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    • 7. 发明授权
    • 플라즈마 처리 시스템 및 이를 이용하는 MLCC 제조방법
    • 等离子体处理系统和使用该方法的MLCC制造方法
    • KR101058431B1
    • 2011-08-24
    • KR1020110005950
    • 2011-01-20
    • 주식회사 피에스엠
    • 이근호이해룡박남규신현욱
    • H01G4/30H05H1/24
    • PURPOSE: A plasma treatment system and an MLCC manufacturing method using the same are provided to reduce a fault by using a hydrophile and/or hydrophobic plasma processing. CONSTITUTION: A plasma treatment system and an MLCC manufacturing method using the same are comprised of steps: forming a ceramic sheet using ceramic raw material of pulverized/mixed powder(S1); printing the ceramic sheet having an internal electrode into a predetermined pattern(S2); laminating a plurality of ceramic sheets including the internal electrode respectively(S3); A laminate is cut into several parts(S4); and sintering the laminate under 850°C-1300°C(S5).
    • 目的:提供等离子体处理系统和使用其的MLCC制造方法,以通过使用亲水和/或疏水等离子体处理来减少故障。 构成:等离子体处理系统和使用该等离子体处理系统的MLCC制造方法包括以下步骤:使用粉碎/混合粉末(S1)的陶瓷原料形成陶瓷片; 将具有内部电极的陶瓷片印刷成预定图案(S2); 层叠多个包括内部电极的陶瓷片(S3); 将层压板切成若干部分(S4); 并在850℃〜1300℃下烧结层压体(S5)。
    • 8. 发明公开
    • 반도체 몰딩 장비의 인라인 금형 세정장치 및 방법
    • 在线清洁装置和半导体成型设备的方法
    • KR1020080083236A
    • 2008-09-17
    • KR1020080047109
    • 2008-05-21
    • 주식회사 피에스엠
    • 이근호이해룡유영종박남규민홍기
    • H01L21/304H01L21/56
    • H01L21/67028B29C2033/725H01L21/565
    • An in-line die cleaning apparatus of semiconductor molding equipment is provided to enhance work efficiency by cleaning a mold without separating the mold from the resin molding equipment. A cleaning module(190) is coupled with one of an upper mold and a lower mold in order to form a chamber and to generate plasma within the chamber. A transfer unit transfers the cleaning module to a cleaning standby position between the upper mold and the lower mold. An elevation unit(197) elevates the cleaning module in order to move the cleaning module from a starting position to the cleaning standby position between the upper mold and the lower mold. The cleaning unit includes a wall body(191) having a cavity and an electrode body(192) arranged in the wall body.
    • 提供半导体成型设备的在线模具清洁设备,以通过清洁模具而不使模具与树脂模制设备分离来提高工作效率。 清洁模块(190)与上模具和下模具中的一个联接,以便形成室并在室内产生等离子体。 转印单元将清洁模块转移到上模与下模之间的清洁待机位置。 升降单元(197)升起清洁模块,以便将清洁模块从起始位置移动到上模与下模之间的清洁备用位置。 清洁单元包括具有空腔的壁体(191)和布置在壁体中的电极体(192)。