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    • 2. 发明授权
    • 광학식 2차원 및 3차원 형상 측정 시스템
    • 광학식2차원및3차원형상측정시스템
    • KR100449175B1
    • 2004-09-22
    • KR1020020002307
    • 2002-01-15
    • (주) 인텍플러스
    • 임쌍근김기홍조상현최이배이상윤
    • G01B11/25
    • G01B11/24G01B11/02G01B11/303
    • Disclosed is a two-dimensional and three-dimensional optical measurement apparatus capable of alternately or selectively measuring two-dimensional sizes and three-dimensional features of an object, and measuring three-dimensional features of an object without using reflected light from a reference plane but only using a projection grating, thereby minimizing reducing measurement error. The apparatus comprises a CCD camera installed at an upper portion in a probe casing for producing a two-dimensional image and a three-dimensional image of an object through an image-forming lens, a first lighting system installed under the CCD camera and illuminating a measurement surface of the object to be measured when measuring a two-dimensional size of the object, a second lighting system installed under the first lighting system and attached to an image pick-up tube provided to the bottom of the probe casing 10 for illuminating corners of the object to be measured when measuring a two-dimensional size of the object, a third lighting system installed in a portion of the probe casing for illuminating the measurement surface of the object through a projection grating, a projection lens, a total reflection mirror and the image pick-up tube when measuring a three-dimensional feature of the object, and a piezoelectric actuator for finely moving the projection grating.
    • 公开了一种二维和三维光学测量设备,其能够交替地或选择性地测量对象的二维尺寸和三维特征,并测量对象的三维特征而不使用来自参考平面的反射光,但是 只使用投影光栅,从而使减少测量误差最小化。 该装置包括安装在探测器壳体上部的CCD照相机,用于通过成像透镜产生物体的二维图像和三维图像;第一照明系统,安装在CCD照相机下面并照亮 在测量物体的二维尺寸时测量被测物体的测量表面;第二照明系统,其安装在第一照明系统下方并且附接到设置在探测器壳体10的底部上的用于照亮角落的图像拾取管 当测量物体的二维尺寸时,测量对象的第一照明系统;安装在探测器外壳的一部分中的第三照明系统,用于通过投影光栅照射对象的测量表面;投影透镜;全反射镜 以及当测量物体的三维特征时的图像拾取管以及用于精细地移动投影光栅的压电致动器。
    • 3. 发明公开
    • 촬상 영상 고속 포획장치 및 그 방법
    • 高速拍摄摄影图像的设备及方法
    • KR1020040026927A
    • 2004-04-01
    • KR1020020058562
    • 2002-09-26
    • (주) 인텍플러스
    • 임쌍근최이배이상윤조상현김태완장석준
    • G01B11/30
    • G06K9/2027H04N5/2354H04N5/335
    • PURPOSE: An apparatus and a method for capturing a photographing image at a high speed are provided to improve productivity by shortening a test process for an object using an optical profile measurement system. CONSTITUTION: An apparatus for capturing a photographing image includes a CCD camera(10), a synchronization signal generating section(56), an illumination controller(30), and an image capturing section(55). The CCD camera(10) photographs a subject positioned in a photographing area. The synchronization signal generating section(56) generates an illumination control signal when the CCD camera(10) outputs a frame enable signal. The illumination controller(30) controls an operation of illumination lamps according to the illumination control signal generated from the synchronization signal generating section(56). The image capturing section(55) captures an image outputted from the CCD camera(10).
    • 目的:提供一种用于高速捕获拍摄图像的装置和方法,以通过使用光学轮廓测量系统缩短对象的测试处理来提高生产率。 构成:拍摄图像的拍摄装置包括CCD摄像机(10),同步信号生成部(56),照明控制器(30)和图像拍摄部(55)。 CCD摄像机(10)拍摄位于拍摄区域中的被摄体。 当CCD照相机(10)输出帧使能信号时,同步信号产生部分(56)产生照明控制信号。 照明控制器(30)根据从同步信号生成部(56)生成的照明控制信号,控制照明灯的动作。 摄像部(55)拍摄从CCD摄像机(10)输出的图像。
    • 4. 发明公开
    • 기판 표면 검사 시스템 및 검사 방법
    • 一种光学检查系统和基片表面方法
    • KR1020140031687A
    • 2014-03-13
    • KR1020120098308
    • 2012-09-05
    • (주) 인텍플러스
    • 강민구강성용주병권이상윤최이배유준호이현민
    • G01N21/88G01B11/30
    • G01N21/9501G01N21/8851G01N21/956G01N2021/9513G06T7/0004
    • The present invention relates to a device and a method for inspecting abnormal conditions on an LCD or an OLED substrate and, more particularly, to an inspecting system for the surface of a substrate and an inspecting method thereof, which improve an yield rate by improving the accuracy of inspection for abnormal conditions on an LCD or an OLED substrate using an optical image measuring system. The inspecting system for the surface of a substrate is an optical inspecting system by comprising: a camera which outputs by photographing a lighting device and a substrate; a control unit which captures the image photographed by the camera and treats the captured image in order to determine a fair quality product or a defective product; and a washing device which washes the surface of the substrate. The camera comprises a first camera and an additional second camera. The washing device is an air spraying device for spraying air and is installed between the first and the second cameras. Meanwhile, the inspecting method for the surface of a substrate includes a step of photographing an image reflected by light emitted from a lighting device to a substrate, and treats and determines the photographed image. When the substrate is determined to have foreign materials in the step of treating and determining the photographed image, the inspecting method the surface of a substrate can further include a step of spraying air onto the substrate using an air spraying device as a washing device, and a step of determining again by photographing an image after spaying air.
