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    • 6. 发明公开
    • 고해상도 고잔막률 포토레지스트 조성물
    • 具有高分辨率和高残留率的光电组合物
    • KR1020130076550A
    • 2013-07-08
    • KR1020110145178
    • 2011-12-28
    • 주식회사 동진쎄미켐
    • 김승기홍우성김봉진김병욱김동민이원영제갈은변자훈주상일함선미이두연박일규김경호유미란박주경
    • G03F7/022G03F7/004
    • G03F7/022G03F7/004G03F7/0045G03F7/20G03F7/202
    • PURPOSE: A photoresist composition is provided to indicate the high residual film rate and high definition, to use in industrial sites, and to enhance productivity because of reduced time in mass production. CONSTITUTION: A photoresist composition comprises novolak [novolak] resin of 5-30 weight%, the first diazide [diazide] group photo sensitive compound including the compound represented by the chemical formula 1 of 2-10 weight% and residual organic solvent. In the chemical formula 1., the R1, the R2 and R3 are respectively 2- diazo -1- naphthol -5- sulfonyl [2-diazo-1-naphthol-5-sulfonyl], and hydrogen or a C1-5 alkyl group, one of R1, R2 and R3 is 2- diazo -1- naphthol -5- sulfonyl at least. The N is the fixed number of 1-4. The novolak resin comprises 'novolak resin with the weight ratio of the paracresol [p-cresol] and metacresol [m-cresol] of 2:8-8:2'. [Reference numerals] (AA) Pattern size; (BB) Implementation example 1; (CC) Implementation example 2; (DD) Comparison example 1; (EE) Limiting resolution
    • 目的:提供光致抗蚀剂组合物,以表示在工业现场使用的高残留膜率和高清晰度,并且由于缩短了大量生产的时间而提高了生产率。 构成:光致抗蚀剂组合物包含5-30重量%的酚醛清漆[酚醛清漆]树脂,包含化学式1表示的化合物2-10重量%的第一重氮化物[二叠氮基]光敏化合物和残留的有机溶剂。 在化学式1中,R1,R2和R3分别为2-重氮-1-萘酚-5-磺酰基[2-重氮-1-萘酚-5-磺酰基],和氢或C 1-5烷基 至少R 1,R 2和R 3中的一个是2-重氮-1-萘酚-5-磺酰基。 N是1-4的固定数。 酚醛清漆树脂包括具有对甲酚[对甲酚]和间甲酚[间甲酚]的重量比为2:8-8:2'的酚醛清漆树脂。 (附图标记)(AA)图案尺寸; (BB)实施例1; (CC)实施示例2; (DD)比较例1; (EE)限制分辨率