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1. 发明公开

KR1020040007260A 와이어본딩 장치 失效
标题翻译：电线连接装置
公开(公告)号：KR1020040007260A
公开(公告)日：2004-01-24
申请号：KR1020030041878
申请日：2003-06-26
申请人： 가부시키가이샤 신가와
发明人： 교마스류이치 , 곤도유타카
IPC分类号： H01L21/60
CPC分类号： H01L24/78 , B23K20/004 , B23K20/005 , B23K20/10 , B23K2201/40 , H01L24/45 , H01L2224/451 , H01L2224/78301 , H01L2224/786 , H01L2224/851 , H01L2224/85148 , H01L2224/85205 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01033 , H01L2924/01075 , H01L2924/01082 , H01L2924/14 , H01L2224/48 , H01L2924/00015 , H01L2224/05599
摘要： PURPOSE: To further reduce shock, when a capillary goes down in a wire-bonding apparatus. CONSTITUTION: A bonding head section 10 comprises an ultrasonic transducer 16 having a capillary 14 at the tip; piezoelectric elements 30, 32 that are a pair of complementary operation type expansion/contraction drive elements for relatively moving the ultrasonic transducer 16 to a bond holder 20; a shock detecting sensor 21; and a Z motor 22 for driving the bond holder 20. When one of the piezoelectric elements 30, 32 is driven in the expanding/contracting direction, the other is driven in a compression direction. When the shock detecting sensor 21 detects that the capillary 14 has moved down by the Z motor 22 and comes into contact with the upper surface of a semiconductor chip, the shock detecting sensor 21 stops the drive of the Z motor 22, performs complementary extraction/contraction drive of the piezoelectric elements 30, 32, rocks the ultrasonic transducer 16, and moves the capillary 14 upward.
摘要翻译：目的：为了进一步减少冲击，毛细管在引线接合装置中下降。结构：接合头部分10包括在尖端处具有毛细管14的超声换能器16; 压电元件30,32，其是用于将超声波换能器16相对移动到接合保持器20的一对互补操作型膨胀/收缩驱动元件; 震动检测传感器21; 以及用于驱动接合保持器20的Z电动机22.当压电元件30,32中的一个沿扩张/收缩方向被驱动时，另一个被压缩方向驱动。当冲击检测传感器21检测到毛细管14已经被Z电动机22向下移动并与半导体芯片的上表面接触时，冲击检测传感器21停止Z电机22的驱动，进行互补的提取/ 压电元件30,32的收缩驱动使超声波换能器16摇动，向上移动毛细管14。

2. 发明授权

KR100394128B1 본딩장치용 초음파 혼 有权
标题翻译： 본딩장치용초음파혼
公开(公告)号：KR100394128B1
公开(公告)日：2003-08-06
申请号：KR1020010012429
申请日：2001-03-10
申请人： 가부시키가이샤 신가와
发明人： 교마스류이치 , 니시우라신이치
IPC分类号： H01L21/60
CPC分类号： H01L24/78 , B23K20/005 , B23K20/106 , H01L2224/78301 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01033 , H01L2224/48 , H01L2224/45099
摘要： An ultrasonic horn used in, for instance, a bonding apparatus, being provided with a capillary attachment hole formed so as to be smaller than the capillary and a jig insertion hole that communicates with the capillary attachment hole. By way of inserting a jig into the jig insertion hole, the jig insertion hole is pushed open that causes the capillary attachment hole to be widened, so that the capillary is inserted and received in this enlarged capillary attachment hole. The capillary is fastened in place by the elastic force that is generated when the capillary attachment hole returns to its original shape, and the capillary is held in the horn main body without using any fastening tools.
摘要翻译：本发明提供一种超声波焊头，其用于例如接合装置，其具有形成为比毛细管小的毛细管安装孔和与毛细管安装孔连通的夹具插入孔。通过将夹具插入到夹具插入孔中，将夹具插入孔推开，使得毛细管连接孔变宽，从而将毛细管插入并容纳在该扩大的毛细管连接孔中。通过毛细管安装孔返回到原来的形状时产生的弹力将毛细管固定在适当位置，毛细管保持在喇叭主体中而不使用任何紧固工具。

