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    • 1. 发明公开
    • 커버 작동장치
    • 用于通过弯曲叶片弹簧覆盖开盖和封闭装置平面盖的操作装置
    • KR1020040080383A
    • 2004-09-18
    • KR1020040016662
    • 2004-03-11
    • 티에스 코포레이션 가부시키가이샤
    • 니시무라,요시히데유다테,토시히로
    • F16J13/18
    • B65D90/10B01J3/03F16J13/20
    • PURPOSE: An operating device for a cover is provided to secure a space effect for each production amount, to increase the life span of a seal member wound and stuck to an opening surface of a container, and to simplify the structure without a link mechanism or a cylinder mechanism. CONSTITUTION: An operating device for a cover(15) is composed of a container having an opening surface(14a); the cover for covering the opening surface of the container; at least one pivot arm(16) combined to the cover; a pivot unit(17) for driving the pivot arm to open and close the opening surface of the container by the cover; and at least one leaf spring(18) comprising a first portion fixed to the pivot arm and a second portion fixed to the cover and having a part disposed between the first and second portions and bent.
    • 目的:提供一种用于盖子的操作装置,以确保每个生产量的空间效果,以增加卷绕并粘贴在容器开口表面上的密封件的使用寿命,并且简化结构而无需连接机构或 气缸机构。 构成:盖(15)的操作装置由具有开口表面(14a)的容器组成; 用于覆盖容器的开口表面的盖; 至少一个枢转臂(16)组合到盖子上; 枢轴单元(17),用于驱动所述枢转臂以通过所述盖打开和关闭所述容器的开口表面; 以及至少一个板簧(18),其包括固定到所述枢转臂的第一部分和固定到所述盖的第二部分,并且具有设置在所述第一部分和所述第二部分之间并弯曲的部分。
    • 3. 发明公开
    • 뚜껑 개폐장치
    • 组合轴承单元,ARM单元和具有电动机和两个减速器的致动器的开启和关闭装置
    • KR1020050012166A
    • 2005-01-31
    • KR1020040057378
    • 2004-07-22
    • 티에스 코포레이션 가부시키가이샤
    • 와타나베,코우지유다테,토시히로
    • F16J13/00F16F9/00
    • F16J13/18B65D90/10F16H1/32H01L21/67126Y10T74/19023Y10T74/19555Y10T74/20582
    • PURPOSE: A lid opening and closing device is provided to make the device small and to apply for a lid of a vacuum chamber for producing a semiconductor mechanism. CONSTITUTION: A lid opening and closing device(10) is composed of a shaft unit(20) supported by a case(91) of a container(90) and formed with a rotary shaft; an arm unit(40) combined with a lid(92) of the container and the rotary shaft; and an actuator for driving the rotary shaft. The actuator comprises a motor having a first output unit outputting power; a first reducer having a first input unit for receiving power from the first output unit and a second output unit outputting the power; and a second reducer having a second input unit receiving the power from the second output unit and a third output unit outputting the power to the rotary shaft. The first reducer decreases the output speed of the motor. The second reducer decreases the output speed of the first reducer.
    • 目的:提供盖打开和关闭装置,以使装置较小并且用于制造用于制造半导体机构的真空室的盖。 构成:盖开闭装置(10)由容器(90)的壳体(91)支撑并形成有旋转轴的轴单元(20)构成; 与容器的盖(92)和旋转轴结合的臂单元(40); 以及用于驱动旋转轴的致动器。 致动器包括具有输出动力的第一输出单元的马达; 第一减速器,具有用于从第一输出单元接收功率的第一输入单元和输出功率的第二输出单元; 以及第二减速器,具有从第二输出单元接收动力的第二输入单元和向旋转轴输出动力的第三输出单元。 第一个减速器降低电机的输出速度。 第二减速器降低第一减速器的输出速度。