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    • 3. 发明授权
    • Photodetector device and method for manufacturing the same
    • 光电检测器及其制造方法
    • US06589848B1
    • 2003-07-08
    • US09614588
    • 2000-07-12
    • Woong-lin HwangJun-young Kim
    • Woong-lin HwangJun-young Kim
    • H01L21331
    • H01L31/035281H01L31/02161H01L31/022416H01L31/03529H01L31/105Y02E10/50
    • A photodetector device and a process for manufacturing the same are described. The photodetector device comprises a doped semiconductor substrate; an intrinsic semiconductor material layer formed over the substrate, for absorbing incident light; an upper semiconductor material layer doped with the opposite type to the substrate, formed on a portion of the intrinsic semiconductor material layer to allow at least a portion of the incident light to directly enter the intrinsic semiconductor material layer; an upper electrode formed in a predetermined pattern on the upper semiconductor material layer, the upper electrode electrically connected to the upper semiconductor material layer; and a lower electrode electrically connected to the substrate, wherein a portion of the intrinsic semiconductor material layer constitutes at least a part of a photo-receiving surface. The photodetector device has a photo-receiving surface, which is formed by removing all or a portion of the upper semiconductor material layer within a photo-receiving area, which allows at least a portion of the incident light to directly enter the intrinsic semiconductor material layer, thereby reducing capacitance even with a relatively large photo-receiving surface.
    • 对光检测器及其制造方法进行说明。 光检测器件包括掺杂半导体衬底; 在衬底上形成的用于吸收入射光的本征半导体材料层; 在本征半导体材料层的一部分上形成掺杂有与衬底相反类型的上半导体材料层,以允许至少一部分入射光直接进入本征半导体材料层; 在上半导体材料层上以预定图案形成的上电极,上电极与上半导体材料层电连接; 以及电连接到所述基板的下电极,其中所述本征半导体材料层的一部分构成光接收表面的至少一部分。 光检测器件具有光接收表面,该光接收表面通过去除光接收区域内的上半导体材料层的全部或一部分而形成,其允许入射光的至少一部分直接进入本征半导体材料层 ,从而即使用相对较大的光接收表面也能降低电容。
    • 8. 发明授权
    • Photodetector device and method for manufacturing the same
    • 光电检测器及其制造方法
    • US06791152B2
    • 2004-09-14
    • US09792028
    • 2001-02-26
    • Woong-lin HwangJun-young KimDong-hoon Chang
    • Woong-lin HwangJun-young KimDong-hoon Chang
    • H01L310232
    • H01L31/105
    • A photodetector device includes a doped semiconductor substrate. A first intrinsic semiconductor material layer, a main reflector, a second intrinsic semiconductor material layer, an upper semiconductor material layer, which is doped the opposite as the substrate, are formed in succession on the semiconductor substrate. An upper electrode is formed on and electrically connected with the upper semiconductor layer, and a lower electrode is electrically connected to the semiconductor substrate. One of the intrinsic semiconductor layers is relatively thin to absorb incident light, while the other is relatively thick. The photodetector device, a p-i-n photodetector, has an I region including the intrinsic semiconductor layers with different thicknesses, and a main reflector therebetween. The thickness of the entire I region can be increased with a reduced transit distance for holes. Thus, low driving voltage and high sensitivity to a high frequency optical signal requirements can be realized without reducing the size of the photo-receiving area.
    • 光检测器件包括掺杂半导体衬底。 在半导体衬底上连续形成第一本征半导体材料层,主反射器,第二本征半导体材料层,与衬底相反掺杂的上半导体材料层。 上电极形成在上半导体层上并与上半导体层电连接,下电极与半导体衬底电连接。 本征半导体层之一相对较薄以吸收入射光,而另一个相对较厚。 光检测器器件p-i-n光检测器具有包括不同厚度的本征半导体层的I区域和它们之间的主反射器。 整个I区域的厚度可以随着孔的传输距离减小而增加。 因此,可以实现低驱动电压和对高频光信号要求的高灵敏度,而不减小光接收面积的大小。
    • 9. 发明授权
    • Bidirectional signal transmission device using light
    • 双向信号传输设备使用光
    • US06470116B2
    • 2002-10-22
    • US09836538
    • 2001-04-18
    • Jin-hwan KimJong-kuk MunWoong-lin Hwang
    • Jin-hwan KimJong-kuk MunWoong-lin Hwang
    • G02B634
    • H04B10/40
    • A bidirectional signal transmission device using light which adopts a photodiode-incorporated vertical cavity surface emitting laser (VCSEL) as light devices so that signal transmission and reception between facing light devices is achieved via the same channel, is provided. This bidirectional signal transmission device includes first and second light devices having a VCSEL part and a photodiode part incorporated with the VCSEL part, at least one optical fiber installed between the first and second light devices, and diffraction elements installed between the first light device and the input/output port of the optical fiber and between the second light device and the output port of the optical fiber, respectively, for selectively diffracting incident light so that light output from the optical fiber is received by the photodiode part, so that a received light signal having a high S/N ratio can be detected.
    • 提供了采用采用掺入光电二极管的垂直腔表面发射激光器(VCSEL)作为光器件的光的双向信号传输装置,使得通过相同的通道实现面对的光器件之间的信号传输和接收。 该双向信号传输装置包括具有VCSEL部分和与VCSEL部分结合的光电二极管部分的第一和第二光器件,安装在第一和第二光器件之间的至少一个光纤,以及安装在第一光器件与第二光器件之间的衍射元件 光纤的输入/输出端口和第二光器件与光纤的输出端口之间,用于选择性地衍射入射光,使得从光纤输出的光被光电二极管部分接收,使得接收的光 可以检测到具有高S / N比的信号。