3. 发明公开

KR1020010076276A 본딩장치 및 본딩방법 有权
标题翻译：结合装置和方法
公开(公告)号：KR1020010076276A
公开(公告)日：2001-08-11
申请号：KR1020010002320
申请日：2001-01-16
申请人： 가부시키가이샤 신가와
发明人： 하야타시게루 , 교마스류이치 , 에노키도사토시 , 사사노도시아키
IPC分类号： H01L21/60
CPC分类号： H01L24/78 , B23K20/004 , H01L2224/78301 , H01L2224/85205 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01015 , H01L2924/01027 , H01L2924/01033 , H01L2924/01039 , H01L2924/01074 , H01L2924/01077 , H01L2924/01078 , H01L2924/01082 , H01L2924/09701 , H01L2924/12041 , H01L2924/12042 , H01L2224/48 , H01L2224/45099 , H01L2924/00
摘要： PURPOSE: To eliminate the need for an exclusive camera for calibrating offset when using a reference member for calibrating offset. CONSTITUTION: An axis center 4a of a tool 4 is brought closer to a reference member 30, laser diodes 16 and 17 are sequentially turned on for picking up the images of the reference member 30 and the tool 4 in X and Y directions by a camera 7 for detecting positions, and the amount of deviation of the tool 4 and the reference member 30 is measured. The camera 7 for detecting positions is brought closer to the reference member 30 to measure the amount of deviation between a light axis 7a of the camera 7 for detecting positions and the reference member 30 using the camera 7 for detecting positions. Based on the measurement values and the amount of travel, an accurate amount of offset is obtained. The image light of the tool 4 and the reference member 30 is guided to the camera 7 for detecting positions by prisms 13, 14, and 18, and a half mirror 15, thus eliminating the need for an exclusive camera for detecting the amount of deviation between the tool 4 and the reference member 30.
摘要翻译：目的：为了消除在使用参考构件校准偏移量时需要专用摄像机校准偏移量。构成：工具4的轴心4a靠近参考构件30，激光二极管16和17顺序地接通，以通过照相机在X和Y方向上拾取参考构件30和工具4的图像 7，用于检测位置，并测量工具4和参考构件30的偏离量。用于检测位置的摄像机7靠近基准构件30，以测量用于检测位置的照相机7的光轴7a与使用摄像机7检测位置的基准构件30之间的偏差量。基于测量值和行程量，获得准确的偏移量。工具4和参考构件30的图像光被引导到用于检测棱镜13,14和18的位置的照相机7和半反射镜15，从而不需要专用照相机来检测偏差量在工具4和参考构件30之间。

4. 发明公开

KR1019990036913A 초음파 혼의 캐필러리 유지구조 失效
公开(公告)号：KR1019990036913A
公开(公告)日：1999-05-25
申请号：KR1019980041875
申请日：1998-10-07
申请人： 가부시키가이샤 신가와
发明人： 교마스류이치 , 가와기시미노루 , 사카쿠라미츠아키 , 아키이케다다시
IPC分类号： H01L21/60
摘要： (과제) 안정된 유지력을 확보할 수 있고 게다가 유지력이 시간이 지남에 따라 열화되지 않는다.
(해결수단) 캐필러리 부착구멍(11)으로부터 초음파 혼(10)의 선단과 반대측에 수직의 슬릿부(12)을 설치하고, 또한 캐필러리 부착구멍(11)의 부분을 얇은 두께부(13)로 하고 슬릿부(12)를 볼트(22)로 체결하여 이룬다.

