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1. 发明申请

WO2011017570A2 IN-LINE METROLOGY METHODS AND SYSTEMS FOR SOLAR CELL FABRICATION 审中-公开
标题翻译：用于太阳能电池制造的在线计量方法和系统
公开(公告)号：WO2011017570A2
公开(公告)日：2011-02-10
申请号：PCT/US2010/044618
申请日：2010-08-05
申请人： APPLIED MATERIALS, INC. , MANENS, Antoine P. , SHIU, Ting-Ruei , SHAMOUN, Bassam , HSU, Wei-Yung , THOTHADRI, Manivannan
发明人： MANENS, Antoine P. , SHIU, Ting-Ruei , SHAMOUN, Bassam , HSU, Wei-Yung , THOTHADRI, Manivannan
IPC分类号： H01L31/18 , H01L31/042 , B23K26/36 , H01S3/10
CPC分类号： B23K26/048 , B23K26/032 , B23K26/0673 , B23K26/082 , B23K26/083 , B23K26/364 , B23K26/40 , B23K26/705 , B23K2203/172 , H01L31/046 , H01L31/0463 , Y02E10/50
摘要： In-line metrology methods and systems for use with laser-scribing systems used in solar-cell fabrication are disclosed. Such methods and systems can involve a variety of components, for example, a device for measuring the amount of power input to a laser, a power meter for measuring laser output power, a beam viewer for measuring aspects of a laser beam, a height sensor for measuring a workpiece height, a microscope for measuring workpiece features formed by the laser-scribing system, and a system for monitoring a laser-scribing system and annunciating a warning(s) and/or an error message(s) when operational limits are exceeded. In-line metrology methods can also include the processing of output beam reflections so as to track beam drift over time and/or provide for focusing of an imaging device.
摘要翻译：公开了用于太阳能电池制造中使用的激光划线系统的在线测量方法和系统。这样的方法和系统可以涉及各种部件，例如用于测量输入到激光器的功率量的装置，用于测量激光输出功率的功率计，用于测量激光束的方面的光束观察器，高度传感器用于测量工件高度的显微镜，用于测量由激光划线系统形成的工件特征的显微镜，以及用于监视激光划线系统的系统，并且当操作限制为...时，发出警告和/或错误消息超标。在线测量方法还可以包括输出光束反射的处理，以便随时间跟踪光束漂移和/或提供成像装置的聚焦。

2. 发明申请

WO2011017572A2 LASER MODULES AND PROCESSES FOR THIN FILM SOLAR PANEL LASER SCRIBING 审中-公开
标题翻译：激光模块和薄膜太阳能电池板激光扫描的工艺
公开(公告)号：WO2011017572A2
公开(公告)日：2011-02-10
申请号：PCT/US2010/044620
申请日：2010-08-05
申请人： APPLIED MATERIALS, INC. , MANENS, Antoine, P. , LEI, Wei-Sheng , HSU, Wei-Yung , SHAMOUN, Bassam , WANG, Yan
发明人： MANENS, Antoine, P. , LEI, Wei-Sheng , HSU, Wei-Yung , SHAMOUN, Bassam , WANG, Yan
IPC分类号： H01L31/18 , H01L31/042 , H01S3/10 , B23K26/36
CPC分类号： H01L31/18 , B23K26/0673 , B23K26/082 , B23K26/364
摘要： Laser systems for laser scribing are provided. The systems include a remote module coupled to a laser module through a cable. The remote module includes a controller and a chiller. The laser module has at least a laser source and a cooling plate. The laser module is operable to remove material from at least a portion of a workpiece. The systems also include a plurality of termination modules coupled to the laser module through a plurality of optical fibers. Each of the termination modules includes a mechanical interface. The mechanical interface is coupled to a respective optical fiber. The systems further include a plurality of scanning devices operable to control a position of the output from the laser. Each of the scanning devices is coupled to a respective mechanical interface.
摘要翻译：提供激光划线的激光系统。该系统包括通过电缆耦合到激光模块的远程模块。远程模块包括控制器和冷却器。激光模块至少具有激光源和冷却板。激光模块可操作以从工件的至少一部分去除材料。该系统还包括通过多根光纤耦合到激光模块的多个端接模块。每个终端模块包括机械接口。机械接口耦合到相应的光纤。该系统还包括可操作以控制来自激光器的输出位置的多个扫描装置。每个扫描装置耦合到相应的机械接口。

