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    • 9. 发明公开
    • 상변화 기억소자 및 그 형성 방법
    • 相变材料存储器件和形成其的MEHTOD
    • KR1020070113003A
    • 2007-11-28
    • KR1020060046662
    • 2006-05-24
    • 삼성전자주식회사
    • 김락환유경창박인선송윤종이현덕임현석
    • H01L21/8247H01L27/115
    • H01L45/06H01L45/1233H01L45/126H01L45/1273H01L45/143H01L45/144H01L45/1666G11C13/0004
    • A phase change memory device and a forming method thereof are provided to minimize a contact area between the phase change material layer and a first conductive element by forming a top surface contacted to the phase material layer of an electrode to have a closed loop shape. A first insulating layer(120) and a sacrifice layer which include openings and have etch-selectivities about each other are formed on a substrate. A preliminary conductive element is formed at a side of the opening. A second preliminary insulating layer filling the openings is formed, and has the etch-selectivity about the sacrifice layer. A second insulating layer(155) is formed from the preliminary second insulating layer, and a first conductive layer is formed from the preliminary first conductive layer by removing the sacrifice layer, the preliminary first conductive element and the second preliminary insulating layer. A phase material layer(160) and a second conductive element are formed on the first conductive element, the first insulating layer and the second insulating layer.
    • 提供相变存储器件及其形成方法,通过形成与电极的相材料层接触的顶表面以使闭环形状最小化,使相变材料层和第一导电元件之间的接触面积最小化。 在基板上形成第一绝缘层(120)和牺牲层,其包括彼此相邻的开口并具有蚀刻选择性。 初步导电元件形成在开口的一侧。 形成填充开口的第二初步绝缘层,并且具有围绕牺牲层的蚀刻选择性。 从预备的第二绝缘层形成第二绝缘层(155),并且通过去除牺牲层,预备的第一导电元件和第二初级绝缘层,从预备的第一导电层形成第一导电层。 在第一导电元件,第一绝缘层和第二绝缘层上形成相材料层(160)和第二导电元件。
    • 10. 发明公开
    • 반도체 장치의 콘택 형성방법
    • 形成半导体器件接触的方法
    • KR1020070014239A
    • 2007-02-01
    • KR1020050068672
    • 2005-07-28
    • 삼성전자주식회사
    • 이현석김영천박인선조영주
    • H01L21/283
    • A contact forming method of a semiconductor device is provided to fill a contact hole without voids or seams by improving gap-fill capability using an enlarged width of the contact hole. An insulating layer(102a) with an opening portion is formed on a substrate(100). At this time, the substrate is partially exposed to the outside through the opening portion of the insulating layer. A rounding treatment is performed on an upper edge portion of the opening portion in order to extend the width of an upper portion of the opening portion. A contact for contacting the exposed portion of the substrate is formed in the opening portion. The width of the upper portion of the opening portion is extended by using an isotropic etching process.
    • 提供一种半导体器件的接触形成方法,通过使用接触孔的扩大宽度改善间隙填充能力来填充没有空隙或接缝的接触孔。 在基板(100)上形成具有开口部分的绝缘层(102a)。 此时,基板通过绝缘层的开口部分部分地暴露于外部。 为了延长开口部的上部的宽度,在开口部的上缘部进行圆整处理。 用于接触基板的露出部分的触点形成在开口部分中。 通过使用各向同性蚀刻工艺来延长开口部分的上部的宽度。