5. 发明授权

KR100420272B1 오프셋 측정방법, 툴위치 검출방법 및 본딩장치 失效
标题翻译： 오프셋측정방법，툴위치치검방법및본딩장치
公开(公告)号：KR100420272B1
公开(公告)日：2004-03-02
申请号：KR1020010011101
申请日：2001-03-05
申请人： 가부시키가이샤 신가와
发明人： 하야타시게루 , 교마스류이치 , 에노키도사토시 , 사사노도시아키
IPC分类号： H01L21/60 , G01B11/00
CPC分类号： H01L24/78 , B23K20/004 , H01L2224/78301 , H01L2224/8513 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01033 , H01L2924/01039 , H01L2924/01074 , H01L2924/01082 , H01L2924/12041 , H01L2924/12042 , Y10T29/49131 , Y10T29/53178 , H01L2224/48 , H01L2224/45099 , H01L2924/00
摘要： In measuring the position of a bonding tool accurately in offset correction in a bonding apparatus, the tool is moved to approach a reference member, the tool is illuminated with a reference pattern by a laser diode, and the deviation between the reference member and tool in one horizontal direction is measured based upon the image of the reference pattern projected on the tool. A position detection camera images the tool in another horizontal direction, thus measuring the deviation of the tool and reference member. The position detection camera is moved to approach the reference member, and the deviation between the position detection camera and the reference member is measured by the position detection camera. The accurate offset amounts between the position detection camera and the tool are determined based upon these measured values and amounts of movement of the position detection camera and the tool.
摘要翻译：在键合设备中精确地测量键合工具的偏移校正中的位置时，工具被移动以接近参考构件，工具通过激光二极管以参考图案照亮，并且参考构件和工具之间的偏差在基于投影在工具上的参考图案的图像来测量一个水平方向。位置检测摄像机在另一水平方向上对工具成像，从而测量工具和参考构件的偏差。移动位置检测摄像机以接近基准构件，并且由位置检测摄像机测量位置检测摄像机和基准构件之间的偏差。基于这些测量值和位置检测照相机和工具的移动量来确定位置检测照相机和工具之间的精确偏移量。

6. 发明授权

KR100413103B1 본딩장치 및 본딩방법 有权
标题翻译： 본딩장치및본딩방법
公开(公告)号：KR100413103B1
公开(公告)日：2003-12-31
申请号：KR1020010002320
申请日：2001-01-16
申请人： 가부시키가이샤 신가와
发明人： 하야타시게루 , 교마스류이치 , 에노키도사토시 , 사사노도시아키
IPC分类号： H01L21/60
CPC分类号： H01L24/78 , B23K20/004 , H01L2224/78301 , H01L2224/85205 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01015 , H01L2924/01027 , H01L2924/01033 , H01L2924/01039 , H01L2924/01074 , H01L2924/01077 , H01L2924/01078 , H01L2924/01082 , H01L2924/09701 , H01L2924/12041 , H01L2924/12042 , H01L2224/48 , H01L2224/45099 , H01L2924/00
摘要： A wire bonding apparatus and method in which an axial center of a bonding tool is moved to the vicinity of a near reference member, laser diodes are sequentially lit, images of the reference member and bonding tool in the horizontal directions are acquired by a position detection camera, and amounts of deviation between the tool and the reference member are measured. Then, the position detection camera is caused to approach the reference member, and amounts of deviation between the optical axis of the position detection camera and the reference member are measured by the position detection camera. The accurate offset amounts are determined from the measured values and amounts of movement. Image light of the tool and reference member is conducted to the position detection camera by prisms and half-mirror, without a camera for detecting the amount of deviation between the tool and reference member.
摘要翻译：一种引线接合装置和方法，其中接合工具的轴心移动到接近基准构件的附近，激光二极管被依次点亮，基准构件和接合工具在水平方向上的图像通过位置检测相机，测量工具与参考构件之间的偏差量。然后，使位置检测用照相机接近基准部件，利用位置检测用照相机测量位置检测用照相机的光轴与基准部件的光轴的偏差量。精确的偏移量由测量值和移动量确定。工具和参考构件的图像光通过棱镜和半反射镜传导到位置检测摄像机，没有用于检测工具和参考构件之间的偏差量的摄像机。

