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1. 发明申请

WO2018228683A1 DEPOSITION APPARATUS FOR COATING A FLEXIBLE SUBSTRATE AND METHOD OF COATING A FLEXIBLE SUBSTRATE 审中-公开
公开(公告)号：WO2018228683A1
公开(公告)日：2018-12-20
申请号：PCT/EP2017/064545
申请日：2017-06-14
申请人： APPLIED MATERIALS, INC. , DEPPISCH, Thomas , ULRICH, Jürgen , SCHLÄFER, Susanne , HEIN, Stefan , LORENZ, Stefan , WENDELMUTH, Walter , STICKSEL-WEIS, Björn , HACKER, Volker , DIETER, Torsten Bruno , MORRISON, Neil , HERMANNS, Uwe , WAGNER, Dirk , KUKLA, Reiner , KURTHEN, Christof , METT, Valerius
发明人： DEPPISCH, Thomas , ULRICH, Jürgen , SCHLÄFER, Susanne , HEIN, Stefan , LORENZ, Stefan , WENDELMUTH, Walter , STICKSEL-WEIS, Björn , HACKER, Volker , DIETER, Torsten Bruno , MORRISON, Neil , HERMANNS, Uwe , WAGNER, Dirk , KUKLA, Reiner , KURTHEN, Christof , METT, Valerius
IPC分类号： C23C14/56 , C23C14/50 , C23C16/54 , C23C16/458 , C23C16/44 , C23C16/46 , C23C14/54 , B65H23/24
CPC分类号： C23C14/562 , B65H20/02 , B65H2301/51145 , B65H2406/111 , C23C14/505 , C23C14/541 , C23C14/564 , C23C16/4409 , C23C16/458 , C23C16/466 , C23C16/545
摘要： A deposition apparatus (100) for coating a flexible substrate (10) with a stack of layers is described. The deposition apparatus comprises: a first spool chamber (110) housing a storage spool for providing the flexible substrate; a deposition chamber (120) arranged downstream from the first spool chamber and comprising a coating drum (122) for guiding the flexible substrate past a plurality of deposition units (121); a second spool chamber arranged downstream from the deposition chamber (120) and housing a wind-up spool for winding the flexible substrate thereon after deposition; and a roller assembly configured to transport the flexible substrate (10) along a partially convex and partially concave substrate transportation path from the first spool chamber to the second spool chamber. Further, a method of coating a flexible substrate, particularly with the described deposition apparatus, is described.

2. 发明申请

WO2017202444A1 METHOD OF MANUFACTURING A BATTERY, VACUUM PROCESSING APPARATUS AND BATTERY 审中-公开
标题翻译：制造电池的方法，真空处理装置和电池
公开(公告)号：WO2017202444A1
公开(公告)日：2017-11-30
申请号：PCT/EP2016/061567
申请日：2016-05-23
申请人： APPLIED MATERIALS, INC. , DIETER, Torsten Bruno , HEIN, Stefan , DEPPISCH, Thomas
发明人： DIETER, Torsten Bruno , HEIN, Stefan , DEPPISCH, Thomas
IPC分类号： H01M4/04 , H01M4/38 , H01M4/40
CPC分类号： H01M4/0421 , H01M2/1673 , H01M4/0407 , H01M10/0431 , H01M10/0525 , H01M10/0587
摘要： The present disclosure provides a method of manufacturing a battery. The method includes providing a separator film, processing the separator film by at least two of the actions of depositing an anode material layer onto a first side of the separator film, depositing a cathode material layer onto a second side of the separator film opposite to the first side, coating the anode material layer with an anode contact, and coating the cathode material layer with an anode contact. At least two of these actions are carried out without a break in vacuum in the vacuum processing environment.
摘要翻译：本公开提供了一种制造电池的方法。该方法包括提供分隔膜，通过将阳极材料层沉积到分隔膜的第一侧上的操作中的至少两种来处理分隔膜，将阴极材料层沉积到分隔膜的与第一侧相反的第二侧上第一侧，用阳极触点涂覆阳极材料层，并用阳极触点涂覆阴极材料层。这些行为中至少有两个是在真空处理环境中没有真空中断的情况下进行的。

