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1. 发明公开

EP1019563A1 DUAL FREQUENCY EXCITATION OF PLASMA FOR FILM DEPOSITION 审中-公开
标题翻译：电影制作等离子体的双高频刺激
公开(公告)号：EP1019563A1
公开(公告)日：2000-07-19
申请号：EP98949780.5
申请日：1998-10-06
申请人： APPLIED KOMATSU TECHNOLOGY, INC. , Law, Kam S. , Robertson, Robert M. , Shang, Quanyuan , Olsen, Jeff , Sorensen, Carl
发明人： LAW, Kam, S. , ROBERTSON, Robert, M. , SHANG, Quanyuan , OLSEN, Jeff , SORENSEN, Carl
IPC分类号： C23C16/50 , H01J37/32
CPC分类号： H01J37/32165 , C23C16/5096 , C23C16/517
摘要： An apparatus deposits a high quality film onto a transparent substrate in a reactor. The transparent substrate may be made of glass, quartz or a polymer such as plastic. The transparent substrate is heated in a process chamber and a process gas stream is introduced into the process chamber. The apparatus generates a high frequency power output and a low frequency power output from a high frequency power supply and a low frequency power supply, respectively. The high frequency power output is generated at a frequency of about thirteen megahertz or more, and at a power from about one to five kilowatts, while the low frequency power output is generated at a frequency of about two megahertz or less, and at a power from about 300 to two kilowatts. The high frequency power output and the low frequency power output are superimposed and used to excite a plasma from the process gas stream at a pressure between about 0.4 Torr and 3 Torr, and at a temperature between about 250 °C and 450 °C to deposit a smooth thin film onto the transparent substrate.

2. 发明申请

WO2008013902A3 METHODS AND APPARATUS FOR IMPROVED MANUFACTURING OF COLOR FILTERS 审中-公开
标题翻译：用于改进彩色滤光片制造的方法和设备
公开(公告)号：WO2008013902A3
公开(公告)日：2008-09-12
申请号：PCT/US2007016831
申请日：2007-07-26
申请人： APPLIED MATERIALS INC , WHITE JOHN M , SHANG QUANYUAN
发明人： WHITE JOHN M , SHANG QUANYUAN
IPC分类号： B41J29/393 , B41J3/407
CPC分类号： B41J2/2128 , B41J25/003 , G02B5/201
摘要： Methods and apparatus are provided in which a substrate is aligned so that a longitudinal dimension of a plurality of sub-pixel wells formed on the substrate are substantially perpendicular to a printing direction. Ink is deposited in a subset of the sub-pixel wells via nozzles of a print head wherein each of a plurality of the nozzles deposits a plurality of ink drops in each of the subset of the sub-pixel wells. Numerous other aspects are disclosed.
摘要翻译：提供了一种方法和设备，其中衬底被对准，使得在衬底上形成的多个子像素阱的纵向尺寸基本垂直于印刷方向。通过印刷头的喷嘴将油墨沉积在亚像素井的子集中，其中多个喷嘴中的每一个在多个子像素井的子集中的每一个中沉积多个墨滴。披露了许多其他方面。