7. 发明公开

KR1020030022032A 트랜스듀서 및 본딩장치 失效
标题翻译：传感器和接合装置
公开(公告)号：KR1020030022032A
公开(公告)日：2003-03-15
申请号：KR1020020052732
申请日：2002-09-03
申请人： 가부시키가이샤 신가와
发明人： 교마스류이치 , 가쿠타니오사무 , 세이노요시히코
IPC分类号： H01L21/60
CPC分类号： H01L2224/78 , H01L2224/78301 , H01L2924/00012
摘要： PURPOSE: To form a support member to be thin as much as possible in the main axial direction of a transducer while strength is given to the support member of the transducer. CONSTITUTION: The side ends of holding parts 5 different from connection parts with a horn main body 4 side in the respective holding parts 5 are mutually connected by a connection part 6. Outer force added to one holding part 5A1 is dispersed to both holding parts 5A1 and 5A2 connected by the connection part 6. Thus, the deformation of the holding part 5 can be suppressed, and the holding part 5 can be formed to be extremely thin in the direction of the axis 4b of a horn main body 4.
摘要翻译：目的：为了在传感器的主轴向上尽可能地形成尽可能薄的支撑构件，同时对换能器的支撑构件施加强度。构成：通过连接部6将与保持部5中的喇叭主体4侧的连接部不同的保持部5的侧端部相互连接。向一个保持部5A1附加的外力分散到两个保持部5A1 5A2连接。因此，可以抑制保持部5的变形，并且保持部5可以在喇叭主体4的轴线4b的方向上形成得非常薄。

8. 发明公开

KR1020010015152A 와이어본딩장치 失效
标题翻译：电线连接装置
公开(公告)号：KR1020010015152A
公开(公告)日：2001-02-26
申请号：KR1020000037904
申请日：2000-07-04
申请人： 가부시키가이샤 신가와
发明人： 교마스류이치
IPC分类号： H01L21/60
CPC分类号： H01L24/78 , B06B3/00 , B23K20/106 , H01L2224/78301 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01033 , H01L2924/3011 , H01L2224/48 , H01L2224/45099
摘要： PURPOSE: To reduce vibration of an ultrasonic horn when a cappillary moves in the vertical direction by mounting the ultrasonic horn and a horn supporting member in such a manner as can adjust the relative position of the ultrasonic horn in the axial center direction. CONSTITUTION: A couple of horn supporting members 20A, 20B of the identical structure are fixed to an ultrasonic horn 10, these horn supporting members 20A, 20B are fixed to a bonding arm 13 with bolts 26A, 26B, and an elongated hole of the bonding arm 13 for insertion of the bolt 26A is formed to extend in the axial direction of the ultrasonic horn 10. The bonding arm 13 is fixed to a supporting shaft 15, and this supporting shaft 15 is supported in direct or via a lifter arm to freely rotate with the bonding head. As the result, the positions of the horn supporting members 20A, 20B are adjusted to the node of the ultrasonic vibration of the ultrasonic horn 10.
摘要翻译：目的：为了减少超声波喇叭在垂直方向上的移动时，通过安装超声波喇叭和喇叭支撑部件，能够调节超声波喇叭的轴向中心方向的相对位置，减少超声波喇叭的振动。构成：将相同结构的一对喇叭支撑构件20A，20B固定到超声波喇叭10上，这些喇叭支撑构件20A，20B用螺栓26A，26B和接合臂的长孔固定在接合臂13上形成用于插入螺栓26A的臂13沿超声波喇叭10的轴向延伸。接合臂13固定到支撑轴15，并且该支撑轴15直接或通过升降臂自由地支撑用接合头旋转。结果，喇叭支撑构件20A，20B的位置被调整到超声波喇叭10的超声波振动的节点。

