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    • 3. 发明申请
    • MICROWAVE PLASMA-TREATING APPARATUS
    • 微波等离子体处理设备
    • US20110088848A1
    • 2011-04-21
    • US12934914
    • 2009-03-27
    • Jaeho KimKazuo TsugawaMasatou IshiharaMasataka HasegawaYoshinori Koga
    • Jaeho KimKazuo TsugawaMasatou IshiharaMasataka HasegawaYoshinori Koga
    • H01L21/3065C23C16/448
    • C23C16/511H01J37/32192H01J37/32229H05H1/46
    • To provide a microwave plasma-treating apparatus which is capable of generating plasma having a high degree of uniformity of density and a high density for executing large-quantity and high-speed processing, capable of generating plasma of a large area, and capable of preventing dielectric windows from being thermally broken despite the apparatus being operated with large electric power for extended periods of time. The microwave plasma-treating apparatus includes a waveguide arranged to feed microwave electric power, a plurality of microwave coupling holes formed in the waveguide in the axial direction thereof, a dielectric member of a piece of plate capable of transmitting microwaves arranged in the waveguide in the axial direction thereof under the microwave coupling holes, a gap formed between the plurality of microwave coupling holes and the dielectric member, and a cooling member for cooling the dielectric member. Desirably, the microwave coupling holes have an annular shape.
    • 本发明提供一种微波等离子体处理装置,其能够产生具有高密度均匀性和高密度的等离子体,用于执行大量高速处理,能够产生大面积的等离子体,并能够防止 电介质窗不受热破坏,尽管设备长时间以大功率运转。 微波等离子体处理装置包括布置成馈送微波电力的波导管,在波导管的轴向形成的多个微波耦合孔,能够传输布置在波导管中的微波的电介质部件 在微波耦合孔下方形成有多个微波耦合孔和电介质构件之间的间隙,以及用于冷却电介质构件的冷却构件。 理想地,微波耦合孔具有环形形状。
    • 5. 发明申请
    • Carbon film
    • 碳膜
    • US20070172660A1
    • 2007-07-26
    • US11578660
    • 2005-04-15
    • Yoshinori KogaMasataka HasegawaSumio IijimaKazuo TsugawaMasatou Ishihara
    • Yoshinori KogaMasataka HasegawaSumio IijimaKazuo TsugawaMasatou Ishihara
    • B32B9/00
    • C23C16/26B24D11/003C03C17/007C03C17/22C03C2217/282C03C2217/42G02B1/105G02B1/14Y10T428/30
    • Problem To provide a carbon film and a laminate having optical characteristics of retaining high transparency, having high refraction index and less double refractivity, being excellent in electric insulating property, being capable of being coated at good adhesion to various substrates, and being capable of being formed at a low temperature, and applications thereof. Means for Solving the Problem The invention relates to a carbon film which has an approximate spectrum curve obtainable by superimposing, on a peak fitting curve A at a Bragg's angle (2θ±0.3°) of 43.9°, a peak fitting curve B at 41.7° and a base line in an X-ray diffraction spectrum by a CuKa1 ray, and has a film thickness of from 2 mm to 100 μm. The intensity of the fitting curve B relative to the intensity of the fitting curve A is preferably from 5 to 90% in the approximated spectrum described above. In the carbon film, the Raman shift has a peak at a 1333±10 cm−1 in the Raman scattering spectrum, and the half-value width of the peak is from 10 to 40 cm−1. Further, the invention relates to a laminate characterized by disposing, on the substrate, a carbon aggregate film of 2 nm to 100 μm thickness comprising an aggregate of carbon particles having an approximate spectrum curve described above. Moreover, the invention relates to an optical device, optical glass, wrist watch, electronic circuit substrate, or grinding tool having the laminate described above.
    • 问题为了提供具有保持高透明度,高折射率和较低双折射率的光学特性的碳膜和层压板,具有优异的电绝缘性,能够以良好的粘合力涂覆在各种基板上,并且能够 在低温下形成,其应用。 解决问题的手段本发明涉及一种碳膜,其具有通过在布拉格角(2θ±0.3°)为43.9°的峰值拟合曲线A上以41.7°的峰值拟合曲线B叠加而获得的近似光谱曲线 和通过CuKa 1 X射线在X射线衍射光谱中的基线,并且具有2mm至100μm的膜厚度。 拟合曲线B相对于拟合曲线A的强度的强度在上述近似光谱中优选为5〜90%。 在碳膜中,拉曼位移在拉曼散射光谱中的1333±10cm -1处具有峰值,峰的半值宽度为10至40cm -1, -1 。 此外,本发明涉及一种层压体,其特征在于在基材上设置包含具有上述近似光谱曲线的碳颗粒聚集体的2nm至100μm厚度的碳聚集体膜。 此外,本发明涉及具有上述层压体的光学装置,光学玻璃,手表,电子电路基板或研磨工具。
    • 7. 发明授权
    • Laminate, and polishing material and grinding material using the same, and method for producing the laminate
    • 层压材料,使用其的研磨材料和研磨材料以及层压体的制造方法
    • US08691364B2
    • 2014-04-08
    • US12445210
    • 2007-10-12
    • Masataka HasegawaKazuo TsugawaMasatou IshiharaYoshinori Koga
    • Masataka HasegawaKazuo TsugawaMasatou IshiharaYoshinori Koga
    • B24D3/00
    • B24D11/003B24B9/16B24D18/00C23C16/0254C23C16/26C23C30/00Y10T428/24372Y10T428/30
    • The invention provides a laminate capable of polishing and grinding the surface of a material having a high hardness such as diamond, sapphire or hard carbon film, rapidly and in a simplified manner with high planarity and high accuracy, utilizing the high adhesiveness to substrates, the hardness and the surface planarity that a carbon film has, but using neither diamond abrasive grains nor alkali slurry. The laminate comprises a substrate and a carbon layer provided on the substrate, wherein the carbon layer comprises a diamond fine grain provided on the substrate and crushed by impact given thereto, a formation/growth inhibiting material that inhibits the formation of an impurity inhibiting the growth of a carbon grain and/or inhibits the growth of a carbon grain, and a carbon grain, and an amount (amount per unit volume) of the formation/growth inhibiting material decreases from a lower layer toward an upper layer on the substrate side. Preferably, the formation/growth inhibiting material is an SiO2 material or an Al2O3 material, and optionally an adhesiveness-reinforcing layer comprising titanium or a titanium alloy or the like may be provided between the substrate and the carbon layer.
    • 本发明提供了一种能够以高平坦度和高精度快速且简单地抛光和研磨具有高硬度的材料的表面的层压体,利用对基材的高粘附性, 硬度和碳膜具有的表面平面度,但不使用金刚石磨粒或碱浆。 层压体包括基材和设置在基材上的碳层,其中碳层包括设置在基材上的金刚石细晶粒并通过冲击赋予其破碎,抑制形成抑制生长的杂质的形成/生长抑制材料 的碳粒子和/或抑制碳粒的生长和碳粒子,并且,生成/生长抑制材料的量(每单位体积的量)从基材侧的下层向上层减少。 优选地,形成/生长抑制材料是SiO 2材料或Al 2 O 3材料,并且可以在基材和碳层之间设置任选的包含钛或钛合金等的粘合性增强层。