3. 发明申请

WO9919537A9 DUAL FREQUENCY EXCITATION OF PLASMA FOR FILM DEPOSITION 审中-公开
标题翻译：用于电影沉积的等离子体的双频激发
公开(公告)号：WO9919537A9
公开(公告)日：1999-07-29
申请号：PCT/US9820996
申请日：1998-10-06
申请人： APPLIED KOMATSU TECHNOLOGY INC , LAW KAM S , ROBERTSON ROBERT M , SHANG QUANYUAN , OLSEN JEFF , SORENSEN CARL
发明人： LAW KAM S , ROBERTSON ROBERT M , SHANG QUANYUAN , OLSEN JEFF , SORENSEN CARL
IPC分类号： C23C16/505 , C23C16/509 , C23C16/517 , H01J37/32 , H01L21/205 , C23C16/50
CPC分类号： H01J37/32165 , C23C16/5096 , C23C16/517
摘要： An apparatus deposits a high quality film onto a transparent substrate in a reactor. The transparent substrate may be made of glass, quartz or a polymer such as plastic. The transparent substrate is heated in a process chamber and a process gas stream is introduced into the process chamber. The apparatus generates a high frequency power output and a low frequency power output from a high frequency power supply and a low frequency power supply, respectively. The high frequency power output is generated at a frequency of about thirteen megahertz or more, and at a power from about one to five kilowatts, while the low frequency power output is generated at a frequency of about two megahertz or less, and at a power from about 300 to two kilowatts. The high frequency power output and the low frequency power output are superimposed and used to excite a plasma from the process gas stream at a pressure between about 0.4 Torr and 3 Torr, and at a temperature between about 250 DEG C and 450 DEG C to deposit a smooth thin film onto the transparent substrate.
摘要翻译：一种装置将高质量的膜沉积在反应器中的透明基板上。透明基材可以由玻璃，石英或聚合物如塑料制成。将透明基板在处理室中加热并将工艺气体流引入处理室。该装置分别从高频电源和低频电源产生高频功率输出和低频功率输出。高频功率输出以大约十三兆赫或更高的频率和大约一到五千瓦的功率产生，而低频功率输出是以大约2兆赫或更小的频率产生的约300至2千瓦。高频功率输出和低频功率输出被叠加并用于在约0.4Torr至3Torr之间的压力下和在约250℃至450℃的温度下从工艺气体流中激发等离子体以沉积在透明基板上的平滑薄膜。

4. 发明申请

WO2011028527A3 IN-SITU DEPOSITION OF BATTERY ACTIVE LITHIUM MATERIALS BY PLASMA SPRAYING 审中-公开
公开(公告)号：WO2011028527A3
公开(公告)日：2011-03-10
申请号：PCT/US2010/046498
申请日：2010-08-24
申请人： APPLIED MATERIALS, INC. , SHANG, Quanyuan , YANG, Lu , BROWN, Karl M. , OLGADO, Donald J., K. , PEBENITO, Victor , BOLANDI, Hooman , ISHIKAWA, Tetsuya , BACHRACH, Robert Z. , CHEN, Liang-Yuh
发明人： SHANG, Quanyuan , YANG, Lu , BROWN, Karl M. , OLGADO, Donald J., K. , PEBENITO, Victor , BOLANDI, Hooman , ISHIKAWA, Tetsuya , BACHRACH, Robert Z. , CHEN, Liang-Yuh
IPC分类号： C23C4/12 , C23C4/04 , C23C4/18 , B05D1/04 , B05D3/00 , B05D7/14
摘要： A method and apparatus for forming an electrochemical layer of a thin film battery is provided. A precursor mixture comprising precursor particles dispersed in a carrying medium is activated in an activation chamber by application of an electric field to ionize at least a portion of the precursor mixture. The activated precursor mixture is then mixed with a combustible gas mixture to add thermal energy to the precursor particles, converting them to nanocrystals, which deposit on a substrate. A second precursor may be blended with the nanocrystals as they deposit on the surface to enhance adhesion and conductivity

