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1. 发明专利

AU2005270006B2 Microwave plasma nozzle with enhanced plume stability and heating efficiency 未知
公开(公告)号：AU2005270006B2
公开(公告)日：2009-01-08
申请号：AU2005270006
申请日：2005-07-07
申请人： AMARANTE TECHNOLOGIES INC , SAIAN CORP
发明人： LEE SANG HUN , KIM JAY JOONGSOO
IPC分类号： H05H1/46 , H05H1/24
摘要： Systems and methods for generating microwave plasma are disclosed. The present invention provides a microwave plasma nozzle (26) that includes a gas flow tube (40), and a rod-shaped conductor (34) that is disposed in the gas flow tube (40) and has a tip (33) near the outlet of the gas flow tube (40). A portion (35) of the rod-shaped conductor (34) extends into a microwave cavity (24) to receive microwaves passing in the cavity (24). These received microwaves are focused at the tip (33) to heat the gas into plasma. The microwave plasma nozzle (26) also includes a vortex guide (36) between the rod-shaped conductor (34) and the gas flow tube (40) imparting a helical shaped flow direction to the gas flowing through the tube (40). The microwave plasma nozzle (26) further includes a shielding mechanism (108) for reducing a microwave power loss through the gas flow tube (40).

2. 发明专利

DE602005026300D1 PLASMADÜSENGRUPPE ZUR BEREITSTELLUNG EINER GLEICHF 未知
公开(公告)号：DE602005026300D1
公开(公告)日：2011-03-24
申请号：DE602005026300
申请日：2005-07-21
申请人： AMARANTE TECHNOLOGIES INC , SAIAN CORP
发明人： LEE SANG HUN , KIM JAY JOONGSOO
IPC分类号： H05H1/46 , H01J37/32

3. 发明专利

AU2005269581B2 Plasma nozzle array for providing uniform scalable microwave plasma generation 未知
公开(公告)号：AU2005269581B2
公开(公告)日：2009-07-16
申请号：AU2005269581
申请日：2005-07-21
申请人： AMARANTE TECHNOLOGIES INC , SAIAN CORP
发明人： KIM JAY JOONGSOO , LEE SANG HUN
IPC分类号： H05H1/46 , H01J37/32
摘要： Microwave plasma nozzle array systems and methods for configuring the microwave plasma nozzle arrays are disclosed. The microwaves are transmitted to a microwave cavity in a specific manner and form an interference pattern that includes high-energy regions within the microwave cavity. The high-energy regions are controlled by the phases and the wavelengths of the microwaves. A plurality of nozzle elements is provided in the array. Each of the nozzle elements has a portion partially disposed in the microwave cavity and receives a gas for passing therethrough. The nozzle elements receive microwave energy from one of the high-energy regions. Each of the nozzle elements include a rod-shaped conductor having a tip that focuses the microwaves and a plasma is then generated using the received gas.

4. 发明专利

CA2574114A1 PLASMA NOZZLE ARRAY FOR PROVIDING UNIFORM SCALABLE MICROWAVEPLASMA GENERATION 未知
公开(公告)号：CA2574114A1
公开(公告)日：2006-02-09
申请号：CA2574114
申请日：2005-07-21
申请人： NORITSU KOKI CO LTD , AMARANTE TECHNOLOGIES INC
发明人： KIM JAY JOONGSOO , LEE SANG HUN
IPC分类号： H05H1/46 , H01J37/32
摘要： Microwave plasma nozzle array systems and methods for configuring the microwave plasma nozzle arrays are disclosed. The microwaves are transmitted to a microwave cavity in a specific manner and form an interference pattern that includes high-energy regions within the microwave cavity. The high-energy regions are controlled by the phases and the wavelengths of the microwaves. A plurality of nozzle elements is provided in the array. Each of the nozzle elements has a portion partially disposed in the microwave cavity and receives a gas for passing therethrough. The nozzle elements receive microwave energy from one of the high-energy regions. Each of the nozzle elements include a rod-shaped conductor having a tip that focuses the microwaves and a plasma is then generated using the received gas.

