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    • 2. 发明公开
    • 레티클 저장장치
    • RETICLE STOCKER
    • KR1020070098033A
    • 2007-10-05
    • KR1020060029169
    • 2006-03-30
    • 삼성전자주식회사
    • 이현우박철준김진기신용수김양현임태웅
    • H01L21/02H01L21/027
    • G03F7/70741G03F7/70908H01L21/67359H01L21/677
    • A reticle storage apparatus is provided to shorten a time for transferring reticles by automatically transferring a reticle cassette for storing the reticles. A reticle storage module(130) is disposed inside a main body(110) in order to store a plurality of reticles in a vertical state. A reticle transfer module is formed to transfer the reticles of the reticle storage module to the outside of the main body. A load port module(150) is disposed at the outside of the main body. A reticle cassette is loaded into the load port module. The reticles transferred by the reticle transfer module are loaded into the reticle cassette. A reticle cassette transfer module(160) is formed to transfer the reticle cassette loaded in the load port module. The load port module includes a manual port disposed at a lower part of one side of the main body in order to transfer the reticle cassette in a manual manner, and an OHT port disposed at an upper part of one side of the main body to transfer automatically the reticle cassette. The reticle cassette transfer module is formed to transfer automatically the reticle cassette loaded into the OHT port.
    • 提供了一种掩模版存储装置,用于通过自动传送用于存储光罩的光罩盒来缩短传送光罩的时间。 在主体(110)的内部设置有光掩模存储模块(130),以便在垂直状态下存储多个光罩。 形成分划板传送模块,用于将标线保存模块的标线转移到主体的外部。 负载端口模块(150)设置在主体的外部。 标线盒装载到装载端口模块中。 由掩模版传送模块传送的光罩被装入光罩盒中。 形成光栅盒传送模块(160)以传送加载在装载端口模块中的标线盒。 负载端口模块包括手动端口,其设置在主体的一侧的下部,以便以手动方式传送标线盒;以及OHT端口,其设置在主体的一侧的上部以传送 自动进行标线盒。 标线盒传送模块被形成为自动传送加载到OHT端口中的标线盒。
    • 3. 发明公开
    • 이송로봇용 핸드장치
    • 传动机器人手动装置
    • KR1020000054961A
    • 2000-09-05
    • KR1019990003355
    • 1999-02-02
    • 삼성전자주식회사
    • 신용수
    • B25J15/00
    • B25J15/0206H01L21/687
    • PURPOSE: A hand device for a transmission robot is provided to efficiently utilize a work space by having a relatively low height compared to a transmission plane face. CONSTITUTION: First and second grippers(3,5) are arranged on an upper side of a transmission object(10) in a rotated position to be separated from each other. A drive motor is driven and a lead screw is rotated in the opposite direction of the drive motor. A first slider moves to a driven pulley along with first and second guide rails. Second and third sliders move along a third guide rail in a direction of mutually approaching by first and second links. First and second rotary arms rotate by third and fourth links connected to the second and third sliders. First and second gripper(3,5) are interlocked by the rotation of the first and second rotary arms and rotated in a direction of mutually approaching. Thereby, a protruded bent portion(12) of the transmission object(10) is combined in a cut groove(9) of each gripper.
    • 目的:提供一种用于传动机器人的手动装置,用于通过与传动平面相比具有相对较低的高度来有效地利用工作空间。 构成:第一和第二夹持器(3,5)被布置在彼此分离的旋转位置的传动对象(10)的上侧。 驱动马达被驱动,导螺杆沿驱动马达的相反方向转动。 第一滑块与第一和第二导轨一起移动到从动皮带轮。 第二和第三滑块沿着第一和第二连杆相互接近的方向沿着第三导轨移动。 第一和第二旋转臂由连接到第二和第三滑块的第三和第四连杆旋转。 第一和第二夹持器(3,5)通过第一和第二旋转臂的旋转而互锁,并在相互接近的方向上旋转。 由此,变速器物体(10)的突出弯曲部(12)组合在每个夹具的切槽(9)中。
    • 8. 发明公开
    • 반도체 모듈의 공급 방법 및 반도체 모듈의 공급 장치
    • 提供半导体模块的方法和供应半导体模块的装置
    • KR1020090096881A
    • 2009-09-15
    • KR1020080021957
    • 2008-03-10
    • 삼성전자주식회사
    • 박철준신용수황재웅
    • H01L21/70
    • H01L21/67253H01L21/67721
    • A method of supplying a semiconductor module and an apparatus for supplying a semiconductor module are provided to prevent damage to the semiconductor module input an apparatus by supplying a semiconductor module to a main unit when an inputting direction of the semiconductor is in concord with a set direction. In a method of supplying a semiconductor module and an apparatus for supplying a semiconductor module, a semiconductor module(150) is prepared. The front side and backplane of the semiconductor module are tested by using a slot formed in the semiconductor module. The semiconductor module is transferred to a main processing unit(500) in case that the front side and backplane of the semiconductor module are concord with the set side. The supply of the semiconductor module is stopped in case that the front side and backplane of the semiconductor module does not coincide with the set side.
    • 提供一种提供半导体模块的方法和用于提供半导体模块的装置,以防止当半导体的输入方向与设定方向一致时,通过向主单元提供半导体模块来输入设备的半导体模块的损坏 。 在提供半导体模块的方法和用于提供半导体模块的装置中,准备半导体模块(150)。 通过使用形成在半导体模块中的槽来测试半导体模块的前侧和背板。 在半导体模块的前侧和背板与设定侧一致的情况下,将半导体模块传送到主处理单元(500)。 在半导体模块的前侧和背板与设定侧不一致的情况下,停止半导体模块的供给。
    • 10. 发明公开
    • 로보트
    • KR1019970020342A
    • 1997-05-28
    • KR1019950035377
    • 1995-10-13
    • 삼성전자주식회사
    • 류지석신용수
    • B25J19/00
    • 본 발명에 따르면, 베이스 부재(31)와; 컬럼 부재(32)와; 제1아암 부재(33)와; 제2아암 부재(34)와; 제3아암 부재(35)와; 제1구동 수단(36)과; 2구동 수단(37)과; 제3구동 수단(38)과; 상기 각각의 구동 수단(36, 37, 38)에 연결되는 케이블(41)을 구비한 로보트에 있어서, 상기 케이블(41)은 상기 베이스 부재(31), 상기 컬럼 부재(32) 상기 제1 내지 제3아암 부재(33, 34, 35)의 내부에 형성된 공간을 통해 연장되며, 상기 제1아암 부재(33)의 상부에 형성된 통공(39, 40)을 통해 상기 구동 수단(36, 37)에 연결되고, 상기 제2아암 부재(34)의 상부에 형성된 통공(44)을 통해 상기 구동 수단(38)에 연결되는 것을 특징으로 하는 로보트가 제공된다. 본 발명에 따른 로보트에서는 로보트에 동력을 전달하거나 로보트를 제어하는 케이블의 연결이 로보트의 구성부 내측에 형성된 공간을 통해 연장됨으로써 케이블이 통공에 대한 마찰을 일으키지 않고, 따라서 분진이 발생할 수 있는 요인이 제거된다.