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1. 发明专利

JPS6484678A GAS LASER OSCILLATOR 失效
公开(公告)号：JPS6484678A
公开(公告)日：1989-03-29
申请号：JP24061487
申请日：1987-09-28
申请人： AGENCY IND SCIENCE TECHN , MITSUBISHI HEAVY IND LTD
发明人： MIYAZAKI KENSOU , SATO TAKUZO , TAKAHARA SHIGERU , KATO MITSUO , SEZE SHINJI , KATSURA TOSHIAKI , YAMASHITA ICHIRO , TSURUSAKI KAZUYA
IPC分类号： H01S3/03 , H01S3/038 , H01S3/04 , H01S3/041 , H01S3/097
摘要： PURPOSE:To effectively cool a peaking capacitor and improve electrical insulation by electrically connecting the peaking capacitor to an insulating oil vessel disposed adjoining to a negative electrode, the negative electrode, and a positive electrode, respectively to forcedly cool the peaking capacitor in an insulating oil contained in the insulating oil vessel. CONSTITUTION:A switching element 11 is switched on to store the energy possessed by a storage capacitor 2 on a peaking capacitor 1. A grow discharge is generated between positive and negative electrodes 6 and 7 to the energy stored on the peaking capacitor 1, permitting a discharge current to flow. Since the peaking capacitor 1 and a coil 4 for uniformly distributing the energy transfer current are disposed in high dielectric insulating oil 15, satisfactory electrical insulator is kept, and the peaking capacitor 1 is forcedly cooled in an effective manner by circulating the high dielectric insulating oil 15.

2. 发明专利

JPS6484677A GAS LASER OSCILLATOR 失效
公开(公告)号：JPS6484677A
公开(公告)日：1989-03-29
申请号：JP24061387
申请日：1987-09-28
申请人： AGENCY IND SCIENCE TECHN , MITSUBISHI HEAVY IND LTD
发明人： MIYAZAKI KENSOU , SATO TAKUZO , TAKAHARA SHIGERU , KATO MITSUO , SEZE SHINJI , KATSURA TOSHIAKI , YAMASHITA ICHIRO
IPC分类号： H01S3/097 , H01S3/03 , H01S3/036 , H01S3/04 , H01S3/041
摘要： PURPOSE:To prevent the temperature of a peaking coil from being raised for prevention of deterioration of the title capacitor oscillator by electrically connecting the peaking coil to a pair of electrodes, respectively, and isolating the coil from the oscillator and chamber so as to face a cooling fan. CONSTITUTION:With a switching element 11 switched on, energy stored on a storage capacitor 2 is transferred to a peaking capacitor 1. Satisfactory transfer of the energy to the peaking coil 1 produces glow discharge between positive and negative electrodes 6, 7 to permit a laser light to be emitted. The peaking capacitor 1 is cooled by an axial fan 22. The peaking capacitor 1 is isolated from an oscillator chamber 17 and disposed facing the axial fan 22. Hereby, the peaking capacitor is cooled to prevent temperature rise of the oscillator.

3. 发明专利

JPS63217687A GAS LASER OSCILLATOR 失效
公开(公告)号：JPS63217687A
公开(公告)日：1988-09-09
申请号：JP5134787
申请日：1987-03-06
申请人： AGENCY IND SCIENCE TECHN , MITSUBISHI HEAVY IND LTD
发明人： SATO TAKUZO , MIYAZAKI KENSOU , KATO MITSUO , SEZE SHINJI , KATSURA TOSHIAKI , YAMASHITA ICHIRO , TSURUSAKI KAZUYA
IPC分类号： H01S3/036 , H01S3/097
摘要： PURPOSE:To remove the turbulence of a gas flow, and to increase the flow rate of a gas while preventing the lowering of a laser output by fine particles by mounting a capacitor onto the side surface of a cathode and using a nozzle. CONSTITUTION:Nozzles 8, 12 are set up, peaking capacitors 1 are fitted onto the side surfaces of a cathode 7 while structure in which a gas having rectification action flows through the nozzles 8, 12 and discharge electrodes 6, 7 from the sides is formed, and structure in which a gas flow is not prevented by the peaking capacitors 1 and pre-ionizing pins 3 is shaped. Accordingly, the gas does not collide with the capacitors 1, and the nozzles 8, 12 are used, thus obviating the turbulence of the gas flow due to return paths 13 in an oscillator, then preventing the lowering of a laser output.