3. 发明申请

WO2017207053A1 GUIDING DEVICES AND WEB COATING PROCESS 审中-公开
标题翻译：指导设备和网涂工艺
公开(公告)号：WO2017207053A1
公开(公告)日：2017-12-07
申请号：PCT/EP2016/062539
申请日：2016-06-02
申请人： APPLIED MATERIALS, INC. , METT, Valerius , DEPPISCH, Thomas , WHITE, John M. , HEIN, Stefan , BUSCHBECK, Wolfgang
发明人： METT, Valerius , DEPPISCH, Thomas , WHITE, John M. , HEIN, Stefan , BUSCHBECK, Wolfgang
IPC分类号： C23C14/56 , B65H23/00
CPC分类号： C23C14/562 , B65H20/14 , B65H2406/361 , B65H2801/87
摘要： A roller device (100) for guiding a web (200) and for controlling the temperature of the web (200) in contact with the roller device in a web coating process under vacuum conditions is described. The roller device includes a curved surface (101) of the roller device (100) for contacting the web (200), wherein the curved surface (101) includes a web guiding region (103). The roller device further includes a group of gas outlets (104) in the curved surface (101) and a gas distribution system (105) for selectively providing the gas flow to a first subgroup of gas outlets (104) and for selectively preventing the gas from flowing to a second subgroup of the gas outlets (104). The roller device further includes a driving unit (110) for rotating the curved surface (101), wherein the curved surface (101) is adapted for inducing a movement of the web (200) upon rotation of the curved surface.
摘要翻译：描述了用于在真空条件下在幅材涂布工艺中引导幅材（200）并且用于控制幅材（200）与辊子设备接触的温度的辊子装置（100）。滚轮装置包括用于接触腹板（200）的滚轮装置（100）的弯曲表面（101），其中弯曲表面（101）包括腹板引导区域（103）。该滚轮装置还包括在弯曲表面（101）中的一组气体出口（104）和用于选择性地将气流提供给第一组气体出口（104）并用于选择性地防止气体从流动到气体出口（104）的第二子组。所述滚轮装置还包括用于旋转所述弯曲表面（101）的驱动单元（110），其中所述弯曲表面（101）适于在所述弯曲表面旋转时引起所述腹板（200）的移动。

4. 发明申请

WO2019105534A1 DEPOSITION APPARATUS, METHOD OF COATING A FLEXIBLE SUBSTRATE AND FLEXIBLE SUBSTRATE HAVING A COATING 审中-公开
公开(公告)号：WO2019105534A1
公开(公告)日：2019-06-06
申请号：PCT/EP2017/080694
申请日：2017-11-28
申请人： APPLIED MATERIALS, INC. , HABERKORN, Edgar , LORENZ, Stefan , HEIN, Stefan , MORRISON, Neil , KUKLA, Reiner , KURTHEN, Christof , DEPPISCH, Thomas
发明人： HABERKORN, Edgar , LORENZ, Stefan , HEIN, Stefan , MORRISON, Neil , KUKLA, Reiner , KURTHEN, Christof , DEPPISCH, Thomas
IPC分类号： C23C14/06 , C23C14/34 , C23C14/56 , C23C14/58
摘要： A deposition apparatus (100) for coating a flexible substrate (10) is described. The deposition apparatus includes a first spool chamber (110) housing a storage spool (112) for providing the flexible substrate (10), a deposition chamber (120) arranged downstream from the first spool chamber (110), and a second spool chamber (150) arranged downstream from the deposition chamber (120) and housing a wind-up spool (152) for winding the flexible substrate (10) thereon after deposition. The deposition chamber (120) includes a coating drum (122) for guiding the flexible substrate past a plurality of deposition units (121) including at least one deposition unit (124) having a graphite target (125). Further, the deposition chamber (120) includes a coating treatment device (160) configured to densify a layer deposited on the flexible substrate.