5. 发明申请

WO2006078702A3 APPARATUS AND METHOD FOR SUBSTRATE TREATMENT FOR MANUFACTURING OF COLOR FILTERS BY INKJET PRINTING SYSTEMS 审中-公开
标题翻译：喷墨打印系统制造彩色滤色片的基板处理设备及方法
公开(公告)号：WO2006078702A3
公开(公告)日：2009-04-09
申请号：PCT/US2006001716
申请日：2006-01-18
申请人： APPLIED MATERIALS INC , SZE FAN CHEUNG , SHANG QUANYUAN , WHITE JOHN M
发明人： SZE FAN CHEUNG , SHANG QUANYUAN , WHITE JOHN M
IPC分类号： B41J2/145 , A61B17/02 , A61B17/17 , A61F2/00 , A61F2/28 , A61F2/30 , A61F2/44 , A61F2/46
CPC分类号： G02F1/133516 , G02F1/133512
摘要： Apparatus and methods for treating a substrate of a flat panel display are provided. An inkjet printing system that includes a chemical compound application assembly that applies chemical compound(s) on a substrate of a flat panel display through a chemical compound applicator is provided. The inkjet printing system may also include a substrate support stage, a stage positioning system, and an inkjet printing module. The chemical compound applicator may have a width that substantially spans the substrate width. A method for treating a glass substrate and a black matrix thereon for a flat panel display prior to delivery of ink to the glass substrate by an inkjet printing system is also provided. The black matrix and glass substrate are exposed to a surface active compound which may modify the surface energy of the black matrix, the surface energy of the glass substrate, or both.
摘要翻译：提供了用于处理平板显示器的基板的设备和方法。提供了一种喷墨打印系统，其包括通过化学复合施加器在平板显示器的基板上施加化合物的化合物施加组件。喷墨打印系统还可以包括基板支撑台，台架定位系统和喷墨打印模块。化合物涂布器可以具有基本跨越基底宽度的宽度。还提供了一种用于在通过喷墨打印系统将墨水输送到玻璃基板之前用于处理平板显示器的玻璃基板和黑色矩阵的方法。黑色矩阵和玻璃基板暴露于表面活性化合物，其可以改变黑色基体的表面能，玻璃基底的表面能或二者的表面能。

6. 发明申请

WO2008144069A1 METHODS AND APPARATUS FOR INKJET PRINTING WITH MULTIPLE ROWS OF PRINT HEADS 审中-公开
标题翻译：用于打印头多个打印头的方法和装置
公开(公告)号：WO2008144069A1
公开(公告)日：2008-11-27
申请号：PCT/US2008/006507
申请日：2008-05-21
申请人： APPLIED MATERIALS, INC. , WHITE, John, M. , SZE, Fan-Cheung , SHANG, Quanyuan , KURITA, Shinichi , HONGBIN, Ji , JOZWIAK, Janusz , HUANG, Inchen , BEER, Emanuel
发明人： WHITE, John, M. , SZE, Fan-Cheung , SHANG, Quanyuan , KURITA, Shinichi , HONGBIN, Ji , JOZWIAK, Janusz , HUANG, Inchen , BEER, Emanuel
IPC分类号： B41J2/135
CPC分类号： B41J2/145 , B41J2/515 , B41J25/003 , B41J2202/09 , H01L51/0005
摘要： According to the present invention, multiple rows of nozzles within a print head may be arranged proximal to and offset from each other to facilitate inkjet printing. Print heads may comprise a single row of nozzles or may comprise a plurality of rows of nozzles. Each row of nozzles may be situated such that the immediately adjacent row of nozzles may be offset by a predetermined distance. In some embodiments, adjacent rows of nozzles may each print with the same color. In this way, adjacent offset rows of nozzles may be used in combination to dispense ink drops into sub-pixel wells in improved patterns and with improved ink distribution within the sub-pixel well. These offset print techniques may also enable tighter grouping of ink drops within a sub-pixel well and enable faster printing operations.
摘要翻译：根据本发明，打印头内的多排喷嘴可以布置成彼此靠近并且彼此偏离，以便于喷墨打印。打印头可以包括单排喷嘴，或者可以包括多排喷嘴。每排喷嘴可以被定位成使得紧邻的喷嘴排可以偏移预定距离。在一些实施例中，相邻排的喷嘴可以以相同的颜色打印。以这种方式，相邻的喷嘴排可以组合使用，以将墨滴以改进的图案分配到子像素阱中，并且改进子像素阱内的油墨分布。这些偏移打印技术还可以使得子像素内的墨滴更紧密地分组并且能够实现更快的打印操作。

