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    • 1. 发明公开
    • 전도성 고분자와 탄소나노튜브 복합재를 감지물질로 이용한 가스센서 제조방법
    • 导电聚合物和碳纳米管复合材料的气体传感器制造方法
    • KR1020120016444A
    • 2012-02-24
    • KR1020100078808
    • 2010-08-16
    • 연세대학교 산학협력단
    • 이우영최향희노종욱이승현김연주
    • G01N27/407B82B3/00
    • G01N27/127C01B32/162G01N27/414G01N27/4146H01L51/0048
    • PURPOSE: A method of manufacturing a gas sensor using conductive polymer and carbon nano tube composite as a sensing material is provided to ensure high sensitivity and reproducibility on low concentration of gas and enable an operation at room temperature. CONSTITUTION: A method of manufacturing a gas sensor using conductive polymer and carbon nano tube composite as a sensing material is as follows. An insulating film(120) is formed on a substrate(110). A source electrode(140) and a drain electrode(150) are formed on a given position of the insulating film. Sensing solution containing doped conductive polymer and single carbon nano tube is added to between the source and drain electrodes on the insulating film to form a gas sensing layer. The sensing solution is made in a manner that single carbon nano tube and doped conductive polymer are mixed in organic solvent.
    • 目的:提供使用导电聚合物和碳纳米管复合材料作为传感材料制造气体传感器的方法,以确保低浓度气体的高灵敏度和再现性,并使其能够在室温下运行。 构成:使用导电聚合物和碳纳米管复合材料作为传感材料制造气体传感器的方法如下。 绝缘膜(120)形成在基板(110)上。 在绝缘膜的给定位置上形成源电极(140)和漏电极(150)。 将包含掺杂导电聚合物和单碳纳米管的感应溶液加入到绝缘膜上的源极和漏极之间以形成气体感测层。 传感溶液的制备方式是将单碳纳米管和掺杂的导电聚合物混合在有机溶剂中。