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    • 6. 发明授权
    • Electron microscope
    • 电子显微镜
    • US5289005A
    • 1994-02-22
    • US891510
    • 1992-05-29
    • Mikio NaruseEiichi WatanabeToru Kasai
    • Mikio NaruseEiichi WatanabeToru Kasai
    • H01J37/20
    • H01J37/20H01J2237/24415
    • An electron microscope capable of performing accurate X-ray analysis. A specimen stage on which a specimen to be investigated is placed, is disposed between the upper and lower magnetic pole pieces of the objective lens. The specimen is irradiated with the electron beam to detect X-rays emitted from the specimen. The specimen stage consists of a light element, such as beryllium, that produces a very small amount of X-rays when irradiated with the electron beam. A metal film of a heavy element, such as gold, is deposited on the upper surface of the specimen stage. This metal film produces a large amount of X-rays when irradiated with the electron beam. The X-rays emitted from the lower magnetic pole piece are absorbed by the metal film. Consequently, the X-ray detector of the microscope detects only the X-rays produced from the specimen.
    • 能够进行精确X射线分析的电子显微镜。 放置试样的样品台设置在物镜的上下磁极片之间。 用电子束照射样品以检测从样品发射的X射线。 样品台由诸如铍的轻元素组成,当用电子束照射时产生非常少量的X射线。 重金属的金属膜,例如金,沉积在样品台的上表面上。 当用电子束照射时,该金属膜产生大量的X射线。 从下磁极片发射的X射线被金属膜吸收。 因此,显微镜的X射线检测器仅检测从样品产生的X射线。
    • 10. 发明授权
    • Specimen-driving apparatus for electron microscope which tilts and
translates while preventing contact damage
    • 用于电子显微镜的样品驱动装置,其在防止接触损伤的同时倾斜和平移
    • US5264705A
    • 1993-11-23
    • US862528
    • 1992-04-02
    • Toshikazu HondaMikio NaruseToshikatsu KaneyamaYu IshibashiIkuya Nishimura
    • Toshikazu HondaMikio NaruseToshikatsu KaneyamaYu IshibashiIkuya Nishimura
    • G01Q30/02G01Q30/20H01J37/20
    • H01J37/20
    • A specimen-driving apparatus used with an electron microscope. The apparatus can translate or tilt the specimen holder while preventing it from being damaged if a human operator performs any erroneous operation. The device has X, Y, Z translation directive devices, and a tilt directive device for permitting the operator to enter instructions for translating and tilting the specimen holder. A contact detector senses that the holder is in contact with the upper magnetic pole piece. A tilt condition decision portion determines whether the holder has tilted into the positive or negative domain. A Z domain decision portion determines whether the Z coordinate of the holder lies in the positive or negative domain. When the contact of the holder with the pole piece is detected, reverse movement of the holder along the Z-axis is inhibited. Also, reverse tilting movement of the holder is inhibited. When the holder comes out of contact with the pole piece, these reverse movements are permitted.
    • 用电子显微镜使用的试样驱动装置。 如果操作人员执行任何错误的操作,该装置可以平移或倾斜试样架,同时防止其受损。 该装置具有X,Y,Z平移指示装置和倾斜指令装置,用于允许操作者输入用于平移和倾斜试样架的指令。 接触检测器感测到保持器与上磁极片接触。 倾斜条件决定部分确定保持器是否已经倾斜到正或负域。 Z域决定部分确定持有者的Z坐标是否位于正或负域。 当保持器与极片的接触被检测到时,保持器沿Z轴的反向运动被抑制。 此外,保持器的反向倾斜运动被抑制。 当支架与极片脱离接触时,允许这些反向运动。