7. 发明申请

WO2004112104A2 LOW TEMPERATURE PROCESS FOR TFT FABRICATION 审中-公开
标题翻译： TFT制造的低温工艺
公开(公告)号：WO2004112104A2
公开(公告)日：2004-12-23
申请号：PCT/US2004/017236
申请日：2004-06-01
申请人： APPLIED MATERIALS, INC. , HSIAO, Mark , YIM, Dong-Kil , TAKEHARA, Takako , SHANG, Quanyuan , HARSHBARGER, William, R. , KIM, Woong-Kwon , YUN, Duk-Chul , CHANG, You-Gyung
发明人： HSIAO, Mark , YIM, Dong-Kil , TAKEHARA, Takako , SHANG, Quanyuan , HARSHBARGER, William, R. , KIM, Woong-Kwon , YUN, Duk-Chul , CHANG, You-Gyung
IPC分类号： H01L21/00
CPC分类号： H01L29/66765 , H01L29/4908 , H01L29/78669 , H01L29/78678
摘要： Method of fabricating a thin-film transistor (TFT) in which a gate metal is deposited onto a substrate in order to form the gate of the thin-film transistor. The substrate may be an insulative substrate or a color filter. In a first method, the gate metal is subjected to an H 2 plasma. After subjecting the gate metal to an H 2 plasma, the gate insulating film is deposited onto the gate. In a second method, first and second layers of gate insulating film are respectively deposited on the gate at a first and second deposition rates. One layer is deposited under H 2 or argon dilution conditions and has improved insulating conditions while the other layer serves to lower the overall compressive stress of the dual layer gate insulator. In a third method, an n + silicon film is formed on a substrate by maintaining a flow of silane, phosphine and hydrogen gas into a processing chamber at substrate temperatures of about 300 °C or less.
摘要翻译：制造薄膜晶体管（TFT）的方法，其中栅极金属沉积到衬底上以便形成薄膜晶体管的栅极。衬底可以是绝缘衬底或滤色器。在第一种方法中，栅极金属经受H 2等离子体。在使栅极金属进入H 2等离子体之后，栅极绝缘膜沉积在栅极上。在第二种方法中，第一和第二栅极绝缘膜层分别以第一和第二沉积速率沉积在栅极上。在H2或氩稀释条件下沉积一层，并且具有改善的绝缘条件，而另一层用于降低双层栅极绝缘体的总体压应力。在第三种方法中，通过在约300℃或更低的衬底温度下保持硅烷，膦和氢气流入处理室，在衬底上形成n +硅膜。

8. 发明申请

WO2012026952A1 IN-SITU SYNTHESIS AND DEPOSITION OF BATTERY ACTIVE LITHIUM MATERIALS BY SPRAYING 审中-公开
标题翻译：电喷活性锂离子电池的现场合成与沉积
公开(公告)号：WO2012026952A1
公开(公告)日：2012-03-01
申请号：PCT/US2010/058493
申请日：2010-12-01
申请人： APPLIED MATERIALS, INC. , SHANG, Quanyuan , YANG, Lu , BROWN, Karl, M. , OLGADO, Donald, J., K. , PEBENITO, Victor , BOLANDI, Hooman , ISHIKAWA, Tetsuya , BACHRACH, Robert, Z. , CHEN, Liang-Yuh
发明人： SHANG, Quanyuan , YANG, Lu , BROWN, Karl, M. , OLGADO, Donald, J., K. , PEBENITO, Victor , BOLANDI, Hooman , ISHIKAWA, Tetsuya , BACHRACH, Robert, Z. , CHEN, Liang-Yuh
IPC分类号： H01M4/04 , H01M10/0525 , H01G9/04
CPC分类号： H01G11/50 , H01G11/06 , H01M4/0419 , H01M10/04 , Y02E60/13
摘要： A method and apparatus for forming an electrochemical layer of a thin film battery is provided. A liquid precursor mixture comprising electrochemically active metals is reacted with oxygen to form electrochemically active metal oxides, which are deposited in a layer on a substrate. Carbon may be added to the mixture to control energy input to the reaction and to provide adhesion and conductivity between crystals deposited on the substrate. Conversion of precursors to deposition crystals may be accomplished in a two-stage process.
摘要翻译：提供一种用于形成薄膜电池的电化学层的方法和装置。将包含电化学活性金属的液体前体混合物与氧气反应以形成沉积在基底上的层中的电化学活性金属氧化物。可以向混合物中加入碳以控制反应的能量输入并提供沉积在基底上的晶体之间的粘附和导电性。前体转化为沉积晶体可以在两阶段工艺中完成。

