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    • 8. 发明申请
    • SYSTEM AND METHOD FOR CHARACTERIZING MATERIAL SHRINKAGE USING COHERENT ANTI-STOKES RAMAN SCATTERING (CARS) MICROSCOPY
    • 使用相似的反坦克拉曼散射(CARS)显微镜表征材料收缩的系统和方法
    • WO2013025224A1
    • 2013-02-21
    • PCT/US2011/048329
    • 2011-08-18
    • NEWPORT CORPORATIONBALDACCHINI, TommasoZADOYAN, Ruben
    • BALDACCHINI, TommasoZADOYAN, Ruben
    • G01B9/02G01J3/44
    • G03F7/70616G01N21/65G01N21/8422G01N2021/653G02B21/00G03F7/70625G03F7/70675G03F7/7085
    • System and method are disclosed for measuring properties (e.g., shrinkage) of a photosensitive material (e.g., photoresist) while undergoing a defined photolithography process. The system includes a photolithography processing system adapted to perform a defined photolithography process of the photosensitive material, and a coherent anti-Stokes Raman scattering (CARS) microscopy system adapted to perform measurement of the properties of the photosensitive material. In another aspect, the CARS microscopy system is adapted to measure properties of the photosensitive material simultaneous with the defined photolithography process being performed on the photosensitive material by the photolithography processing system. In still another aspect, the CARS microscopy system is adapted to measure properties of the photosensitive material while the defined photolithography process on the photosensitive material is paused. Another system is adapted to perform similar measurements during the manufacturing of the photosensitive material.
    • 公开了用于测量感光材料(例如光致抗蚀剂)在经历限定的光刻工艺时的性质(例如收缩)的系统和方法。 该系统包括适于执行感光材料的限定光刻工艺的光刻处理系统,以及适于执行感光材料的性质测量的相干反斯托克斯拉曼散射(CARS)显微镜系统。 另一方面,CARS显微镜系统适用于通过光刻处理系统在感光材料上进行的限定的光刻工艺同时测量感光材料的性质。 在另一方面,CARS显微镜系统适于测量感光材料的性质,同时在感光材料上限定的光刻工艺暂停。 另一系统适于在制造感光材料期间执行类似的测量。