4. 发明专利

JPS63217682A GAS LASER OSCILLATOR 失效
公开(公告)号：JPS63217682A
公开(公告)日：1988-09-09
申请号：JP5134687
申请日：1987-03-06
申请人： AGENCY IND SCIENCE TECHN , MITSUBISHI HEAVY IND LTD
发明人： SATO TAKUZO , MIYAZAKI KENSOU , KATO MITSUO , SEZE SHINJI , KATSURA TOSHIAKI , YAMASHITA ICHIRO , TSURUSAKI KAZUYA
IPC分类号： H01S3/038
摘要： PURPOSE:To hold the position of installation to a cathode of a pre-ionizing pin with high precision by bringing the pre-ionizing pin and a current introducing terminal connected to a storage capacitor or a capacitor into contact with each other by a spring-shaped splicer and electrically connecting the pin and the terminal. CONSTITUTION:A storage capacitor 3 is mounted directly to a conductive cover 4 on the cathode 11 side of a laser chamber 5, the cover 4 is set up to an insulator 1, and the insulator 1 is fitted to the laser chamber 5 from the reverse side of the cover 4. Pre-ionizing pins 6 and the storage capacitor 3 are connected by bringing coils 7 into pressure-contact with the conductive cover 4. Accordingly, constitution is simplified while the positions of installation to the cathode 11 of the pre-ionizing pins 6 are held with high precision.

5. 发明专利

JPH0244790A GAS LASER OSCILLATOR 失效
公开(公告)号：JPH0244790A
公开(公告)日：1990-02-14
申请号：JP19456988
申请日：1988-08-05
申请人： AGENCY IND SCIENCE TECHN , MITSUBISHI HEAVY IND LTD
发明人： MIYAZAKI KENSOU , SATO TAKUZO , TAKAHARA SHIGERU , TSURUSAKI KAZUYA , YAMASHITA ICHIRO , SEZE SHINJI , KATSURA TOSHIAKI , KATO MITSUO , MIZUI JUNICHI
IPC分类号： B01D59/34 , H01S3/097 , H01S3/0971
摘要： PURPOSE:To prevent quick consumption and deterioration of switches by dividing a storage capacitor into two parts, connecting two switches to the individual storage capacitors, and providing inductors between the two switches and a DC high voltage source. CONSTITUTION:Storate capacitors 3 and 4 are charged sequentially through circuits comprising the following parts: a DC high voltage power source 12 current-concentration preventing inductors 1 and 2 the storage capacitors 3 and 4 and a storage-capacitor charging inductor 5. Thereafter, switches 8 and 9 are turned ON. Then, energy stored in the storage capacitors 3 and 4 is transferred into a peaking capacitor 6. when the sufficient energy is stored in the peaking capacitor 6, glow discharge is generated between an anode 11 and a cathode 10. The energy in the peaking capacitor 6 is supplied to a discharing part. In this way, the amount of energy passing through a plurality of the switches, the peak value of the current, the current rise-up speed and the like are uniformly distributed. Thus quick consumption and deterioration of the switches can be prevented.

6. 发明专利

JPS6484676A GAS LASER OSCILLATOR 失效
公开(公告)号：JPS6484676A
公开(公告)日：1989-03-29
申请号：JP24061587
申请日：1987-09-28
申请人： AGENCY IND SCIENCE TECHN , MITSUBISHI HEAVY IND LTD
发明人： MIYAZAKI KENSOU , SATO TAKUZO , TAKAHARA SHIGERU , KATO MITSUO , SEZE SHINJI , KATSURA TOSHIAKI , YAMASHITA ICHIRO
IPC分类号： H01S3/038 , H01S3/036
摘要： PURPOSE:To increase a laser output power by additionally extending a discharge region transversely by forming positive and negative electrodes such that the configuration of one of those electrodes including its width is different from the other. CONSTITUTION:With a switching element 11 is switched on to transfer the energy stored on a storage capacitor 2 to a peaking capacitor 1. Sufficient storage of the energy on the peaking capacitor 1 allows glow discharge to be produced between positive and negative electrodes 6, 7. Hereby, the energy stored on the peaking capacitor 1 is fed to a discharge part. Since the lateral width of the positive electrode 6 is less than that of the negative one 7, an electric field is concentrated at the end of the positive electrode 6 to extend a discharge region, allowing a laser output power to be increased.