3. 发明申请

WO2009126907A2 LASER-SCRIBING PLATFORM AND HYBRID WRITING STRATEGY 审中-公开
标题翻译：激光扫描平台和混合写作策略
公开(公告)号：WO2009126907A2
公开(公告)日：2009-10-15
申请号：PCT/US2009/040241
申请日：2009-04-10
申请人： APPLIED MATERIALS, INC. , KRISHNASWAMI, Sriram , KURITA, Shinichi , SHAMOUN, Bassam , JOHNSTON, Benjamin, M. , WHITE, John, M. , FAN, Jiafa , HUANG, Inchen , MANENS, Antoine, P. , LEI, Wei-Sheng , HSU, Wei-Yung
发明人： KRISHNASWAMI, Sriram , KURITA, Shinichi , SHAMOUN, Bassam , JOHNSTON, Benjamin, M. , WHITE, John, M. , FAN, Jiafa , HUANG, Inchen , MANENS, Antoine, P. , LEI, Wei-Sheng , HSU, Wei-Yung
IPC分类号： B23K26/36 , B23K26/04 , B23K26/08 , B23K26/00 , H01L31/04 , G02B26/10
CPC分类号： B23K26/067 , B23K26/0676 , B23K26/082 , B23K26/083 , B23K26/16 , B23K26/361 , B23K26/364 , B23K26/40 , B23K2201/34 , B23K2201/36 , B23K2203/16 , B23K2203/172
摘要： Laser scribing can be performed on a workpiece (104) such as substrates with layers formed thereon for use in a solar panel without need to rotate the workpiece (104) during the scribing process. A series of lasers (602, 622) can be used to concurrently remove material from multiple positions on the workpiece (104). Each laser (602, 622) can have at least one scanning device (614, 630, 632) positioned along a beam path thereof in order to adjust a position of the laser output relative to the workpiece (104). By adjusting the beam or pulse positions using the scanning devices (614, 630, 632) while translating the workpiece (104), substantially any pattern can be scribed into at least one layer of the workpiece (104) without the need for any rotation of the workpiece (104).
摘要翻译：可以对工件（104）进行激光划线，例如在其上形成有层的基板，用于太阳能电池板，而不需要在划线过程中旋转工件（104）。可以使用一系列激光器（602,622）来同时从工件（104）上的多个位置移除材料。每个激光器（602,622）可以具有沿其光束路径定位的至少一个扫描装置（614,630,632），以便调节激光输出相对于工件（104）的位置。通过在平移工件（104）的同时通过使用扫描装置（614,630,632）调节光束或脉冲位置，基本上任何图案都可以划分成工件（104）的至少一层，而不需要任何旋转工件（104）。

4. 发明申请

WO2010144778A2 METHODS AND SYSTEMS FOR LASER-SCRIBED LINE ALIGNMENT 审中-公开
标题翻译：激光线对准的方法和系统
公开(公告)号：WO2010144778A2
公开(公告)日：2010-12-16
申请号：PCT/US2010/038275
申请日：2010-06-11
申请人： APPLIED MATERIALS, INC. , SHAMOUN, Bassam , MANENS, Antoine P.
发明人： SHAMOUN, Bassam , MANENS, Antoine P.
IPC分类号： H01L31/18 , H01L31/042
CPC分类号： B23K26/03 , B23K26/032 , B23K26/0648 , B23K26/0665 , B23K26/0673 , B23K26/082 , B23K26/0838 , B23K26/16 , B23K26/36 , B23K26/364 , B23K26/40 , B23K2201/40 , B23K2203/172 , B23K2203/50
摘要： Methods and systems for laser-scribing lines within a controlled separation from previously-formed lines are provided. A laser-scribing method includes providing a workpiece (104) having a plurality of previously-scribed lines (P11, P12, P12), forming a first adjacent scribed line (P21) adjacent to a first previously-scribed line (P11), using an imaging device (322) to measure a position of a previously-scribed line (P11, P12, P13), using the imaging device (322) to measure a position of the first adjacent scribed line (P21), and using the measured positions to control the formation of a second adjacent scribed line (P22) adjacent to a second previously-scribed line (P12).
摘要翻译：提供了在先前形成的线路的受控分离之内激光划线的方法和系统。激光划线方法包括：提供具有多条预先刻划的线（P11，P12，P12）的工件（104），与第一先前划线（P11）相邻地形成第一相邻划线（P21），使用使用成像装置（322）测量先前划线（P11，P12，P13）的位置以测量第一相邻划线（P21）的位置并使用测量位置的成像装置（322）以控制与第二先前划线（P12）相邻的第二相邻划线（P22）的形成。

