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    • 6. 发明授权
    • Method of making a semiconductor device having a stress relieving mechanism
    • 制造具有应力消除机构的半导体器件的方法
    • US6423571B2
    • 2002-07-23
    • US88437801
    • 2001-06-20
    • HITACHI LTD
    • OGINO MASAHIKONAGAI AKIRAEGUCHI SHUJIISHII TOSHIAKISEGAWA MASANORIAKAHOSHI HARUOTAKAHASHI AKIOMIWA TAKAOTANAKA NAOTAKAANJOU ICHIROU
    • H01L23/498H01L21/44H01L21/48H01L21/50
    • H01L23/49816H01L23/49827H01L2924/0002H01L2924/30107H01L2924/3011H01L2924/00
    • A method of forming a semiconductor device having a multi-layered wiring structure that includes a conductor layer to be electrically connected to a packaging substrate, with the multi-layered wiring structure being provided on a circuit formation surface of a semiconductor chip. Ball-like terminals are formed, disposed in a grid array on the surface of the multi-layered wiring structure on the packaging substrate side. The multi-layered wiring structure is formed to include a buffer layer for relieving a thermal stress provided between the semiconductor chip and the packaging substrate, due to the packaging procedure. In the semiconductor device formed, the wiring distance is shorter than that of a conventional semiconductor device, so that an inductance component becomes smaller, to thereby increase signal speed. The distance between a ground layer and a power supply layer is shortened, to reduce noise produced upon operation, and also a thermal stress upon packaging is relieved by the buffer layer of the multi-layered wiring structure, resulting in improved connection reliability, and the number of terminals per unit can be increased, because of elimination of wire bonding. The buffer layer can be made of an elastomer, and can have a modulus of elasticity of 10 kg/mm2 or less.
    • 一种形成具有多层布线结构的半导体器件的方法,所述多层布线结构包括导体层,以与所述封装衬底电连接,所述多层布线结构设置在所述半导体芯片的电路形成表面上。 在包装基板一侧的多层布线结构的表面上形成有格子状的球状端子。 多层布线结构形成为包括用于缓解由于包装过程而在半导体芯片和封装基板之间提供的热应力的缓冲层。 在形成的半导体器件中,布线距离比常规半导体器件的布线距离短,使得电感成分变小,从而提高信号速度。 接地层和电源层之间的距离缩短,以减少操作时产生的噪声,并且多层布线结构的缓冲层也减轻了包装上的热应力,从而提高了连接可靠性,并且 由于消除引线键合,可以增加每单位端子数量。 缓冲层可以由弹性体制成,并且可以具有10kg / mm 2或更小的弹性模量。