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    • 3. 发明授权
    • Method of forming an embedded memory
    • 形成嵌入式存储器的方法
    • US06448126B1
    • 2002-09-10
    • US09682217
    • 2001-08-07
    • Erh-Kun LaiHsin-Huei ChenShou-Wei HuangYing-Tso ChenChien-Hung LiuShyi-Shuh Pan
    • Erh-Kun LaiHsin-Huei ChenShou-Wei HuangYing-Tso ChenChien-Hung LiuShyi-Shuh Pan
    • H01L218238
    • H01L21/823418H01L21/823412
    • A method of forming an embedded memory integrating nitride read only memory starts by forming an ONO layer and a protective cap layer on a surface of a semiconductor substrate defined with a memory area and a periphery area. The periphery area has a first, a second and a third device area. An etching and a first ion implantation process form each bit line in the memory area. A spacer is then formed at either side of the protective cap layer and the ONO layer in the memory area, and the protective cap layer and the ONO layer are removed in the first device area. The threshold voltage for the first device area is adjusted and a first thermal oxidation process forms a buried drain oxide layer atop each bit line and a first gate oxide layer on the surface of the first device area, respectively. The protective cap layer and the ONO layer are removed from the second device area and the third device area, and a second gate oxide layer is formed in the second device area and the third device area. Finally, the protective cap layer in the memory area and the second gate oxide layer in the third device area are removed, and a third gate oxide layer is formed in the third device area.
    • 集成氮化物只读存储器的嵌入式存储器的形成方法首先通过在由存储区域和周边区域限定的半导体衬底的表面上形成ONO层和保护覆盖层。 周边区域具有第一,第二和第三设备区域。 蚀刻和第一离子注入工艺在存储区域中形成每个位线。 然后在保护盖层和存储区域中的ONO层的任一侧形成间隔物,并且在第一装置区域中去除保护盖层和ONO层。 调整第一器件区域的阈值电压,第一热氧化工艺分别在第一器件区域的表面上的每个位线和第一栅极氧化物层的顶部形成掩埋的漏极氧化物层。 从第二设备区域和第三设备区域去除保护盖层和ONO层,并且在第二设备区域和第三设备区域中形成第二栅极氧化物层。 最后,去除存储区域中的保护盖层和第三器件区域中的第二栅极氧化物层,并且在第三器件区域中形成第三栅极氧化物层。
    • 6. 发明申请
    • Non-volatile memory and method of fabricating the same
    • 非易失性存储器及其制造方法
    • US20070269943A1
    • 2007-11-22
    • US11435458
    • 2006-05-16
    • Chin-Hsien ChenYing-Tso ChenChien-Hung LiuShou-Wei Huang
    • Chin-Hsien ChenYing-Tso ChenChien-Hung LiuShou-Wei Huang
    • H01L21/8234
    • H01L27/115H01L27/11521H01L27/11568H01L29/7881H01L29/792
    • A method of fabricating a non-volatile memory is provided. First, two openings are formed on a substrate. A stacked gate structure comprising a first dielectric layer, a charge storage layer, a second dielectric layer and a first conductive layer is formed on the substrate between the two openings. A liner is formed on a bottom and a portion of a sidewall of the tow openings, wherein a top surface of the liner is lower than that of the substrate. A second conductive layer is formed on the liner at the bottom of the two openings, wherein a top surface of the second conductive layer is co-planar with that of the liner. A third conductive layer is formed on the second conductive layer and the liner, wherein a top surface of the third conductive layer is co-planar with that of the substrate and lower than that of the first dielectric layer.
    • 提供了一种制造非易失性存储器的方法。 首先,在基板上形成两个开口。 在两个开口之间的基板上形成包括第一电介质层,电荷存储层,第二电介质层和第一导电层的堆叠栅极结构。 衬套形成在丝束开口的侧壁的底部和一部分上,其中衬垫的顶表面低于衬底的顶表面。 第二导电层形成在两个开口的底部的衬垫上,其中第二导电层的顶表面与衬垫的顶表面共面。 第三导电层形成在第二导电层和衬垫上,其中第三导电层的顶表面与衬底的顶表面平行,并且低于第一介电层的顶表面。
    • 10. 发明申请
    • NON-VOLATILE MEMORY
    • 非易失性存储器
    • US20090212353A1
    • 2009-08-27
    • US12434828
    • 2009-05-04
    • Chin-Hsien ChenYing-Tso ChenChien-Hung LiuShou-Wei Huang
    • Chin-Hsien ChenYing-Tso ChenChien-Hung LiuShou-Wei Huang
    • H01L29/792
    • H01L27/115H01L27/11521H01L27/11568H01L29/7881H01L29/792
    • A non-volatile memory includes a substrate having two openings, a stacked gate structure disposed on the substrate between the two openings, a liner disposed on a bottom of each of the two openings and parts of a sidewall of each of the two openings, a second conductive layer disposed on the liner at the bottom of each of the two openings, and a third conductive layer on the second conductive layer and the liner. The stacked gate structure includes a first dielectric layer, a charge storage layer, a second dielectric layer, and a first conductive layer. The liner has a top surface lower than that of the substrate. The second conductive layer has a top surface co-planar with that of the liner. The third conductive layer has a top surface at least co-planar with that of the substrate and lower than that of the first dielectric layer.
    • 非易失性存储器包括具有两个开口的衬底,设置在两个开口之间的衬底上的堆叠栅极结构,设置在两个开口中的每一个的底部和两个开口中的每一个的侧壁的一部分的衬垫, 设置在两个开口中的每一个的底部的衬垫上的第二导电层,以及在第二导电层和衬垫上的第三导电层。 层叠栅极结构包括第一介电层,电荷存储层,第二介电层和第一导电层。 衬垫具有比衬底更低的顶表面。 第二导电层具有与衬垫的顶表面共面的顶表面。 第三导电层具有至少与基底的共面的顶表面,并且低于第一介电层的顶表面。