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1. 发明公开

KR1020050012166A 뚜껑 개폐장치 无效
标题翻译：组合轴承单元，ARM单元和具有电动机和两个减速器的致动器的开启和关闭装置
公开(公告)号：KR1020050012166A
公开(公告)日：2005-01-31
申请号：KR1020040057378
申请日：2004-07-22
申请人： 티에스 코포레이션 가부시키가이샤
发明人： 와타나베,코우지 , 유다테,토시히로
IPC分类号： F16J13/00 , F16F9/00
CPC分类号： F16J13/18 , B65D90/10 , F16H1/32 , H01L21/67126 , Y10T74/19023 , Y10T74/19555 , Y10T74/20582
摘要： PURPOSE: A lid opening and closing device is provided to make the device small and to apply for a lid of a vacuum chamber for producing a semiconductor mechanism. CONSTITUTION: A lid opening and closing device(10) is composed of a shaft unit(20) supported by a case(91) of a container(90) and formed with a rotary shaft; an arm unit(40) combined with a lid(92) of the container and the rotary shaft; and an actuator for driving the rotary shaft. The actuator comprises a motor having a first output unit outputting power; a first reducer having a first input unit for receiving power from the first output unit and a second output unit outputting the power; and a second reducer having a second input unit receiving the power from the second output unit and a third output unit outputting the power to the rotary shaft. The first reducer decreases the output speed of the motor. The second reducer decreases the output speed of the first reducer.
摘要翻译：目的：提供盖打开和关闭装置，以使装置较小并且用于制造用于制造半导体机构的真空室的盖。构成：盖开闭装置（10）由容器（90）的壳体（91）支撑并形成有旋转轴的轴单元（20）构成; 与容器的盖（92）和旋转轴结合的臂单元（40）; 以及用于驱动旋转轴的致动器。致动器包括具有输出动力的第一输出单元的马达; 第一减速器，具有用于从第一输出单元接收功率的第一输入单元和输出功率的第二输出单元; 以及第二减速器，具有从第二输出单元接收动力的第二输入单元和向旋转轴输出动力的第三输出单元。第一个减速器降低电机的输出速度。第二减速器降低第一减速器的输出速度。

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