7. 发明专利

JP2003310719A Sterilization apparatus and sterilization method 有权
标题翻译：灭菌装置和灭菌方法
公开(公告)号：JP2003310719A
公开(公告)日：2003-11-05
申请号：JP2002115912
申请日：2002-04-18
申请人： Mitsubishi Heavy Ind Ltd , Tsuru Gakuen , 三菱重工業株式会社 , 学校法人鶴学園
发明人： ASAHARA YUJI , YOSHIDA MITSUHIRO , KATSURA TOSHIAKI , WAKAMOTO IKUO , TAKAGI TOSHINORI , TANAKA TAKESHI
IPC分类号： A61L2/14
CPC分类号： A61L2/14
摘要： PROBLEM TO BE SOLVED: To establish a technique for more enhancing the sterilization effect by utilizing not only the chemical effect of plasma with high diffusibility but also the physical energy of particles possessed by plasma.
SOLUTION: A support instrument 6 for supporting an object T to be sterilized, an electrical accelerator 6 for accelerating electrons and ions with respect to the object T to be sterilized in a reverse direction and an AC electrode 6 for forming plasma P in the peripheral region of the object T to be sterilized are formed in a container 1 forming plasma P therein. The electric accelerator 6 intermittently accelerates electrons and ions in a reverse direction. Electrons or ions are accelerated by together using a DC electrode and the AC electrode to be driven in cells to be sterilized and radicals are driven in cells or the surfaces of cells in a thermal motive manner regardless of the positive and negative of an electrode. A plasma sheath is formed near the periphery of the DC electrode and, since electrons or ions are accelerated with respect to the DC electrode by Coulomb's force, sterilization effect is markedly excellent.
COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：通过不仅利用具有高扩散性的等离子体的化学作用而且利用等离子体具有的粒子的物理能量来建立更多地提高灭菌效果的技术。解决方案：用于支撑要消毒的物体T的支撑仪器6，用于相对于要反向消毒的物体T加速电子和离子的电加速器6和用于形成等离子体P的AC电极6 待灭菌对象T的周边区域形成在其中形成等离子体P的容器1中。电加速器6以相反的方向间歇地加速电子和离子。电子或离子通过一起使用直流电极和交流电极一起被加速，在要被灭菌的细胞中被驱动，并且以电动机的方式在电池或细胞表面中驱动自由基，而与电极的正极和负极无关。在直流电极的周围附近形成等离子体护套，由于电子或离子通过库仑力相对于直流电极而被加速，因此杀菌效果明显优异。版权所有（C）2004，JPO

8. 发明专利

JP2002339074A FILM DEPOSITION APPARATUS 失效
公开(公告)号：JP2002339074A
公开(公告)日：2002-11-27
申请号：JP2001146684
申请日：2001-05-16
申请人： MITSUBISHI HEAVY IND LTD , TSURU GAKUEN
发明人： YOSHIDA MITSUHIRO , ASAHARA YUJI , KATSURA TOSHIAKI , TAKAGI TOSHINORI , TANAKA TAKESHI
IPC分类号： C08J7/00 , C23C16/505
摘要： PROBLEM TO BE SOLVED: To provide a film deposition apparatus capable of improving film quality while maintaining a film deposition speed, and generating a film of high quality at a high speed. SOLUTION: This film deposition apparatus comprises a vacuum chamber 31, a vessel 32 disposed in this vacuum chamber 31, an internal electrode 33 disposed in this vessel 32, an external electrode 34 to cover the outside of the vessel 32, and a pulse power source 39 connected to the external electrode 34. Both the inside and the outside of the vessel 32 are evacuated, gas is introduced in the vessel, and discharge is performed inside the vessel by the internal electrode 33 to deposit a film by the plasma CVD on an inner surface of the vessel, and ion is implanted in the inner surface of the vessel by applying the negative pulse voltage to the external electrode 34.

