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    • 8. 发明授权
    • Optical module and method for manufacturing the same
    • 光模块及其制造方法
    • US06986609B2
    • 2006-01-17
    • US10138719
    • 2002-05-06
    • Sang-chae KimHyung ChoiYong-sung Kim
    • Sang-chae KimHyung ChoiYong-sung Kim
    • G02B6/42B32B3/00C23F1/00
    • G02B6/3584G02B6/32G02B6/3512G02B6/3546G02B6/3652G02B6/3692G02B26/0816
    • An optical module, in which one or more grooves on which a plurality of optical fibers or optical parts are mounted, are formed to different depths and a stopper hole is manufactured so as to prevent a convex corner phenomenon so that an optical axis is precisely aligned, and a method of manufacturing the same are provided. The method of manufacturing an optical module includes the steps of first etching to form one or more grooves on a first surface of a wafer, and second etching to form one or more stopper holes so that a second surface of the wafer is etched to penetrate the wafer. The optical module having one or more grooves for mounting one or more optical parts on a substrate, includes stopper holes which are formed by penetrating the bottom surface of the substrate to center a region which corresponds to a predetermined region among the grooves.
    • 在其中安装有多个光纤或光学部件的一个或多个凹槽的光学模块形成为不同的深度,并且制造止动孔以防止凸角现象,使得光轴精确对准 ,及其制造方法。 制造光学模块的方法包括以下步骤:首先蚀刻以在晶片的第一表面上形成一个或多个凹槽,以及第二蚀刻以形成一个或多个止动孔,使得晶片的第二表面被蚀刻以穿透 晶圆。 具有用于将一个或多个光学部件安装在基板上的一个或多个凹槽的光学模块包括通过穿透基板的底表面而形成的止挡孔,以使与凹槽中的预定区域对应的区域居中。