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    • 5. 发明授权
    • Method of manufacturing field effect transistor
    • 制造场效应晶体管的方法
    • US07183149B2
    • 2007-02-27
    • US11180726
    • 2005-07-14
    • Ho Kyun AhnJong Won LimHong Gu JiWoo Jin ChangJae Kyoung MunHae Cheon Kim
    • Ho Kyun AhnJong Won LimHong Gu JiWoo Jin ChangJae Kyoung MunHae Cheon Kim
    • H01L21/338
    • H01L29/66856H01L29/66462
    • Provided is a method of manufacturing a field effect transistor (FET). The method includes steps of: forming an ohmic metal layer on a substrate in source and drain regions; sequentially forming an insulating layer and a multilayered resist layer on the entire surface of the resultant structure and simultaneously forming resist patterns having respectively different shapes in both a first region excluding the ohmic metal layer and a second region excluding the ohmic metal layer, wherein a lowermost resist pattern is exposed in the first region, and the insulating layer is exposed in the second region; exposing the substrate and the insulating layer by simultaneously etching the exposed insulating layer and the exposed lowermost resist pattern using the resist patterns as etch masks, respectively; performing a recess process on the exposed substrate and etching the exposed insulating layer to expose the substrate; and forming gate recess regions having different etching depths from each other over the substrate, depositing a predetermined gate metal, and removing the resist patterns. In this method, transistors having different threshold voltages can be manufactured without additional mask patterns using the least number of processes, with the results that the cost of production can be reduced and the stability and productivity of semiconductor devices can be improved.
    • 提供了制造场效应晶体管(FET)的方法。 该方法包括以下步骤:在源极和漏极区域的衬底上形成欧姆金属层; 在所得结构的整个表面上顺序地形成绝缘层和多层抗蚀剂层,并且同时形成除了欧姆金属层以外的第一区域和不包括欧姆金属层的第二区域中具有不同形状的抗蚀剂图案,其中最下面 抗蚀剂图案在第一区域中暴露,并且绝缘层在第二区域中暴露; 通过分别使用抗蚀剂图案作为蚀刻掩模,同时蚀刻暴露的绝缘层和暴露的最下面的抗蚀剂图案来暴露衬底和绝缘层; 对曝光的衬底进行凹陷处理并蚀刻暴露的绝缘层以露出衬底; 以及在衬底上形成具有彼此不同蚀刻深度的栅极凹陷区域,沉积预定的栅极金属和去除抗蚀剂图案。 在该方法中,可以使用最少数量的工艺来制造具有不同阈值电压的晶体管,而不需要额外的掩模图案,结果可以降低生产成本,并且可以提高半导体器件的稳定性和生产率。