOTHY N , HUNTER AARON MUIR
IPC分类号： H01L21/76
CPC分类号： H01L21/823418 , H01L21/823425 , H01L21/823475
摘要： The present invention generally describes one ore more apparatuses and various methods that are used to perform an annealing process on desired regions of a substrate. In one embodiment, an amount of energy is delivered to the surface of the substrate to preferentially melt certain desired regions of the substrate to remove unwanted damage created from prior processing steps, more evenly distribute dopants in various regions of the substrate, and/or activate various regions of the substrate. The preferential melting processes will allow more uniform distribution of the dopants in the melted region, due to the increased diffusion rate and solubility of the dopant atoms in the molten region of the substrate. The creation of a melted region thus allows: 1) the dopant atoms to redistribute more uniformly, 2) defects created in prior processing steps to be removed, and 3) regions that have hyper-abrupt dopant concentrations to be formed.
摘要翻译：本发明总体上描述了用于在衬底的期望区域上执行退火工艺的一种或多种设备和各种方法。在一个实施方案中，一定量的能量被传递至基材表面以优先熔化基材的某些所需区域以去除由之前的处理步骤产生的不希望的损伤，更均匀地将掺杂剂分布在基材的各个区域中，和/或活化衬底的各个区域。由于掺杂剂原子在衬底的熔化区域中的扩散速率和溶解度增加，所以优先熔化过程将允许掺杂剂在熔化区域中更均匀的分布。因此，熔化区域的产生允许：1）掺杂剂原子更均匀地重新分布，2）在先前的工艺步骤中产生的待去除的缺陷，以及3）将形成具有超突变掺杂剂浓度的区域。

7. 发明申请

WO2012170567A3 PULSE CIRCULATOR 审中-公开
标题翻译：脉冲循环器
公开(公告)号：WO2012170567A3
公开(公告)日：2013-05-10
申请号：PCT/US2012041144
申请日：2012-06-06
申请人： APPLIED MATERIALS INC , MOFFATT STEPHEN
发明人： MOFFATT STEPHEN
IPC分类号： H01L21/268 , H01L21/324
CPC分类号： B23K26/0648 , B23K26/0006 , B23K26/0081 , B23K26/0626 , B23K26/064 , B23K26/0643 , B23K2203/56 , C30B13/22 , C30B35/00 , H01L21/67115
摘要： A method and apparatus for annealing semiconductor substrates is disclosed. The apparatus has a pulsed energy source that directs pulsed energy toward a substrate. A homogenizer increases the spatial uniformity of the pulsed energy. A pulse shaping system shapes the temporal profile of the pulsed energy. A pulse circulator may be selected using a bypass system. The pulse circulator allows a pulse of energy to circulate around a path of reflectors, and a partial reflector allows a portion of the pulse to exit the pulse circulator with each cycle. The pulse circulator may have delaying elements and amplifying elements to tailor the pulses exiting from the circulator.
摘要翻译：公开了半导体衬底退火的方法和装置。该装置具有将脉冲能量引向衬底的脉冲能量源。均化器增加了脉冲能量的空间均匀性。脉冲整形系统对脉冲能量的时间分布进行整形。可以使用旁路系统选择脉冲循环器。脉冲循环器允许能量脉冲围绕反射器的路径循环，并且部分反射器允许脉冲的一部分在每个周期内离开脉冲循环器。脉冲循环器可以具有延迟元件和放大元件以调节从循环器排出的脉冲。

8. 发明申请

WO2011066310A3 CRYSTALLIZATION PROCESSING FOR SEMICONDUCTOR APPLICATIONS 审中-公开
标题翻译：半导体应用的结晶处理
公开(公告)号：WO2011066310A3
公开(公告)日：2011-08-18
申请号：PCT/US2010057857
申请日：2010-11-23
申请人： APPLIED MATERIALS INC , MOFFATT STEPHEN
发明人： MOFFATT STEPHEN
IPC分类号： H01L21/26 , H01L31/042 , H01L31/18
CPC分类号： H01L21/02686 , C30B13/24 , C30B29/403 , H01L21/02532 , H01L21/02568 , H01L21/2636 , H01L21/268 , H01L29/685 , H01L31/1872 , H01L33/0095 , Y02E10/50 , Y02P70/521
摘要： A method and apparatus for forming a crystalline semiconductor layer on a substrate are provided. A semiconductor layer is formed by vapor deposition. A pulsed laser melt/recrystallization process is performed to convert the semiconductor layer to a crystalline layer. Laser, or other electromagnetic radiation, pulses are formed into a pulse train and uniformly distributed over a treatment zone, and successive neighboring treatment zones are exposed to the pulse train to progressively convert the deposited material to crystalline material.
摘要翻译：提供了一种在基板上形成晶体半导体层的方法和装置。通过气相沉积形成半导体层。进行脉冲激光熔融/再结晶工艺以将半导体层转变成晶体层。激光或其他电磁辐射脉冲形成脉冲序列并均匀地分布在处理区域上，并且连续的相邻处理区域暴露于脉冲序列以逐渐将沉积的材料转化为结晶材料。