5. 发明专利

CA2572391A1 MICROWAVE PLASMA NOZZLE WITH ENHANCED PLUME STABILITY AND HEATING EFFICIENCY 未知
公开(公告)号：CA2572391A1
公开(公告)日：2006-02-09
申请号：CA2572391
申请日：2005-07-07
申请人： AMARANTE TECHNOLOGIES INC , NORITSU KOKI CO LTD
发明人： LEE SANG HUN , KIM JAY JOONGSOO
IPC分类号： H05H1/46 , H05H1/24
摘要： Systems and methods for generating microwave plasma are disclosed. The present invention provides a microwave plasma nozzle (26) that includes a gas flow tube (40), and a rod-shaped conductor (34) that is disposed in the gas flow tube (40) and has a tip (33) near the outlet of the gas flow tube (40). A portion (35) of the rod-shaped conductor (34) extends into a microwave cavity (24) to receive microwaves passing in the cavity (24). These received microwaves are focused at the tip (33) to heat the gas into plasma. The microwave plasma nozzle (26) also includes a vortex guide (36) between the rod-shaped conductor (34) and the gas flow tube (40) imparting a helical shaped flow direction to the gas flowing through the tube (40). The microwave plasma nozzle (26) further includes a shielding mechanism (108) for reducing a microwave power loss through the gas flow tube (40).

6. 发明专利

AU2005270006A1 Microwave plasma nozzle with enhanced plume stability and heating efficiency 未知
公开(公告)号：AU2005270006A1
公开(公告)日：2006-02-09
申请号：AU2005270006
申请日：2005-07-07
申请人： AMARANTE TECHNOLOGIES INC , NORITSU KOKI CO LTD
发明人： LEE SANG HUN , KIM JAY JOONGSOO
IPC分类号： H05H1/46
摘要： Systems and methods for generating microwave plasma are disclosed. The present invention provides a microwave plasma nozzle (26) that includes a gas flow tube (40), and a rod-shaped conductor (34) that is disposed in the gas flow tube (40) and has a tip (33) near the outlet of the gas flow tube (40). A portion (35) of the rod-shaped conductor (34) extends into a microwave cavity (24) to receive microwaves passing in the cavity (24). These received microwaves are focused at the tip (33) to heat the gas into plasma. The microwave plasma nozzle (26) also includes a vortex guide (36) between the rod-shaped conductor (34) and the gas flow tube (40) imparting a helical shaped flow direction to the gas flowing through the tube (40). The microwave plasma nozzle (26) further includes a shielding mechanism (108) for reducing a microwave power loss through the gas flow tube (40).

7. 发明专利

AU2005269581A1 Plasma nozzle array for providing uniform scalable microwave plasma generation 未知
公开(公告)号：AU2005269581A1
公开(公告)日：2006-02-09
申请号：AU2005269581
申请日：2005-07-21
申请人： AMARANTE TECHNOLOGIES INC , NORITSU KOKI CO LTD
发明人： KIM JAY JOONGSOO , LEE SANG HUN
IPC分类号： H05H1/46 , H01J37/32
摘要： Microwave plasma nozzle array systems and methods for configuring the microwave plasma nozzle arrays are disclosed. The microwaves are transmitted to a microwave cavity in a specific manner and form an interference pattern that includes high-energy regions within the microwave cavity. The high-energy regions are controlled by the phases and the wavelengths of the microwaves. A plurality of nozzle elements is provided in the array. Each of the nozzle elements has a portion partially disposed in the microwave cavity and receives a gas for passing therethrough. The nozzle elements receive microwave energy from one of the high-energy regions. Each of the nozzle elements include a rod-shaped conductor having a tip that focuses the microwaves and a plasma is then generated using the received gas.

8. 发明专利

CA2572391C MICROWAVE PLASMA NOZZLE WITH ENHANCED PLUME STABILITY AND HEATING EFFICIENCY 未知
公开(公告)号：CA2572391C
公开(公告)日：2012-01-24
申请号：CA2572391
申请日：2005-07-07
申请人： AMARANTE TECHNOLOGIES INC , NORITSU KOKI CO LTD
发明人： LEE SANG HUN , KIM JAY JOONGSOO
IPC分类号： H05H1/46 , H05H1/24
摘要： Systems and methods for generating microwave plasma are disclosed. The present invention provides a microwave plasma nozzle (26) that includes a gas flow tube (40), and a rod-shaped conductor (34) that is disposed in the gas flow tube (40) and has a tip (33) near the outlet of the gas flow tube (40). A portion (35) of the rod-shaped conductor (34) extends into a microwave cavity (24) to receive microwaves passing in the cavity (24). These received microwaves are focused at the tip (33) to heat the gas into plasma. The microwave plasma nozzle (26) also includes a vortex guide (36) between the rod-shaped conductor (34) and the gas flow tube (40) imparting a helical shaped flow direction to the gas flowing through the tube (40). The microwave plasma nozzle (26) further includes a shielding mechanism (108) for reducing a microwave power loss through the gas flow tube (40).

