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1. 发明申请

WO2006023846A1 SOFT SWITCHING INTERLEAVED POWER CONVERTER 审中-公开
标题翻译：软开关互换电源转换器
公开(公告)号：WO2006023846A1
公开(公告)日：2006-03-02
申请号：PCT/US2005/029769
申请日：2005-08-23
申请人： ADVANCED ENERGY INDUSTRIES, INC.
发明人： HESTERMAN, Bryce, L. , ILIC, Milan , MALININ, Andrey, B. , SIDDABATTULA, Kalyan, N.C.
IPC分类号： G05F1/10
CPC分类号： H02M3/1584 , H02M3/07 , H02M2003/075 , H02M2003/076 , H02M2003/1586
摘要： There is provided by this invention soft switching interleaved power converters that are suitable for high power and high voltage applications such as plasma processing. They have greatly reduced switching losses and diode reverse-recovery :losses which allows operation at high switching frequencies. The peak values of the reverse-recovery currents of the diodes are substantially less then their peak forward operating currents. The power converters incorporate power converter cells that comprise a plurality of switching assemblies that are operated with an interleaved switching pattern, and that are each connected to an input terminal of an inductor assembly that also has a common terminal. The inductance between each pair of input terminals is less than the inductance between each input terminal and the common terminal of the inductor assembly.
摘要翻译：本发明提供了适用于诸如等离子体处理的高功率和高电压应用的软切换交错功率转换器。它们大大降低了开关损耗和二极管反向恢复：允许在高开关频率下工作的损耗。二极管的反向恢复电流的峰值明显小于它们的峰值正向工作电流。功率转换器包括功率转换器单元，其包括以交错开关模式操作的多个开关组件，并且每个开关组件都连接到也具有公共端子的电感器组件的输入端子。每对输入端子之间的电感小于每个输入端子和电感器组件的公共端子之间的电感。

2. 发明申请

WO2006014212A2 APPARATUS AND METHOD FOR FAST ARC EXTINCTION WITH EARLY SHUNTING OF ARC CURRENT IN PLASMA 审中-公开
标题翻译：用于在等离子体中早期分流电流的快速电弧灭弧装置和方法
公开(公告)号：WO2006014212A2
公开(公告)日：2006-02-09
申请号：PCT/US2005/020276
申请日：2005-06-09
申请人： ADVANCED ENERGY INDUSTRIES, INC.
发明人： ILIC, Milan , SIDDABATTULA, Kalyan, N.C. , MALININ, Andrey, B.
IPC分类号： B23K9/00
CPC分类号： B23K10/006 , H01J37/32935 , H01J2237/0206 , H05H1/36
摘要： There is provided by this invention a novel apparatus and method of operating a dc plasma process that diverts the power supply current from the plasma at the initiation of an arc, thereby inhibiting energy from flowing from the power supply to the plasma, and then to allow energy to flow again when the power supply re-enables energy flow to the plasma. The diverting means is connected to the output of the power supply to divert current away from the plasma at the initiation of an arc wherein the diverting means is actuated when the arc is detected on the output and diverts the current for a first pre-determined time. The diverting means is released at the end of the first predetermined time before the current reaches zero wherein current is redirected to the plasma and the diverting means is reactivated at the end of a second pre-determined time in the event the arc is not extinguished.
摘要翻译：本发明提供了一种新颖的设备和操作直流等离子体工艺的方法，该工艺在电弧起始时从等离子体转移电源电流，从而抑制能量从电源等离子体，然后当电源重新使能量流向等离子体时允许能量再次流动。转向装置连接到电源的输出，以在电弧开始时将电流从等离子体转移开，其中当在输出端上检测到电弧时转移装置被致动，并将电流转移第一预定时间。在电流达到零之前，转向装置被释放，在电流达到零之前确定的时间，其中电流被转向到等离子体，并且转向装置在电弧不是在第二预定时间结束时被重新激活熄灭。

3. 发明授权

EP1782145B1 SOFT SWITCHING INTERLEAVED POWER CONVERTER 有权转让
标题翻译：软切换交错的功率变换器
公开(公告)号：EP1782145B1
公开(公告)日：2015-12-02
申请号：EP05790984.8
申请日：2005-08-23
申请人： ADVANCED ENERGY INDUSTRIES, INC.
发明人： HESTERMAN, Bryce, L. , ILIC, Milan , MALININ, Andrey, B. , SIDDABATTULA, Kalyan N.C.
IPC分类号： G05F1/10 , G05F1/652 , G05F1/656 , H02M3/158
CPC分类号： H02M3/1584 , H02M3/07 , H02M2003/075 , H02M2003/076 , H02M2003/1586