5. 发明申请

WO2009126910A2 LASER SCRIBE INSPECTION METHODS AND SYSTEMS 审中-公开
标题翻译：激光扫描检测方法和系统
公开(公告)号：WO2009126910A2
公开(公告)日：2009-10-15
申请号：PCT/US2009/040249
申请日：2009-04-10
申请人： APPLIED MATERIALS, INC. , MANENS, Antoine, P. , SHAMOUN, Bassam , SULLIVAN, Jeffrey, S. , WHITE, John , SHIRK, Michael
发明人： MANENS, Antoine, P. , SHAMOUN, Bassam , SULLIVAN, Jeffrey, S. , WHITE, John , SHIRK, Michael
IPC分类号： H01L21/78 , H01L31/042
CPC分类号： H01L31/03921 , H01L31/022425 , Y02E10/50
摘要： Methods and systems for use during laser-scribing of a workpiece (104) are provided. Some of the methods and systems provided use an imaging device (320, 388, 448, 472, 506, 722, 742, 814) to control the formation of a laser-scribed feature so as to more closely align with a previously-formed feature. Some of the methods and systems provided use an imaging device (320, 388, 448, 472, 506, 722, 742, 814) for inspection of a laser-scribed feature and/or process control. Some of the methods and systems provided use an imaging device to (320, 388, 448, 472, 506, 722, 742, 814) detect and avoid a workpiece defect (826A, 826B) during the formation of a laser-scribed feature.
摘要翻译：提供了在工件（104）的激光划线期间使用的方法和系统。提供的一些方法和系统使用成像装置（320,388,448,472,506,722,742,814）来控制激光划线特征的形成，以便与先前形成的特征更紧密地对准。提供的一些方法和系统使用用于检查激光划线特征和/或过程控制的成像装置（320,388,448,472,506,722,742,814）。所提供的方法和系统中的一些使用成像装置（320,388,438,472,506,722,742,814）在形成激光划线特征期间检测并避免工件缺陷（826A，826B）。

6. 发明申请

WO2008156626A1 METHODS AND APPARATUS FOR DEPOSITING INK ONTO SUBSTRATES 审中-公开
标题翻译：用于沉积在基材上的方法和装置
公开(公告)号：WO2008156626A1
公开(公告)日：2008-12-24
申请号：PCT/US2008/007324
申请日：2008-06-12
申请人： APPLIED MATERIALS, INC. , SHAMOUN, Bassam , WHITE, John, M. , SHANG, Quanyuan , KURITA, Shinichi
发明人： SHAMOUN, Bassam , WHITE, John, M. , SHANG, Quanyuan , KURITA, Shinichi
IPC分类号： B41J2/15
CPC分类号： B41J2/2132
摘要： Embodiments of an ink jet printing system include a motion stage adapted to move a substrate having a display object in a printing direction and a first printing assembly mounted over the motion stage including a set of print heads aligned and arranged consecutively in the printing direction such that the display object moves under the print heads sequentially. Embodiments of a method of ink jet printing include moving a substrate under the print heads of printing assembly sequentially in a printing direction, activating alternate ink jetting channels within each print head of the first printing assembly, activating corresponding channels within adjacent print heads in the first printing assembly alternately, and depositing ink in alternating sub-pixels within one or more pixels on the substrate.
摘要翻译：喷墨打印系统的实施例包括适于在打印方向上移动具有显示对象的基板的运动台和安装在运动台上的第一印刷组件，该第一印刷组件包括在打印方向上连续排列和排列的一组打印头，使得显示对象顺序地在打印头下移动。喷墨打印方法的实施例包括在打印方向上顺序地移动印刷组件的打印头下的基板，激活第一印刷组件的每个打印头内的交替喷墨通道，在第一印刷组件的相邻打印头内激活相应的通道交替地印刷组件，并且在基板上的一个或多个像素内的交替子像素中沉积墨。

7. 发明申请

WO2009126901A3 DYNAMIC SCRIBE ALIGNMENT FOR LASER SCRIBING, WELDING OR ANY PATTERNING SYSTEM 审中-公开
公开(公告)号：WO2009126901A3
公开(公告)日：2009-10-15
申请号：PCT/US2009/040232
申请日：2009-04-10
申请人： APPLIED MATERIALS, INC. , INAGAWA, Makoto , KURITA, Shinichi , SHAMOUN, Bassam , KRISHNASWAMI, Sriram , SHIRK, Michael D. , CUNNINGHAM, Kevin L.
发明人： INAGAWA, Makoto , KURITA, Shinichi , SHAMOUN, Bassam , KRISHNASWAMI, Sriram , SHIRK, Michael D. , CUNNINGHAM, Kevin L.
IPC分类号： H01L21/78 , H01L31/042
摘要： Methods and systems for improving the alignment between a previously formed feature and a subsequently formed feature are provided. An exemplary method can include laser scribing a workpiece (104, 550) having a previously formed first feature. The exemplary method includes imaging the workpiece (104, 550) with an imaging device (320, 420, 554, 640) so as to capture a plurality of positions of the first feature on the workpiece (104, 550) relative to the laser-scribing device (100). The exemplary method further includes using the captured positions to align output from the laser-scribing device (100) in order to form a second feature on the workpiece (104, 550) at a controlled distance from the first feature.

