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1. 发明专利

JP5302705B2 Laser light irradiation device and irradiation method 有权
公开(公告)号：JP5302705B2
公开(公告)日：2013-10-02
申请号：JP2009029934
申请日：2009-02-12
申请人：浜松ホトニクス株式会社
发明人：政明坂倉 , 一之平尾 , 清貴三浦 , 靖彦下間 , 昇央福智 , 晴康伊藤
IPC分类号： B23K26/073 , B23K26/06 , B23K26/08 , C03C23/00 , G03H1/04
摘要： PROBLEM TO BE SOLVED: To provide a laser beam irradiation apparatus and method for enhancing continuity of a machining pattern by irradiating a workpiece with a laser beam. SOLUTION: The laser beam irradiation apparatus 1A is constituted of a laser beam source 10 for outputting the pulse laser beam, a space light modulator 15 for presenting the hologram pattern for phase modulation, a focusing optical system for focusing the modulated laser beam on the workpiece 30 with an irradiation pattern corresponding to the hologram pattern, and an irradiation control unit 50. The workpiece 30 is irradiated with the laser beam while changing irradiation positions in the predetermined moving direction. The control unit 50 controls the hologram pattern with the hologram pattern and the irradiation pattern to be applied to a first irradiation position, and the hologram pattern and the irradiation pattern to be applied to an adjacent second irradiation position so that the number of elements of the pattern is different in the direction orthogonal to the moving direction. COPYRIGHT: (C)2010,JPO&INPIT

2. 发明专利

JP4550963B2 Optical waveform shaping device 有权
公开(公告)号：JP4550963B2
公开(公告)日：2010-09-22
申请号：JP2000082626
申请日：2000-03-23
申请人：浜松ホトニクス株式会社
发明人：晴康伊藤 , 恒幸浦上
IPC分类号： G02B26/06 , G02F1/01 , G02F1/03

3. 发明专利

JP5368033B2 Laser light irradiation apparatus and a laser beam irradiation method 有权
公开(公告)号：JP5368033B2
公开(公告)日：2013-12-18
申请号：JP2008223975
申请日：2008-09-01
申请人：浜松ホトニクス株式会社
发明人：直也松本 , 卓井上 , 晴康伊藤
IPC分类号： B23K26/06 , B23K26/067
摘要： PROBLEM TO BE SOLVED: To provide a laser beam irradiation apparatus which can reduce extension of laser beam condensing range at each of a plurality of condensing points inside of an object. SOLUTION: The laser beam irradiation apparatus 1 is an apparatus which condenses and irradiates laser beam to a plurality of condensing points inside of the object 9, and includes a laser beam source 10, a prism 20, a spatial optical modulator 30, a lens 41, a lens 42, a mirror 50 and an objective lens 60. The laser beam output from the laser beam source 10 is input to the spatial optical modulator 30, which displays hologram to modulate phase of laser beam for each of a plurality of pixels arranged two-dimensionally and outputs the laser beam in a modulated phase. The hologram displayed on the spatial optical modulator 30 is generated by overlapping a condensing hologram that condenses laser beam to each of a plurality of condensing points and a compensating hologram that compensates aberration of laser beam corresponding to each of a plurality of condensing points. COPYRIGHT: (C)2010,JPO&INPIT

4. 发明专利

JP5322765B2 Laser processing equipment and laser processing method 有权
公开(公告)号：JP5322765B2
公开(公告)日：2013-10-23
申请号：JP2009110906
申请日：2009-04-30
申请人：浜松ホトニクス株式会社
发明人：晴康伊藤 , 直也松本
IPC分类号： B23K26/04 , B23K26/06 , B23K26/067 , G02B27/28
摘要： PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus that improves efficiency of utilizing a laser beam. SOLUTION: The laser beam machining apparatus 1 includes a laser beam source 10, a polarization control element 14, a spatial light phase modulator 18, and a condensing lens 40. The spatial light phase modulator 18 phase-modulates a first polarizing component h1 that is coincident with the polarization direction of the spatial light phase modulator, among the laser beams from the polarization control element 14, and outputs the phase-modulated first polarizing component h1 as modulated light hm, outputs a second polarizing component h2 whose polarization direction is orthogonal to the polarization direction of the spatial light phase modulator as non-modulated light ho without phase-modulating the second polarizing component h2, and controls the phase of the modulated light hm so that the condensing position B of the modulated light hm is different from the condensing position A of the non-modulated light ho. The polarization control element 14 changes polarization of the laser beam from the laser beam source 10 and controls the polarization of the laser beam that is made incident on the spatial light phase modulator 18 so that intensity of the modulated light hm and that of the non-modulated light ho are equal to or above the threshold value of a workpiece 50 respectively. COPYRIGHT: (C)2011,JPO&INPIT