4. 发明授权

EP1765540B1 APPARATUS FOR FAST ARC EXTINCTION WITH EARLY SHUNTING OF ARC CURRENT IN PLASMA 无效转让
标题翻译：设备用于快速灭弧早期与旁边的电流电弧在血浆中的END
公开(公告)号：EP1765540B1
公开(公告)日：2012-08-01
申请号：EP05759162.0
申请日：2005-06-09
申请人： ADVANCED ENERGY INDUSTRIES, INC.
发明人： ILIC, Milan , SIDDABATTULA, Kalyan, N.C. , MALININ, Andrey, B.
IPC分类号： B23K9/00 , B23K10/00 , C23C14/35 , H01J37/02 , H01J37/24 , H01J37/32 , H01J37/34 , H05H1/36
CPC分类号： B23K10/006 , H01J37/32935 , H01J2237/0206 , H05H1/36
摘要： There is provided by this invention a novel apparatus and method of operating a dc plasma process that diverts the power supply current from the plasma at the initiation of an arc, thereby inhibiting energy from flowing from the power supply to the plasma, and then to allow energy to flow again when the power supply re-enables energy flow to the plasma. The diverting means is connected to the output of the power supply to divert current away from the plasma at the initiation of an arc wherein the diverting means is actuated when the arc is detected on the output and diverts the current for a first pre-determined time. The diverting means is released at the end of the first predetermined time before the current reaches zero wherein current is redirected to the plasma and the diverting means is reactivated at the end of a second pre-determined time in the event the arc is not extinguished.

5. 发明公开

EP1765540A2 APPARATUS AND METHOD FOR FAST ARC EXTINCTION WITH EARLY SHUNTING OF ARC CURRENT IN PLASMA 无效转让
标题翻译：设备用于快速灭弧早期与旁边的电流电弧在血浆中的END
公开(公告)号：EP1765540A2
公开(公告)日：2007-03-28
申请号：EP05759162.0
申请日：2005-06-09
申请人： ADVANCED ENERGY INDUSTRIES, INC.
发明人： ILIC, Milan , SIDDABATTULA, Kalyan, N.C. , MALININ, Andrey, B.
IPC分类号： B23K9/00
CPC分类号： B23K10/006 , H01J37/32935 , H01J2237/0206 , H05H1/36
摘要： There is provided by this invention a novel apparatus and method of operating a dc plasma process that diverts the power supply current from the plasma at the initiation of an arc, thereby inhibiting energy from flowing from the power supply to the plasma, and then to allow energy to flow again when the power supply re-enables energy flow to the plasma. The diverting means is connected to the output of the power supply to divert current away from the plasma at the initiation of an arc wherein the diverting means is actuated when the arc is detected on the output and diverts the current for a first pre-determined time. The diverting means is released at the end of the first predetermined time before the current reaches zero wherein current is redirected to the plasma and the diverting means is reactivated at the end of a second pre-determined time in the event the arc is not extinguished.

6. 发明公开

EP1782145A1 SOFT SWITCHING INTERLEAVED POWER CONVERTER 有权转让
标题翻译：软切换交错的功率变换器
公开(公告)号：EP1782145A1
公开(公告)日：2007-05-09
申请号：EP05790984.8
申请日：2005-08-23
申请人： ADVANCED ENERGY INDUSTRIES, INC.
发明人： HESTERMAN, Bryce, L. , ILIC, Milan , MALININ, Andrey, B. , SIDDABATTULA, Kalyan N.C.
IPC分类号： G05F1/10 , G05F1/652 , G05F1/656
CPC分类号： H02M3/1584 , H02M3/07 , H02M2003/075 , H02M2003/076 , H02M2003/1586
摘要： There is provided by this invention soft switching interleaved power converters that are suitable for high power and high voltage applications such as plasma processing. They have greatly reduced switching losses and diode reverse-recovery :losses which allows operation at high switching frequencies. The peak values of the reverse-recovery currents of the diodes are substantially less then their peak forward operating currents. The power converters incorporate power converter cells that comprise a plurality of switching assemblies that are operated with an interleaved switching pattern, and that are each connected to an input terminal of an inductor assembly that also has a common terminal. The inductance between each pair of input terminals is less than the inductance between each input terminal and the common terminal of the inductor assembly.

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