8. 发明申请

WO2007120967A3 RF POWERED TARGET FOR INCREASING DEPOSITION UNIFORMITY IN SPUTTERING SYSTEMS 审中-公开
公开(公告)号：WO2007120967A3
公开(公告)日：2007-10-25
申请号：PCT/US2007/061630
申请日：2007-02-05
申请人： APPLIED MATERIALS, INC. , SHAMOUN, Bassam
发明人： SHAMOUN, Bassam
IPC分类号： C23C14/00 , C23C14/32
摘要： A method and apparatus for sputter depositing a film on a substrate is disclosed. By providing a superimposed RF bias over a DC bias, plasma ionization is increased. In order to increase the resistive load across the substrate, an impedance circuit is provided between the substrate and the susceptor. The impedance circuit allows an insulating substrate to effectively function as an anode and connect to ground.

9. 发明申请

WO2009126899A2 LASER-SCRIBING PLATFORM 审中-公开
标题翻译：激光扫描平台
公开(公告)号：WO2009126899A2
公开(公告)日：2009-10-15
申请号：PCT/US2009/040228
申请日：2009-04-10
申请人： APPLIED MATERIALS, INC. , KRISHNASWAMI, Sriram , KURITA, Shinichi , SHAMOUN, Bassam , JOHNSTON, Benjamin, M. , WHITE, John, M. , FAN, Jiafa , HUANG, Inchen
发明人： KRISHNASWAMI, Sriram , KURITA, Shinichi , SHAMOUN, Bassam , JOHNSTON, Benjamin, M. , WHITE, John, M. , FAN, Jiafa , HUANG, Inchen
IPC分类号： B23K26/38 , H01L21/78
CPC分类号： B23K26/0838 , B23K26/082 , B23K26/364 , B23K26/40 , B23K2203/172
摘要： Laser-scribing systems (100) and translation stages (102) operable to support a workpiece (104) during laser scribing are provided. A laser-scribing system (100) includes a base section, a bed (102) supported by the base section, a laser (202, 302, 442), a first driving mechanism (114, 116) operable to move a workpiece (104) longitudinally along the bed (102), and a second driving mechanism (134, 136, 522, 524). The bed (102) comprises a movable section (554, 620) configured to translate with respect to the base section. The movable section (554, 620) comprises a gap to allow a laser beam to pass through. The laser (202, 302, 442) is positioned to direct the laser beam through the gap. The second driving mechanism (134, 136, 532, 524) is operable to laterally translate the laser (202, 320, 442) and the movable section (554, 620) in order to scribe a pattern on the workpiece (104).
摘要翻译：提供了在激光划线期间可操作以支撑工件（104）的激光划线系统（100）和平移台（102）。激光划线系统（100）包括基部，由基部支撑的床（102），激光器（202,302,442），可操作以移动工件（104）的第一驱动机构（114,116））沿着床（102）纵向延伸，以及第二驱动机构（134,136,522,524）。床（102）包括被配置为相对于基部部分平移的可移动部分（554,620）。可移动部分（554,620）包括允许激光束通过的间隙。激光器（202,302,442）被定位成将激光束引导通过间隙。第二驱动机构（134,136,532,524）可操作以横向平移激光器（202,320,442）和可移动部分（554,620），以便在工件（104）上刻划图案。

10. 发明申请

WO2010080595A2 ILLUMINATION METHODS AND SYSTEMS FOR LASER SCRIBE DETECTION AND ALIGNMENT IN THIN FILM SOLAR CELL FABRICATION 审中-公开
标题翻译：在薄膜太阳能电池制造中激光扫描检测和对准的照明方法和系统
公开(公告)号：WO2010080595A2
公开(公告)日：2010-07-15
申请号：PCT/US2009/068694
申请日：2009-12-18
申请人： APPLIED MATERIALS, INC. , SHAMOUN, Bassam
发明人： SHAMOUN, Bassam
IPC分类号： H01L31/042 , H01L21/66
CPC分类号： H01L31/022425 , H01L21/67265 , H01L21/67288 , H01L21/67294 , H01L31/03921 , H01L31/046 , Y02E10/50
摘要： Combined illumination is used to detect the positions of features such as scribe lines in different layers of a workpiece (104, 454, 512, 604, 1506, 1520). Because combinations of layers of different material can scatter, reflect, scatter, and/or transmit light in different ways, combining and adjusting such illumination can allow positions of multiple features to be detected concurrently, such that the position of a feature being formed in one layer can be adjusted to a relative position with respect to a feature in another layer, even where those layers are of different materials with different optical properties.
摘要翻译：组合照明用于检测诸如工件（104,454,512,604,1506,1520）的不同层中的划线的特征位置。由于不同材料的层的组合可以以不同的方式散射，反射，散射和/或透射光，所以组合和调节这样的照明可以允许同时检测多个特征的位置，使得特征的位置形成在一个层可以相对于另一层中的特征调整到相对位置，即使那些层具有不同光学性质的不同材料。

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