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    • 1. 发明公开
    • 유전체 코어를 갖는 수동소자 제조방법
    • 具有介质芯的被动元件的制造工艺
    • KR1020090071427A
    • 2009-07-01
    • KR1020080132812
    • 2008-12-24
    • (주)웨이브닉스이에스피한국과학기술원
    • 권영세육종민
    • H01P3/08
    • H01P3/08H01P9/02H01P11/003
    • A manufacturing method of a passive device having a dielectric core is provided to easily form a conductive structure having thick thickness by performing plating after forming a dielectric core. A core(20) is formed on a substrate(10) into a shape having a step with a dielectric(S20). The dielectric is one among polymer, metal oxide, and anodized silicon. A seed metal(30) is coated on a surface of the core(S30). A masking pattern(40) is formed on a non-plating region by using a dielectric thin film(S40). A plating layer(50) is formed by electroplating(S50). The masking pattern and the seed metal of the non-plating region are removed(S60).
    • 提供具有介质芯的无源器件的制造方法,以在形成介质芯之后通过进行电镀来容易地形成具有厚度厚度的导电结构。 在基板(10)上形成具有电介质台阶的形状(S20)(S20)。 电介质是聚合物,金属氧化物和阳极氧化硅之一。 在芯的表面上涂覆种子金属(30)(S30)。 通过使用电介质薄膜在非电镀区域上形成掩模图案(S40)(S40)。 通过电镀形成镀层(S50)(S50)。 去除非电镀区域的掩模图案和种子金属(S60)。
    • 3. 发明公开
    • 양극산화막을 이용한 반도체 패키지 모듈 및 그 제조방법
    • 使用阳极氧化层的半导体封装模块及其制造方法
    • KR1020080108885A
    • 2008-12-16
    • KR1020070094584
    • 2007-09-18
    • (주)웨이브닉스이에스피한국과학기술원
    • 권영세김경민
    • H01L23/12
    • H01L2224/04105H01L2224/19H01L2224/32225H01L2224/32245H01L2224/73267H01L2224/92244H01L2924/01078H01L2924/15153
    • A semiconductor package module and a manufacturing method thereof are provided to effectively connect the semiconductor device, the optical device, and the circuitry by extending and forming the lead line up to girth of the organic insulating layer or the oxide layer. A semiconductor device module using the anodized film comprises the substrate(10), the oxide layer(12), the semiconductor device(16), the organic layer, and the lead line(26). The substrate is formed of the material forming the anodized film. The oxide layer is formed on the top of the substrate. The oxide layer has one or more opening(14). The semiconductor device is mounted in the opening of the oxide layer. The organic layer is formed in order to cover the oxide layer and the semiconductor device. The lead line is formed on the organic layer or the oxide layer. The lead line is connected to the semiconductor device.
    • 提供了一种半导体封装模块及其制造方法,以通过将引线延伸和形成直到有机绝缘层或氧化物层的周长来有效地连接半导体器件,光学器件和电路。 使用阳极氧化膜的半导体器件模块包括衬底(10),氧化物层(12),半导体器件(16),有机层和引线(26)。 基板由形成阳极氧化膜的材料形成。 氧化物层形成在衬底的顶部。 氧化物层具有一个或多个开口(14)。 半导体器件安装在氧化物层的开口中。 形成有机层以覆盖氧化物层和半导体器件。 引线在有机层或氧化物层上形成。 引线与半导体器件连接。