9. 发明申请

WO2008021747A3 METHODS FOR SUBSTRATE SURFACE CLEANING SUITABLE FOR FABRICATING SILICON-ON-INSULATOR STRUCTURES 审中-公开
标题翻译：适用于制造绝缘体上硅结构的衬底表面清洁方法
公开(公告)号：WO2008021747A3
公开(公告)日：2008-06-19
申请号：PCT/US2007075119
申请日：2007-08-02
申请人： APPLIED MATERIALS INC , THAKUR RANDHIR P S , MOFFATT STEPHEN , HANSSON PER-OVE , GHANAYEM STEVE
发明人： THAKUR RANDHIR P S , MOFFATT STEPHEN , HANSSON PER-OVE , GHANAYEM STEVE
IPC分类号： H01L21/306 , H01L21/461
CPC分类号： H01L21/76254 , H01L21/02052
摘要： Methods for cleaning substrate surfaces utilized in SOI technology are provided. In one embodiment, the method for cleaning substrate surfaces includes providing a first substrate and a second substrate, wherein the first substrate has a silicon oxide layer formed thereon and a cleavage plane defined therein, performing a wet cleaning process on the surfaces of the first substrate and the second substrate, and bonding the cleaned silicon oxide layer to the cleaned surface of the second substrate.
摘要翻译：提供了SOI技术中使用的清洁衬底表面的方法。在一个实施例中，用于清洁衬底表面的方法包括提供第一衬底和第二衬底，其中第一衬底具有在其上形成的氧化硅层和限定在其中的解理平面，在第一衬底的表面上执行湿法清洁处理和第二衬底，并且将清洁的氧化硅层结合到第二衬底的清洁表面。

10. 发明申请

WO2013049142A3 APPARATUS AND METHOD FOR SPECKLE REDUCTION IN LASER PROCESSING EQUIPMENT 审中-公开
标题翻译：激光加工设备中减少光斑的装置和方法
公开(公告)号：WO2013049142A3
公开(公告)日：2013-05-23
申请号：PCT/US2012057246
申请日：2012-09-26
申请人： APPLIED MATERIALS INC , MOFFATT STEPHEN
发明人： MOFFATT STEPHEN
IPC分类号： H01L21/268 , H01L21/26
CPC分类号： G02B27/48 , B23K26/0622 , B23K26/0624 , B23K26/0626 , B23K26/0648 , F21V5/002 , F21V5/004 , F21V5/007 , G02B3/0056 , G02B5/021 , G02B5/0278 , G02B5/04 , G02B27/10 , H01L21/67115 , H01S3/0057
摘要： Embodiments described herein provide apparatus and methods for processing semiconductor substrates with uniform laser energy. A laser pulse or beam is directed to a spatial homogenizer, which may be a plurality of lenses arranged along a plane perpendicular to the optical path of the laser energy, an example being a microlens array. The spatially uniformized energy produced by the spatial homogenizer is then directed to a refractive medium that has a plurality of thicknesses. Each thickness of the plurality of thicknesses is different from the other thicknesses by at least the coherence length of the laser energy.
摘要翻译：本文描述的实施例提供了用于以均匀的激光能量处理半导体衬底的装置和方法。激光脉冲或光束被引导到空间均匀器，其可以是沿着垂直于激光能量的光路的平面布置的多个透镜，例如微透镜阵列。由空间均化器产生的空间均匀化的能量然后被引导到具有多个厚度的折射介质。多个厚度的每个厚度至少与激光能量的相干长度不同于其它厚度。

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