5. 发明申请

WO2018149510A1 DEPOSITION APPARATUS FOR COATING A FLEXIBLE SUBSTRATE AND METHOD OF COATING A FLEXIBLE SUBSTRATE 审中-公开
公开(公告)号：WO2018149510A1
公开(公告)日：2018-08-23
申请号：PCT/EP2017/053790
申请日：2017-02-20
申请人： APPLIED MATERIALS, INC. , METT, Valerius , DEPPISCH, Thomas , HEIN, Stefan , ULRICH, Jürgen , KURTHEN, Christof
发明人： METT, Valerius , DEPPISCH, Thomas , HEIN, Stefan , ULRICH, Jürgen , KURTHEN, Christof
IPC分类号： C23C14/56 , C23C16/54 , C23C16/44
CPC分类号： C23C14/562 , C23C14/564 , C23C14/566 , C23C16/4409 , C23C16/545
摘要： A deposition apparatus (100) for coating a flexible substrate (10) with at least one layer is described. The deposition apparatus comprises: a first spool chamber (110) configured for housing a storage spool for providing the flexible substrate; a first deposition chamber (120) arranged downstream from the first spool chamber and comprising a first coating drum (122) configured for guiding the flexible substrate past a first plurality of deposition units (121); a second deposition chamber (140) arranged downstream from the first deposition chamber (120) and comprising a second coating drum (142) configured for guiding the flexible substrate past a second plurality of deposition units (141); a second spool chamber arranged downstream from the second deposition chamber (140) and configured for housing a wind-up spool for winding the flexible substrate thereon after deposition; and a roller assembly configured to transport the flexible substrate (10) along a partially convex and partially concave substrate transportation path from the first spool chamber to the second spool chamber. Further, a method of coating a flexible substrate, particularly with the described deposition apparatus, is described.

