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1. 发明授权

US5264705A Specimen-driving apparatus for electron microscope which tilts and translates while preventing contact damage 失效
标题翻译：用于电子显微镜的样品驱动装置，其在防止接触损伤的同时倾斜和平移
公开(公告)号：US5264705A
公开(公告)日：1993-11-23
申请号：US862528
申请日：1992-04-02
申请人： Toshikazu Honda , Mikio Naruse , Toshikatsu Kaneyama , Yu Ishibashi , Ikuya Nishimura
发明人： Toshikazu Honda , Mikio Naruse , Toshikatsu Kaneyama , Yu Ishibashi , Ikuya Nishimura
IPC分类号： G01Q30/02 , G01Q30/20 , H01J37/20
CPC分类号： H01J37/20
摘要： A specimen-driving apparatus used with an electron microscope. The apparatus can translate or tilt the specimen holder while preventing it from being damaged if a human operator performs any erroneous operation. The device has X, Y, Z translation directive devices, and a tilt directive device for permitting the operator to enter instructions for translating and tilting the specimen holder. A contact detector senses that the holder is in contact with the upper magnetic pole piece. A tilt condition decision portion determines whether the holder has tilted into the positive or negative domain. A Z domain decision portion determines whether the Z coordinate of the holder lies in the positive or negative domain. When the contact of the holder with the pole piece is detected, reverse movement of the holder along the Z-axis is inhibited. Also, reverse tilting movement of the holder is inhibited. When the holder comes out of contact with the pole piece, these reverse movements are permitted.
摘要翻译：用电子显微镜使用的试样驱动装置。如果操作人员执行任何错误的操作，该装置可以平移或倾斜试样架，同时防止其受损。该装置具有X，Y，Z平移指示装置和倾斜指令装置，用于允许操作者输入用于平移和倾斜试样架的指令。接触检测器感测到保持器与上磁极片接触。倾斜条件决定部分确定保持器是否已经倾斜到正或负域。 Z域决定部分确定持有者的Z坐标是否位于正或负域。当保持器与极片的接触被检测到时，保持器沿Z轴的反向运动被抑制。此外，保持器的反向倾斜运动被抑制。当支架与极片脱离接触时，允许这些反向运动。

2. 发明授权

US4626689A Electron beam focusing system for electron microscope 失效
标题翻译：电子束聚焦系统
公开(公告)号：US4626689A
公开(公告)日：1986-12-02
申请号：US743014
申请日：1985-06-10
申请人： Takeshi Tomita , Yu Ishibashi
发明人： Takeshi Tomita , Yu Ishibashi
IPC分类号： H01J37/141 , G01Q30/02 , H01J37/04 , H01J37/10 , H01J37/26 , H01J37/295 , H01J29/46
CPC分类号： H01J37/295 , H01J37/04
摘要： When a transmission-type electron microscope is used to make an observation of a diffraction image produced by a focused electron beam, it is desired that the divergence angle of the electron beam be varied at will while maintaining the spot diameter of the beam on a specimen constant. The present invention provides three stages of focusing lenses and a means for controlling these lenses in interrelated manner in a space between an objective lens and an electron gun in which the specimen is placed. The three stages of lenses are designed to be controlled independently. When an operation is performed to increase the divergence angle of the electron beam, the excitations of the first and second stages of focusing lenses are reduced while the excitation of the third stage of focusing lens is increased, thus maintaining the spot diameter of the beam on the specimen constant.
摘要翻译：当透射型电子显微镜用于观察由聚焦电子束产生的衍射图像时，期望电子束的发散角随意地变化，同时将光束的光斑直径保持在样品上不变。本发明提供了聚焦透镜的三个阶段和用于在物镜和放置样本的电子枪之间的空间中相互关联地控制这些透镜的装置。镜片的三个阶段被设计为独立控制。当执行增加电子束发散角的操作时，聚焦透镜的第一和第二阶段的激发减小，同时聚焦透镜的第三阶段的激发增加，从而保持光束的光斑直径样本常数。

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