9. 发明申请

WO2009076249A3 METHODS AND APPARATUS FOR MEASURING DEPOSITED INK IN PIXEL WELLS ON A SUBSTRATE USING A LINE SCAN CAMERA 审中-公开
标题翻译：使用线扫描摄像机测量基板上像素井中沉积的油墨的方法和设备
公开(公告)号：WO2009076249A3
公开(公告)日：2009-08-20
申请号：PCT/US2008085775
申请日：2008-12-06
申请人： APPLIED MATERIALS INC , SHANG QUANYUAN , WHITE JOHN M
发明人： SHANG QUANYUAN , WHITE JOHN M
IPC分类号： G02F1/13 , G01N21/88 , G02F1/1335
CPC分类号： G01N21/95 , G01N2021/9513
摘要： Systems and methods for measuring deposited ink in a substrate are provided. The invention includes a light source adapted to transmit light through a deposited ink on a substrate, and a camera having a CCD sensor array wherein the camera is adapted to measure the amount of light that is transmitted through the deposited ink. Numerous other aspects are provided.
摘要翻译：提供了用于测量基底中的沉积墨水的系统和方法。本发明包括适于透过沉积在基底上的墨水的光源和具有CCD传感器阵列的照相机，其中照相机适于测量透过沉积墨水的光量。许多其他方面提供。

10. 发明申请

WO2009076248A1 SYSTEMS AND METHODS FOR IMPROVING MEASUREMENT OF LIGHT TRANSMITTANCE THROUGH INK DEPOSITED ON A SUBSTRATE 审中-公开
标题翻译：用于改善通过在基底上沉积的墨水的光传输测量的系统和方法
公开(公告)号：WO2009076248A1
公开(公告)日：2009-06-18
申请号：PCT/US2008/085774
申请日：2008-12-06
申请人： APPLIED MATERIALS, INC. , SHANG, Quanyuan , WHITE, John, M.
发明人： SHANG, Quanyuan , WHITE, John, M.
IPC分类号： G02F1/1335 , G02F1/13 , B41J2/01
CPC分类号： G01N21/59 , G01J3/0254 , G01J2003/1213 , G02F1/1303 , G02F1/133516 , G02F2203/69
摘要： Systems, methods and apparatus for manufacturing color filters for flat panel displays are provided that include an inkjet printing system integrated with a light transmittance measurement system. The inkjet printing system includes a stage for supporting and moving a substrate past inkjet print heads adapted to deposit ink in pixel wells on the substrate. The light transmittance measurement system includes a sensor and a light source disposed on opposite sides of the substrate and adapted to determine the thickness of the ink deposited on the substrate. The light source is adapted to move with the sensor to allow different pixel wells containing deposited ink to be measured, and the stage includes at least one optical path to allow light from the light source to pass through the deposited ink to the sensor.
摘要翻译：提供了一种用于制造用于平板显示器的滤色器的系统，方法和装置，其包括与透光率测量系统集成的喷墨打印系统。喷墨打印系统包括用于支撑和移动基板的台架，该台架适用于在基板上的像素孔中沉积墨水的喷墨打印头。透光率测量系统包括设置在基板的相对侧上的传感器和光源，并且适于确定沉积在基板上的墨水的厚度。光源适于与传感器一起移动以允许测量包含沉积的墨的不同像素孔，并且该台包括至少一个光路，以允许来自光源的光通过沉积的墨通过传感器。

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