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1. 发明申请

US20100206164A1 GAS PURIFICATION METHOD 失效
标题翻译：气体净化方法
公开(公告)号：US20100206164A1
公开(公告)日：2010-08-19
申请号：US12682329
申请日：2008-10-09
申请人： Yuzuru Miyazawa , Yoshihiko Kobayashi , Kenji Haraya , Miki Yoshimune
发明人： Yuzuru Miyazawa , Yoshihiko Kobayashi , Kenji Haraya , Miki Yoshimune
IPC分类号： B01D53/22
CPC分类号： C01B7/00 , B01D53/22 , B01D53/228 , B01D63/02 , B01D71/021 , B01D2257/20 , B01D2258/0216 , C01B3/04 , C01B3/503 , C01B2203/0405 , C01B2210/0045 , C01B2210/0051 , C01B2210/0062 , C01C1/024 , Y02E60/364
摘要： A gas purification method of the present invention uses a carbon membrane having a molecular sieving action to purify at least one selected from the group consisting of a hydride gas, a hydrogen halide gas, and a halogen gas, each gas containing an impurity at 10 ppm or less. The present invention can be used for a recovery unit that recoveries a used gas to reuse it as an ultrapure semiconductor material gas, and a unit or equipment that produces or charges an ultrapure semiconductor material gas.
摘要翻译：本发明的气体净化方法使用具有分子筛分作用的碳膜来净化选自氢化物气体，卤化氢气体和卤素气体中的至少一种，每种气体含有10ppm的杂质或更少。本发明可用于回收利用废气的回收单元，以将其用作超纯半导体材料气体，以及产生或充电超纯半导体材料气体的单元或设备。

2. 发明授权

US08357228B2 Gas purification method 失效
标题翻译：气体净化方法
公开(公告)号：US08357228B2
公开(公告)日：2013-01-22
申请号：US12682329
申请日：2008-10-09
申请人： Yuzuru Miyazawa , Yoshihiko Kobayashi , Kenji Haraya , Miki Yoshimune
发明人： Yuzuru Miyazawa , Yoshihiko Kobayashi , Kenji Haraya , Miki Yoshimune
IPC分类号： B01D53/22
CPC分类号： C01B7/00 , B01D53/22 , B01D53/228 , B01D63/02 , B01D71/021 , B01D2257/20 , B01D2258/0216 , C01B3/04 , C01B3/503 , C01B2203/0405 , C01B2210/0045 , C01B2210/0051 , C01B2210/0062 , C01C1/024 , Y02E60/364
摘要： A gas purification method of the present invention uses a carbon membrane having a molecular sieving action to purify at least one selected from the group consisting of a hydride gas, a hydrogen halide gas, and a halogen gas, each gas containing an impurity at 10 ppm or less. The present invention can be used for a recovery unit that recoveries a used gas to reuse it as an ultrapure semiconductor material gas, and a unit or equipment that produces or charges an ultrapure semiconductor material gas.
摘要翻译：本发明的气体净化方法使用具有分子筛分作用的碳膜来净化选自氢化物气体，卤化氢气体和卤素气体中的至少一种，每种气体含有10ppm的杂质或更少。本发明可用于回收利用废气的回收单元，以将其用作超纯半导体材料气体，以及产生或充电超纯半导体材料气体的单元或设备。

3. 发明申请

US20130032028A1 METHOD FOR OPERATING GAS SEPARATION DEVICE 审中-公开
标题翻译：操作气体分离装置的方法
公开(公告)号：US20130032028A1
公开(公告)日：2013-02-07
申请号：US13641605
申请日：2011-04-08
申请人： Yuzuru Miyazawa , Yoko Aomura , Yoshihiko Kobayashi , Kenji Haraya , Miki Yoshimune
发明人： Yuzuru Miyazawa , Yoko Aomura , Yoshihiko Kobayashi , Kenji Haraya , Miki Yoshimune
IPC分类号： B01D53/22 , B01D71/02
CPC分类号： B01D53/22 , B01D71/021 , B01D2257/108 , B01D2257/11 , B01D2311/13 , B01D2317/022 , B01D2319/04 , C01B3/503 , C01B23/0042 , C01B2210/0029 , C01B2210/0037 , C01B2210/0039 , C01B2210/004 , C01B2210/0053 , C01B2210/0079
摘要： Provided are a method for operating a gas separation device capable of performing gas separation with high separation capability and treatment amount in a small membrane area or in a small number of separation membrane modules, and a method for recovering a residual gas capable of performing more suitable detoxifying treatment or recycling by efficiently separating and recovering a mixed gas remaining in a cylinder, using the operating method. Two or more separation membrane modules are connected with each other in parallel. One separation membrane module is continuously and repeatedly operated in an operation cycle including: a first process for supplying a mixed gas into an airtight container and filling the airtight container with pressure; a second process for, when a predetermined time has elapsed or a predetermined pressure has been reached, stopping the supply of the mixed gas and retaining the supplied mixed gas; a third process for, when a predetermined time has elapsed or a predetermined pressure has been reached, recovering the mixed gas from a non-permeated gas discharge port; and a fourth process for, when a predetermined time has elapsed or a predetermined pressure has been reached, closing the non-permeated gas discharge port. The other separation membrane modules are operated in operation cycles shifted by respective predetermined intervals.
摘要翻译：本发明提供一种能够进行气体分离装置的方法，所述气体分离装置能够在小膜区域或少量分离膜组件中具有高分离能力和处理量的气体分离，以及用于回收能够进行更合适的残留气体的方法通过使用该操作方法有效地分离和回收残留在气缸中的混合气体来进行解毒处理或再循环。两个或更多个分离膜组件彼此并联连接。一个分离膜组件在操作循环中连续重复操作，包括：将混合气体供应到气密容器中并用压力填充气密容器的第一工序; 当经过预定时间或达到预定压力时，停止供应混合气体并保持供应的混合气体的第二过程; 当经过预定时间或达到预定压力时，从未透过气体排出口回收混合气体的第三工序; 以及当达到预定时间或达到预定压力时，关闭非渗透气体排出口的第四过程。其他分离膜组件在以预定间隔移动的操作循环中操作。

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