9. 发明申请

WO2006137832A2 PORTABLE MICROWAVE PLASMA SYSTEMS INCLUDING A SUPPLY LINE FOR GAS AND MICROWAVES 审中-公开
标题翻译：便携式微波等离子体系统，包括气体和微波的供应线
公开(公告)号：WO2006137832A2
公开(公告)日：2006-12-28
申请号：PCT/US2005028922
申请日：2005-08-11
申请人： AMARANTE TECHNOLOGIES INC , NORITSU KOKI CO LTD , LEE SANG HUN , KIM JAY JOONGSOO , KINOSHITA TOGO
发明人： LEE SANG HUN , KIM JAY JOONGSOO , KINOSHITA TOGO
IPC分类号： H05H1/24
CPC分类号： H05H1/46 , H05H2001/4622 , H05H2245/1225
摘要： A portable microwave plasma system (10) includes a microwave supply unit (22), a waveguide-to-coax adapter (18) and a waveguide (20) that interconnects the microwave supply unit (22) with the waveguide-to-coax adapter (18), a portable discharge unit (12) and a supply line (16). The supply line (16) includes at least one gas line (62) and a microwave coaxial cable (64). The portable discharge unit (12) includes: a gas flow tube (42) coupled to the supply line (16) to receive gas flow; and a rod-shaped conductor (44) that is axially disposed in the gas flow tube (42) and has an end configured to receive microwaves from the microwave coaxial cable (64) and a tip (46) positioned adjacent the outlet portion of the gas flow tube (42). The tip (46) is configured to focus microwave traveling through the rod-shaped conductor (44) and generate plasma from the gas flow.
摘要翻译：便携式微波等离子体系统（10）包括微波提供单元（22），波导到同轴适配器（18）和波导（20），其将微波供应单元（22）与波导到同轴电缆适配器（18），便携式放电单元（12）和供给管线（16）。供应管线（16）包括至少一条气体管线（62）和微波同轴电缆（64）。便携式排放单元（12）包括：气体流管（42），其耦合到供应管线（16）以接收气流; 以及杆状导体（44），其轴向地设置在所述气体流管（42）中并且具有被配置为从所述微波同轴电缆（64）接收微波的端部和邻近所述微波同轴电缆的出口部分定位的尖端（46）气流管（42）。尖端（46）被配置为聚焦通过杆状导体（44）行进的微波并且从气流产生等离子体。

10. 发明申请

WO2006014862A3 PLASMA NOZZLE ARRAY FOR PROVIDING UNIFORM SCALABLE MICROWAVE PLASMA GENERATION 审中-公开
标题翻译：用于提供均匀可扩展微波等离子体生成的等离子喷嘴阵列
公开(公告)号：WO2006014862A3
公开(公告)日：2007-01-18
申请号：PCT/US2005026280
申请日：2005-07-21
申请人： AMARANTE TECHNOLOGIES INC , NORITSU KOKI CO LTD , LEE SANG HUN , KIM JAY JOONGSOO
发明人： LEE SANG HUN , KIM JAY JOONGSOO
IPC分类号： H05H1/46 , H01J37/32
CPC分类号： H01J37/32192 , A61L2/14 , H05H1/46 , H05H2001/4622
摘要： The present invention provides microwave plasma nozzle array systems (10, 70, 230, and 310) and methods for configuring microwave plasma nozzle arrays (37, 99, and 337). The microwaves are transmitted to a microwave cavity (323) in a specific manner and form an interference pattern (66) that includes high-energy regions (69) within the microwave cavity (32). The high-energy regions (69) are controlled by the phases and the wavelengths of the microwaves. A plurality of nozzle elements (36) is provided in the array (37). Each of the nozzle elements (36) has a portion (116) partially disposed in the microwave cavity (32) and receives a gas for passing therethrough. The nozzle elements (36) receive microwave energy from one of the high-energy regions (69). Each of the nozzle elements (36) includes a rod-shaped conductor (114) having a tip (117) that focuses on the microwaves and a plasma (38) is then generated using the received gas.
摘要翻译：本发明提供微波等离子体喷嘴阵列系统（10,70,230和310）以及用于配置微波等离子体喷嘴阵列（37,99和337）的方法。微波以特定的方式传送到微波腔（323）并形成包括微波腔（32）内的高能区域（69）的干涉图案（66）。高能区（69）由微波的相位和波长控制。在阵列（37）中设置有多个喷嘴元件（36）。每个喷嘴元件（36）具有部分地布置在微波腔（32）中的部分（116）并且接收用于通过的气体。喷嘴元件（36）从高能区域（69）之一接收微波能量。每个喷嘴元件（36）包括具有聚焦在微波上的尖端（117）的棒状导体（114），然后使用所接收的气体产生等离子体（38）。

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