9. 发明专利

JPH09283277A PLASMA PINCHING METHOD AND PLASMA ARC FURNACE 失效
公开(公告)号：JPH09283277A
公开(公告)日：1997-10-31
申请号：JP9094696
申请日：1996-04-12
申请人： MITSUBISHI HEAVY IND LTD
发明人： NOMA AKIRA , NISHIKAWA SUSUMU , TAGUMA MASAO , YAMASHITA ICHIRO , KATSURA TOSHIAKI
IPC分类号： F23G5/10 , H05B7/00
摘要： PROBLEM TO BE SOLVED: To generate a difference of electrical conductivity so as to pinch the plasma, and to eliminate the necessity of cooling device so as to simplify the structure of a device by flowing the gas, which is hard to be ionized in comparison with the operating gas, in the periphery of the plasma jet. SOLUTION: An anode 2 is arranged in a bottom part of a plasma arc furnace 8, and a hollow cathode 1 is inserted into a top part of the furnace 8 so as to face downward. An outer cylinder 3 is fitted on the periphery of the cathode l through a clearance. Operating gas 4 is flowed from the hollow part of the cathode 1 into the furnace 8, and on the other hand, pinching gas 5 such as N2 , which is hard to be ionized in comparison with the operating gas, is flowed into the furnace 8 from a clearance between the cathode 1 and the outer cylinder 5. Consequently, plasma 7 is injected from the cathode 1 to the anode 2, and the burned ash is melted, and on the other hand, electrical conductivity of the outside of the plasma 7 is lowered by the pinching gas 5, and current is hard to be flowed, and the outside current becomes small. As a result, the plasma 7 is pinched, and the current at the center is increased, and current is efficiently flowed in a molten slag 9.

10. 发明专利

JP2005082887A Apparatus for forming carbon-based thin film, film-forming apparatus and film-forming method 有权
标题翻译：用于形成基于碳的薄膜，成膜装置和成膜方法的装置
公开(公告)号：JP2005082887A
公开(公告)日：2005-03-31
申请号：JP2003320205
申请日：2003-09-11
申请人： Mitsubishi Heavy Ind Ltd , Tsuru Gakuen , 三菱重工業株式会社 , 学校法人鶴学園
发明人： YOSHIDA MITSUHIRO , KATSURA TOSHIAKI , CHIYOMARU MASARU , FUKUMORI KENJI , TAKAGI TOSHINORI , TANAKA TAKESHI
IPC分类号： H05H1/46 , C23C14/06 , C23C14/34 , C23C14/40
摘要： PROBLEM TO BE SOLVED: To provide a film-forming technology for further optimizing a quality and structure of a carbon-based thin film. SOLUTION: This film-forming apparatus comprises a vacuum vessel (1) for accommodating a workpiece (W); raw material-feeding mechanisms (4, 7 and 8) for feeding a raw material of the carbon-based thin film to be formed on the surface of the workpiece (W); an electrode (6) which is accommodated in the vacuum vessel (1) and holds the workpiece (W); and a power source (11) for generating plasma, which applies voltage for generating plasma inside the vacuum vessel (1) to the electrode (6). The voltage for generating plasma applied to the electrode (6) comprises a pulsed alternating current with RF (Radio Frequency) (22) in which alternating voltage is continued with a frequency in a radio frequency RF band for a predetermined period of time, a pulsed direct current having positive voltage (21), and a pulsed direct current having negative voltage (23). COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于进一步优化碳基薄膜的质量和结构的成膜技术。解决方案：该成膜装置包括用于容纳工件（W）的真空容器（1）。用于将要形成的碳基薄膜的原料供给到工件（W）的表面上的原料供给机构（4,7和8）; 容纳在真空容器（1）中并保持工件（W）的电极（6）; 以及用于产生等离子体的电源（11），其将用于在所述真空容器（1）内产生等离子体的电压施加到所述电极（6）。用于产生施加到电极（6）的等离子体的电压包括具有射频（射频）（22）的脉冲交流电，其中交变电压以射频RF频带中的频率持续预定时间段，脉冲具有正电压（21）的直流电流和具有负电压（23）的脉冲直流电。版权所有（C）2005，JPO＆NCIPI

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