    • 本发明涉及一种用于检查LCD或OLED基板上的异常状况的装置和方法,更具体地,涉及用于基板表面的检查系统及其检查方法,其通过改善 使用光学图像测量系统对LCD或OLED基板上的异常状况的检查精度。 基板表面的检查系统是光学检查系统,包括:照相机,其通过拍摄照明装置和基板输出; 控制单元,其捕获由照相机拍摄的图像,并处理所拍摄的图像,以便确定公平的质量产品或有缺陷的产品; 以及洗涤基板表面的洗涤装置。 相机包括第一相机和附加的第二相机。 洗涤装置是用于喷射空气并安装在第一和第二相机之间的空气喷射装置。 同时,基板表面的检查方法包括将从照明装置发射的光反射的图像拍摄到基板的步骤,并处理并确定所拍摄的图像。 当在处理和确定拍摄图像的步骤中确定基板具有异物时,基板的表面的检查方法还可以包括使用空气喷射装置作为清洗装置将空气喷射到基板上的步骤,以及 通过在喷射空气之后拍摄图像来再次确定的步骤。
    • 6. 发明授权
    • 반도체 패키지의 인트레이 검사 장치 및 검사 방법
    • 用于检查半导体器件的托盘的装置和方法
    • KR100705649B1
    • 2007-04-09
    • KR1020050048585
    • 2005-06-07
    • (주) 인텍플러스
    • 이상윤최이배강민구임쌍근
    • G01R31/26H01L21/66
    • G01R31/2896
    • 본 발명은 반도체 패키지의 외관 검사 장치 및 방법에 관한 것으로, 보다 상세하게는 반도체 패키지의 인트레이(In-Tray) 검사 시 트레이에 수납된 반도체 패키지에 따라 소요되는 검사 시간을 단축함은 물론 조사되는 광에 의해 발생되는 그림자에 의한 간섭 영향을 최소화하여 검사 작업에 대한 효율성 및 신뢰성을 향상시키실 수 있는 반도체 패키지의 인트레이 검사 장치 및 검사 방법에 관한 것이다.
      본 발명에 따른 반도체 패키지의 인트레이 검사 장치는 반도체 패키지가 수납된 트레이의 이송 경로 상에 설치된 제1,2비전프로브를 통해 획득한 반도체 패키지의 이미지 정보와 해당 랏의 반도체 패키지에 대한 정상 이미지 정보를 비교하여 반도체 패키지의 결합 유무를 분석하고 판별하는 중앙 제어 장치를 포함하는 반도체 패키지의 인트레이 검사 장치에 있어서, 상기 제1비전프로브는 상기 트레이가 이송되는 레일 방향과 동일 축상에 배치되고, 상기 제2비전프로브는 상기 제1비전프로브에 대하여 직각으로 회전 배치된 것을 특징으로 한다.
      반도체 패키지, 인트레이, 비전 검사, 리드
    • 8. 发明公开
    • 스테레오비전과 모아레를 이용한 3차원 검사 방법 및 장치
    • 用于3D和三维视觉检测的方法和装置
    • KR1020050031328A
    • 2005-04-06
    • KR1020030067590
    • 2003-09-29
    • (주) 인텍플러스
    • 이현민강민구최이배이상윤임쌍근
    • H01L21/66
    • A method and an apparatus for three-dimensional inspection using a stereo vision and a moire are provided to detect a defect of a lead of a package having a bending state and a phase value of 180 degrees and more by overcoming limitation of 2 phi ambiguity. A light projection part(2) includes a condensing lens for condensing light generated from a light source(21) and a projection grating(23) and a projection lens(24) for projecting the condensed light to a measuring target. A first light-receiving part(3) includes an image forming lens(31) and a CCD camera(32) to obtain a grating stripe image. A second light-receiving part(4) includes an image forming lens(41) and a stereo vision camera(42) to obtain an image of the measuring target.