9. 发明授权

KR100336017B1 본딩방법 및 그 장치 失效
标题翻译：电线接合方法和装置
公开(公告)号：KR100336017B1
公开(公告)日：2002-05-08
申请号：KR1019990025619
申请日：1999-06-30
申请人： 가부시키가이샤 신가와
发明人： 교마스류이치 , 가토모토히코
IPC分类号： H01L21/60
CPC分类号： H01L24/78 , B23K20/004 , B23K2201/40 , B23Q15/22 , G05B2219/37555 , G05B2219/50299 , G06T7/70 , G06T2207/30141 , H01L2224/78301 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01033 , H01L2924/01039 , H01L2924/01061 , H01L2924/01082 , H01L2224/48 , H01L2224/45099 , H01L2224/05599
摘要： 생산성을저해하지않고, 고정도로오프셋의설정및 보정이가능하다. 위치검지용카메라(7)를레퍼런스마크(10a)의윗쪽으로이동시켜레퍼런스마크(10a)와위치검지용카메라(7)의광축(7a)의위치관계를당해위치검지용카메라(7)로측정하고, 또한미리기억된오프셋량에따라서툴(4)을레퍼런스마크(10a) 위로이동시켜서, 레퍼런스마크(10a)와툴(4)의위치관계를오프셋보정용카메라(12)에의해측정하여, 이것들의측정결과에따라서미리기억된오프셋량을보정하여정확한오프셋량을구한다.
摘要翻译：在接合方法和装置中，将位置检测摄像机移动到参考标记之上的位置，并且通过位置检测摄像机测量位置检测摄像机的参考标记和光轴之间的位置关系，预先根据存储在存储器中的偏移量将工具移动到参考标记之上的点，通过偏移校正照相机测量参考标记和工具之间的位置关系，并且通过以下方式确定精确的偏移量：基于这样的测量结果预先校正存储在存储器中的偏移量的安装。

10. 发明公开

KR1020010094967A 본딩장치용 초음파 혼 有权
标题翻译：超声波用于粘接设备
公开(公告)号：KR1020010094967A
公开(公告)日：2001-11-03
申请号：KR1020010012429
申请日：2001-03-10
申请人： 가부시키가이샤 신가와
发明人： 교마스류이치 , 니시우라신이치
IPC分类号： H01L21/60
CPC分类号： H01L24/78 , B23K20/005 , B23K20/106 , H01L2224/78301 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01033 , H01L2224/48 , H01L2224/45099
摘要： PURPOSE: To obtain a low-cost ultrasonic horn for bonding equipment which suppresses the generation of unnecessary vibrations other than fundamental frequency ultrasonic vibrations, enhances the bondability by using the bonding equipment and also reailizes a stable grasp of a capillary in the simple structure of the ultrasonic horn. CONSTITUTION: An ultrasonic horn for bonding equipment is constituted in a structure that a capillary mounting hole 11 prior to a mounting of a capillary is formed smaller than the capillary 20, a hole 12 for inserting a jig communicating to the hole 11 is provided, and the periphery of the holes 11 and 12 is shut. The hole 12 is extended using a jig 30 to extend the hole 11 larger than the capillary 20 to insert the capillary 20 in the hole 11, the capillary 20 is made to fix in the hole 11 by an elastic force which is generated when the hole 11 returns to its original state, and the ultrasonic horn is not provided with any other parts than a horn main body 10 for the fixing of the capillary 20.
摘要翻译：目的：为了获得抑制基频超声波振动以外的不必要振动产生的接合设备的低成本超声波喇叭，通过使用接合设备增强了接合性，并且还以超声波喇叭。构成：用于粘合设备的超声波喇叭形成为在毛细管安装之前的毛细管安装孔11形成为小于毛细管20的结构，设置有用于插入与孔11连通的夹具的孔12，孔11和12的周边被关闭。使用夹具30延伸孔12以将孔11延伸到比毛细管20更大的位置，以将毛细管20插入孔11中，毛细管20通过弹性力固定在孔11中，该弹力在孔 11返回到其原始状态，并且超声波喇叭不具有除了用于固定毛细管20的喇叭主体10之外的任何其它部分。

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