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1. 发明公开

KR1020100132144A 대향 타겟식 스퍼터 장비의 타겟 효율 향상용 음극 모듈 无效
标题翻译：面向目标的目标组件改进的CATHODE模块
公开(公告)号：KR1020100132144A
公开(公告)日：2010-12-17
申请号：KR1020090050808
申请日：2009-06-09
申请人： 임유승 , 김상모 , 금민종 , 김경환
发明人： 임유승 , 김상모 , 금민종 , 김경환
IPC分类号： C23C14/35
摘要： PURPOSE: A cathode module for enhancing the target efficiency of an opposite target type of sputter equipment is provided to raise the cathode falling energy of a particle and to enable high-speed sputtering since particles on a target can uniformly cathode-fall on the front of the target. CONSTITUTION: A sputter gun consists of a first yoke plate(4), a second yoke plate and a plurality of magnets(10). One or both sides of the first yoke plate are open. The yoke plates are arranged on the center of the magnet at regular intervals. The magnets consist of upper and lower parts. The upper and lower parts of a polygon shape have different magnetic poles. Each magnet has a trapezoid shape. The yoke plate and a yoke post are formed in a T-shape. A pair of sputter guns are arranged to face each other.
摘要翻译：目的：提供一种用于提高相对目标类型的溅射设备的目标效率的阴极模块，以提高颗粒的阴极下落能量，并且能够进行高速溅射，因为靶上的颗粒可以均匀地阴极落在目标。构成：溅射枪由第一轭板（4），第二轭板和多个磁体（10）组成。第一轭板的一侧或两侧是敞开的。轭板以规则的间隔布置在磁体的中心。磁铁由上部和下部组成。多边形的上部和下部具有不同的磁极。每个磁体都有梯形。轭板和轭架形成为T形。一对溅射枪被布置为面对彼此。

2. 发明公开

KR1020100132781A 대향 타겟식 스퍼터 장치를 이용한 투명박막트랜지스터의 저온공정 제작방법 无效
标题翻译：透明薄膜溅射系统的透明薄膜晶体管的制备方法
公开(公告)号：KR1020100132781A
公开(公告)日：2010-12-20
申请号：KR1020090051554
申请日：2009-06-10
申请人： 임유승 , 김상모 , 김대현 , 김경환
发明人： 임유승 , 김상모 , 김대현 , 김경환
IPC分类号： H01L29/786 , H01L21/203
CPC分类号： H01L29/7869 , H01L21/02266 , H01L21/02631 , H01L29/45 , H01L29/4908
摘要： PURPOSE: A preparation method of transparent thin film transistor by the facing targets sputtering system is provided to be applied to a method of manufacturing the pixel driving device of a flexible display panel and a transparent display. CONSTITUTION: A thin film is formed without damage to a polymer substrate. A transparent insulating layer is comprised of one of a silicon based compound such as SiO2, SiNx, and SiON and transition metal system oxide such as ZrO, HfO, and TiO2. The substrate includes Polyethersulfone, Polycarbonate, Polyethylene terephtalate, and Polyimide.
摘要翻译：目的：提供一种通过面对靶溅射系统制备透明薄膜晶体管的方法，用于制造柔性显示面板和透明显示器的像素驱动装置的方法。构成：在不损坏聚合物基材的情况下形成薄膜。透明绝缘层由SiO 2，SiN x，SiON等硅系化合物，ZrO，HfO，TiO2等过渡金属系氧化物构成。基材包括聚醚砜，聚碳酸酯，聚对苯二甲酸乙二醇酯和聚酰亚胺。

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