5. 发明专利

JP5094995B2 Laser processing method 有权
公开(公告)号：JP5094995B2
公开(公告)日：2012-12-12
申请号：JP2011163539
申请日：2011-07-26
申请人：浜松ホトニクス株式会社
发明人：誠中野 , 卓井上 , 晴康伊藤 , 直也松本
IPC分类号： B23K26/38 , B23K26/00 , B23K26/40 , B23K101/40 , H01L21/301
CPC分类号： B23K26/0057 , B23K26/0676 , B23K26/40 , B23K2203/50
摘要： PROBLEM TO BE SOLVED: To provide a laser beam machining method which can shorten takt time in laser beam machining, and a method for manufacturing semiconductor equipment. SOLUTION: A laser beam L is modulated by means of a reflective spatial light modulator. While the modulated laser beam L is focused on an object 1 to be machined, the laser beam L is moved on the object 1 to be machined. At this time, the laser beam L is modulated by the spatial light modulator so that reformed spots S and S are formed, with the laser beam L focused on two separate places along the direction D in which the laser beam L is moved on the object 1 to be machined. COPYRIGHT: (C)2011,JPO&INPIT

6. 发明专利

JP4959590B2 Observation device 有权
公开(公告)号：JP4959590B2
公开(公告)日：2012-06-27
申请号：JP2008006004
申请日：2008-01-15
申请人：浜松ホトニクス株式会社
发明人：晴康伊藤 , 豊彦山内 , 直也松本 , 昇央福智
IPC分类号： G02B21/32 , B23K26/03 , B23K26/04 , B23K26/06 , G02B21/18
摘要： PROBLEM TO BE SOLVED: To provide an observation apparatus or the like, stably performing a desired operation and allows for downsizing. SOLUTION: First linearly-polarized coherent light in a first direction output from a light source 11 is outputted while being phase-modulated by a spatial light modulator 51 by every pixel, then, Fourier-converted and imaged on an object 91 through an imaging lens 61. Second linearly-polarized light in a second direction output from a light source 21 via a polarized-light selecting unit 22 is output without being phase-modulated by the spatial light modulator 51, then, the object 91 is irradiated with the light through the imaging lens 61. The light (reflected light and scattered light) generated when the object 91 is irradiated with the second light by the imaging lens 61 is input to an observation unit 31, and the object 91 is observed on the basis of the input light. COPYRIGHT: (C)2009,JPO&INPIT

7. 发明专利

JP4409670B2 Optical waveform shaping device 有权
公开(公告)号：JP4409670B2
公开(公告)日：2010-02-03
申请号：JP21869699
申请日：1999-08-02
申请人：浜松ホトニクス株式会社
发明人：晴康伊藤 , 成浩吉田 , 晴義豊田
IPC分类号： G02F1/01 , G02F1/13 , G02F1/1335

8. 发明专利

JP4409669B2 Optical waveform shaping device 有权
公开(公告)号：JP4409669B2
公开(公告)日：2010-02-03
申请号：JP21868999
申请日：1999-08-02
申请人：浜松ホトニクス株式会社
发明人：晴康伊藤 , 成浩吉田 , 晴義豊田
IPC分类号： G02F1/01 , G02F1/13

9. 发明专利

JP3713350B2 Light reactor 失效
公开(公告)号：JP3713350B2
公开(公告)日：2005-11-09
申请号：JP2402297
申请日：1997-02-06
申请人：浜松ホトニクス株式会社
发明人：晴康伊藤 , 裕土屋 , 誠細田 , 晴義豊田 , 紳一郎青島
IPC分类号： G02F1/13 , B23K26/03 , B23K26/06 , G02F1/135 , H01S3/10 , H01S4/00
CPC分类号： B23K26/06 , B23K26/03

10. 发明专利

JP5468627B2 Laser processing equipment 有权
公开(公告)号：JP5468627B2
公开(公告)日：2014-04-09
申请号：JP2012020195
申请日：2012-02-01
申请人：浜松ホトニクス株式会社
发明人：誠中野 , 卓井上 , 晴康伊藤 , 直也松本
IPC分类号： B23K26/38 , B23K26/06 , B23K26/40 , B28D5/00 , C03B33/09 , H01L21/301
CPC分类号： B23K26/0057 , B23K26/0676 , B23K26/40 , B23K2203/50
摘要： PROBLEM TO BE SOLVED: To provide a laser beam machining method which can shorten takt time in laser beam machining, and a method for manufacturing semiconductor equipment. SOLUTION: A laser beam L is modulated by means of a reflective spatial light modulator. While the modulated laser beam L is focused on an object 1 to be machined, the laser beam L is moved on the object 1 to be machined. At this time, the laser beam L is modulated by the spatial light modulator so that reformed spots S and S are formed, with the laser beam L focused on two separate places along the direction D in which the laser beam L is moved on the object 1 to be machined. COPYRIGHT: (C)2011,JPO&INPIT

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