6. 发明申请

WO2018001523A1 DEPOSITION APPARATUS FOR COATING A FLEXIBLE SUBSTRATE AND METHOD OF COATING A FLEXIBLE SUBSTRATE 审中-公开
标题翻译：涂覆柔性基板的沉积设备和涂覆柔性基板的方法
公开(公告)号：WO2018001523A1
公开(公告)日：2018-01-04
申请号：PCT/EP2016/065558
申请日：2016-07-01
申请人： APPLIED MATERIALS, INC. , DEPPISCH, Thomas , HEIN, Stefan , MORRISON, Neil , KUKLA, Reiner , KURTHEN, Christof , SCHLÄFER, Susanne , LORENZ, Stefan , WAGNER, Dirk , METT, Valerius , HACKER, Volker , HERMANNS, Uwe , STICKSEL-WEIS, Björn , WENDENMUTH, Walter , ULRICH, Jürgen
发明人： DEPPISCH, Thomas , HEIN, Stefan , MORRISON, Neil , KUKLA, Reiner , KURTHEN, Christof , SCHLÄFER, Susanne , LORENZ, Stefan , WAGNER, Dirk , METT, Valerius , HACKER, Volker , HERMANNS, Uwe , STICKSEL-WEIS, Björn , WENDENMUTH, Walter , ULRICH, Jürgen
IPC分类号： C23C14/08 , C23C14/10 , C23C14/34 , C23C14/56 , B08B7/00
CPC分类号： C23C14/562 , B08B7/0028 , C23C14/086 , C23C14/10 , C23C14/34 , C23C14/564
摘要： A deposition apparatus (100) for coating a flexible substrate (10) with a stack of layers is described. The deposition apparatus comprises: a first spool chamber (110) configured for housing a storage spool for providing the flexible substrate; a first deposition chamber (120) arranged downstream from the first spool chamber and comprising a first coating drum (122) configured for guiding the flexible substrate past a first plurality of deposition units (121); a second deposition chamber (140) arranged downstream from the first deposition chamber (120) and comprising a second coating drum (142) configured for guiding the flexible substrate past a second plurality of deposition units (141); a second spool chamber arranged downstream from the second deposition chamber (140) and configured for housing a wind-up spool for winding the flexible substrate thereon after deposition; and a roller assembly configured to transport the flexible substrate (10) along a partially convex and partially concave substrate transportation path from the first spool chamber to the second spool chamber. Further, a method of coating a flexible substrate, particularly with the described deposition apparatus, is described.
摘要翻译：描述了用于以柔性基板（10）涂覆层的沉积设备（100）。所述沉积设备包括：第一卷轴室（110），所述第一卷轴室构造成容纳用于提供所述柔性基板的存储卷轴; 第一沉积室（120），所述第一沉积室（120）布置在所述第一卷轴室的下游并且包括第一涂覆鼓（122），所述第一涂覆鼓被构造用于引导所述柔性基板经过第一多个沉积单元（121）布置在所述第一沉积室（120）下游并且包括第二涂布鼓（142）的第二沉积室（140），所述第二涂布鼓被配置用于引导所述柔性基材通过第二多个沉积单元（141）; 第二卷轴室，所述第二卷轴室布置在所述第二沉积室（140）的下游并且构造成用于容纳用于在沉积之后将柔性衬底卷绕在其上的卷绕卷轴; 以及辊子组件，所述辊子组件被构造成沿着部分凸出并且部分凹入的基板运送路径将所述柔性基板（10）从所述第一卷轴室运送至所述第二卷轴室。此外，描述了一种涂覆柔性基底的方法，特别是用所述的沉积设备进行涂覆的方法。

7. 发明申请

WO2019105533A1 DEPOSITION APPARATUS FOR COATING A FLEXIBLE SUBSTRATE, METHOD OF COATING A FLEXIBLE SUBSTRATE AND FLEXIBLE SUBSTRATE HAVING A COATING 审中-公开
公开(公告)号：WO2019105533A1
公开(公告)日：2019-06-06
申请号：PCT/EP2017/080692
申请日：2017-11-28
申请人： APPLIED MATERIALS, INC. , KURTHEN, Christof , HEIN, Stefan , KUKLA, Reiner , MORRISON, Neil , DEPPISCH, Thomas , LORENZ, Stefan , HABERKORN, Edgar
发明人： KURTHEN, Christof , HEIN, Stefan , KUKLA, Reiner , MORRISON, Neil , DEPPISCH, Thomas , LORENZ, Stefan , HABERKORN, Edgar
IPC分类号： C23C14/06 , C23C14/34 , C23C14/56
摘要： A deposition apparatus (100) for coating a flexible substrate (10) is described. The deposition apparatus comprises a first spool chamber (110) housing a storage spool (112) for providing the flexible substrate (10), a deposition chamber (120) arranged downstream from the first spool chamber (110), and a second spool chamber (150) arranged downstream from the deposition chamber (120) and housing a wind-up spool (152) for winding the flexible substrate (10) thereon after deposition. The deposition chamber (120) comprises a coating drum (122) for guiding the flexible substrate past a plurality of deposition units (121) including at least one deposition unit (124) having a graphite target (125). The coating drum is connected to a device (140) for applying an electrical potential to the coating drum.

