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1. 发明授权

US06920696B2 Microscopic positioning device and tool position/orientation compensating method 失效
标题翻译：显微定位装置和刀具位置/方向补偿方法
公开(公告)号：US06920696B2
公开(公告)日：2005-07-26
申请号：US10853140
申请日：2004-05-26
申请人： Kiyoshi Sawada , Kenzo Ebihara , Yasuhiro Sakaida
发明人： Kiyoshi Sawada , Kenzo Ebihara , Yasuhiro Sakaida
IPC分类号： B23Q5/22 , B23Q1/34 , B23Q5/28 , G05D3/00 , H01L41/09 , G01B5/00 , B23Q3/18
CPC分类号： H02N2/0095 , Y10S977/837 , Y10S977/872
摘要： A microscopic positioning device having machine rigidity and being capable of achieving nano-order positioning accuracy and a method of compensating tool position and orientation. A driving unit comprises two piezoelectric elements P1 and P2 arranged into alignment along an expanding/shrinking direction. Both ends of the piezoelectric element P1, facing in the expanding/shrinking direction, are fixed to a base member and a movable member, respectively. The other piezoelectric element P2 is fixed to the base member only at one end. A gap L is formed between the piezoelectric element P2 and the movable member. Where expanding displacement amounts of the piezoelectric elements P1 and P2 are a1 and a2, respectively, voltage applied to the piezoelectric elements P1 and P2 is so controlled to satisfy an equation, a1+a2=a≧L. It is possible to position the movable member at a position within a maximum stroke a in the nano-order. The driving units may be arranged in the orthogonal directions, thereby providing the positioning device with two degrees of freedom, and further providing six degrees of freedom including rotation axes.
摘要翻译：具有机械刚度并且能够实现纳米级定位精度的微观定位装置和补偿刀具位置和取向的方法。驱动单元包括沿扩张/收缩方向排列成对准的两个压电元件P 1和P 2。面向膨胀/收缩方向的压电元件P 1的两端分别固定在基座部件和可动部件上。另一个压电元件P 2仅在一端固定到基座构件。在压电元件P 2和可动件之间形成间隙L. 在压电元件P 1和P 2的扩大位移量分别为1和2的情况下，施加到压电元件P 1和P 2的电压被控制以满足等式，a 1 + a 2 = a> = L. 可以将可动构件定位在纳秒级的最大行程a内的位置。驱动单元可以沿正交方向布置，从而为定位装置提供两个自由度，并进一步提供六个自由度，包括旋转轴。

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