    • 提供了使用立体视觉和莫尔条纹进行三维检查的方法和装置,通过克服2个phi模糊度的限制来检测具有弯曲状态和相位值为180度以上的包装的引线的缺陷。 光投射部分(2)包括用于聚集从光源(21)产生的光和投影光栅(23)的聚光透镜和用于将聚光的光投射到测量对象的投影透镜(24)。 第一光接收部分(3)包括图像形成透镜(31)和CCD相机(32),以获得光栅条纹图像。 第二光接收部分(4)包括图像形成透镜(41)和立体视觉相机(42),以获得测量对象的图像。
    • 9. 发明公开
    • 광학식 2차원 및 3차원 형상 측정 시스템
    • 光学2D和3D轮廓测量系统
    • KR1020030061644A
    • 2003-07-22
    • KR1020020002307
    • 2002-01-15
    • (주) 인텍플러스
    • 임쌍근김기홍조상현최이배이상윤
    • G01B11/25
    • G01B11/24G01B11/02G01B11/303
    • PURPOSE: An optical 2D and 3D profile measuring system is provided to selectively measure a 2D profile or a 3D profile by using projection lattices without using a reference surface. CONSTITUTION: An optical 2D and 3D profile measuring system includes a CCD camera(11) installed at an inner upper portion of a probe case(10) so as to obtain 2D or 3D image information of an object. A first illumination section(15) is mounted under the CCD camera(14) so as to illuminate a measuring surface of the object when measuring 2D profile of the object. A second illumination section(18) is installed in a photographing hole(17) formed at a lower surface of the probe case(10) so as to illuminate an edge part of the object when measuring 2D profile of the object. A third illumination section(23) is provided to illuminate a measuring surface of the object through a projection lattice(22), a projection lens(20), a total reflection mirror(19) and the photographing hole(17) when measuring 3D profile of the object. The projection lattice(22) is shifted by means of a piezoelectric actuator(24).
    • 目的:提供光学2D和3D轮廓测量系统,以便在不使用参考表面的情况下通过使用投影格子来选择性地测量2D轮廓或3D轮廓。 构成:光学2D和3D轮廓测量系统包括安装在探针壳体(10)的内部上部的CCD照相机(11),以便获得物体的2D或3D图像信息。 第一照明部分(15)安装在CCD照相机(14)下方,以便在测量物体的2D轮廓时照亮物体的测量表面。 第二照明部分(18)安装在形成在探针壳体(10)的下表面处的拍摄孔(17)中,以便在测量物体的2D轮廓时照射物体的边缘部分。 第三照明部分(23)被设置成当测量3D轮廓时通过投影格子(22),投影透镜(20),全反射镜(19)和拍摄孔(17)来照亮物体的测量表面 的对象。 投影格子(22)借助于压电致动器(24)移动。
    • 10. 发明授权
    • 모아레무늬 발생기를 적용한 위상천이 영사식 모아레방법및 장치
    • 모아레무늬발생기를적용한위상천이영사식모아레방법및장
    • KR100389017B1
    • 2003-06-25
    • KR1020000069549
    • 2000-11-22
    • (주) 인텍플러스
    • 임쌍근김승우이상윤정창진최이배조영식박경근
    • H04N13/00
    • G01B11/2527
    • An apparatus and method for measuring a three-dimensional shape of an object using a projection moiré device. The method comprises the steps of obtaining a grid pattern image projected on a reference plane of a moving table and applying a buckets algorithm thereto, thereby achieving a reference phase, obtaining a grid pattern image projected on the object set on the moving table and applying a buckets algorithm thereto, thereby achieving an object phase, calculating a difference phase between the object phase and the reference phase, thereby achieving a moiré phase, and unwrapping the moiré phase, thereby achieving a level information of the object. The apparatus and method measure the three-dimensional shape using a projection grid without a reference grid, thereby achieving compactness of equipment, simplicity in usage and manufacturing cost reduction.
    • 一种用于使用投影莫尔条纹来测量物体的三维形状的设备和方法; 设备。 该方法包括以下步骤:获得投影在移动台的参考平面上的网格图案图像,并对其应用分块算法,从而实现参考相位;获得投影在设置在移动台上的对象上的网格图案图像, 从而实现目标相位,计算目标相位和参考相位之间的差分相位,从而实现云纹; 阶段,并解开moiré 阶段,从而实现对象的等级信息。 该装置和方法使用没有参考栅格的投影栅格来测量三维形状,由此实现设备的紧凑性,使用简单性和制造成本降低。