8. 发明申请

WO2018192668A1 MATERIAL DEPOSITION ARRANGEMENT, A METHOD FOR DEPOSITING MATERIAL AND A MATERIAL DEPOSITION CHAMBER 审中-公开
公开(公告)号：WO2018192668A1
公开(公告)日：2018-10-25
申请号：PCT/EP2017/059505
申请日：2017-04-21
申请人： APPLIED MATERIALS, INC. , SCHNAPPENBERGER, Frank , DEPPISCH, Thomas , HEIN, Stefan , HOFMANN, Annabelle
发明人： SCHNAPPENBERGER, Frank , DEPPISCH, Thomas , HEIN, Stefan , HOFMANN, Annabelle
IPC分类号： C23C14/24 , C23C14/54 , C23C16/455 , F16K49/00 , C23C16/52
摘要： A material deposition arrangement chamber (1000) for depositing a material on a substrate is described. The material deposition arrangement chamber comprises a vacuum generation device (1060) and a material deposition arrangement (100) having a valve element (200), configured to regulate the material flow-through of the material to be deposited.

9. 发明申请

WO2010035130A2 EVAPORATOR FOR ORGANIC MATERIALS 审中-公开
标题翻译：有机材料蒸发器
公开(公告)号：WO2010035130A2
公开(公告)日：2010-04-01
申请号：PCT/IB2009/006990
申请日：2009-09-29
申请人： APPLIED MATERIALS, INC. , HEIN, Stefan , HOFFMANN, Gerd
发明人： HEIN, Stefan , HOFFMANN, Gerd
IPC分类号： C23C14/24
CPC分类号： B01B1/005 , B05D1/60 , B05D2252/02 , C23C14/12 , C23C14/243
摘要： An evaporator for vaporizing organic material is described. The evaporator includes a first chamber having a nozzle adapted to be directed to a substrate to be coated; at least one second chamber for vaporizing the organic material; at least one vapour channel for guiding vaporized organic material from the at least one second chamber to the first chamber; wherein the first chamber is adapted to provide vaporized organic material to the nozzle corresponding to a first virtual sublimation surface, and the at least one second chamber being adapted to provide during operation a second sublimation surface area, wherein the second sublimation surface area corresponds to at least 70 percent of the first virtual sublimation surface.
摘要翻译：描述了蒸发有机材料的蒸发器。蒸发器包括具有适于被引导到待涂覆的基底的喷嘴的第一腔室; 至少一个用于汽化有机材料的第二室; 用于将蒸发的有机材料从所述至少一个第二室引导到所述第一室的至少一个蒸气通道; 其中所述第一室适合于向所述喷嘴提供对应于第一虚拟升华表面的蒸发的有机材料，并且所述至少一个第二室适于在操作期间提供第二升华表面积，其中所述第二升华表面积对应于至少70％的第一个虚拟升华表面。

10. 发明申请

WO2018130300A1 LAYER SYSTEM ADAPTED FOR USE IN AN ELECTRO-OPTICAL DEVICE AND METHOD FOR MANUFACTURING A LAYER SYSTEM IN A CONTINUOUS ROLL-TO-ROLL PROCESS 审中-公开
公开(公告)号：WO2018130300A1
公开(公告)日：2018-07-19
申请号：PCT/EP2017/050692
申请日：2017-01-13
申请人： APPLIED MATERIALS, INC. , MORRISON, Neil , DIEGUEZ-CAMPO, Jose Manuel , LANDGRAF, Heike , HEIN, Stefan , STOLLEY, Tobias
发明人： MORRISON, Neil , DIEGUEZ-CAMPO, Jose Manuel , LANDGRAF, Heike , HEIN, Stefan , STOLLEY, Tobias
IPC分类号： C23C16/02 , C23C16/40 , C23C16/54 , C23C28/04 , G06F3/044 , H01L51/50
摘要： A layer system (100) adapted for use in an electro-optical device is described. The layer system includes a flexible substrate (101), a planarization layer (110) provided on the flexible substrate (101), and a transparent conductive oxide layer (120) provided on the planarization layer (110), wherein the planarization layer (110) is configured to encapsulate defects on the flexible substrate (101), and wherein the planarization layer is configured to covalently bind to the surface of the flexible substrate.

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