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1. 发明申请

US20070171426A1 LOW NON-LINEAR ERROR DISPLACEMENT MEASURING INTERFEROMETER 有权
标题翻译：低非线性误差位移测量干扰仪
公开(公告)号：US20070171426A1
公开(公告)日：2007-07-26
申请号：US11118949
申请日：2005-04-29
申请人： William Schluchter , Robert Belt
发明人： William Schluchter , Robert Belt
IPC分类号： G01B9/02
CPC分类号： G01B9/02003 , G01B9/02056 , G01B9/02067 , G01B9/0207 , G01B2290/70
摘要： An interferometer is provided that minimizes the introduction of non-linear errors into displacement measurements. In one embodiment, non-linear errors are reduced by isolating reference and measurement beams over most of their respective optical paths leading to the detector, and by employing a separate amplitude-splitting non-polarizing optical beam splitter for each beam input into the interferometer. Additionally, the interferometer is scalable to an arbitrary number of optical axes or inputs.
摘要翻译：提供了一种干涉仪，其将非线性误差的引入最小化到位移测量中。在一个实施例中，通过将通过其通过检测器的大部分相应的光路分离出参考和测量光束，并且通过对于输入到干涉仪中的每个光束采用单独的幅度分割非偏振光束分离器来减小非线性误差。此外，干涉仪可扩展到任意数量的光轴或输入。

2. 发明申请

US20050185193A1 System and method of using a side-mounted interferometer to acquire position information 失效
标题翻译：使用侧面安装的干涉仪获取位置信息的系统和方法
公开(公告)号：US20050185193A1
公开(公告)日：2005-08-25
申请号：US10783199
申请日：2004-02-20
申请人： William Schluchter , Louis Mueller , Douglas Woolverton , Jeffrey Young , Alan Ray , David Chu
发明人： William Schluchter , Louis Mueller , Douglas Woolverton , Jeffrey Young , Alan Ray , David Chu
IPC分类号： G01B11/00 , G03F7/20 , H01L21/027 , G01B9/02
CPC分类号： G03F7/70775
摘要： A system and method for acquiring position information of a movable apparatus relevant to a specific axis is disclosed. In one embodiment, an interferometer generates first and second beams and various beam-steering members are located to define beam path segments for the two beams, but no beam path segment varies in length in unity with displacements of the movable apparatus along the specific axis. In another or the same embodiment, each beam path segment in which the first beam either impinges or has been reflected from the movable apparatus is symmetrical to a corresponding beam path segment of the second beam. The movable apparatus may be a wafer stage in which the “specific axis” is the exposure axis of a projection lens, but with all optical members which cooperate with the stage being located beyond the ranges of the wafer stage in directions perpendicular to the lithographic exposure axis.
摘要翻译：公开了一种用于获取与特定轴相关的可移动装置的位置信息的系统和方法。在一个实施例中，干涉仪产生第一和第二光束，并且定位各种光束转向构件以限定用于两个光束的光束路径段，但是没有光束路径段随着可移动装置沿特定轴线的位移而在长度上变化。在另一个或相同的实施例中，其中第一光束撞击或已经从可移动装置反射的每个光束路径段与第二光束的相应光束路径段对称。可移动装置可以是其中“特定轴线”是投影透镜的曝光轴线的晶片台，但是与垂直于光刻曝光的方向的晶片台的位置超出晶片台的范围的所有光学构件轴。

3. 发明申请

US20050175217A1 Using target images to determine a location of a stage 审中-公开
标题翻译：使用目标图像来确定舞台的位置
公开(公告)号：US20050175217A1
公开(公告)日：2005-08-11
申请号：US10773794
申请日：2004-02-05
申请人： Louis Mueller , David Chu , Michael Brosnan , William Schluchter , Jeffrey Young , Alan Ray , Douglas Woolverton
发明人： Louis Mueller , David Chu , Michael Brosnan , William Schluchter , Jeffrey Young , Alan Ray , Douglas Woolverton
IPC分类号： G01B11/00 , E04F21/26 , G01C11/00 , G06K9/00 , G06T7/00
CPC分类号： G06T7/73
摘要： The position of a stage is determined. Images of a plurality of targets located on the stage are captured. The captured images of the plurality of targets are compared with stored images to determine displacement coordinates for each target. The displacement coordinates for the targets are translated into position coordinates for the stage.
摘要翻译：确定阶段的位置。捕获位于舞台上的多个目标的图像。将所捕获的多个目标图像与存储的图像进行比较，以确定每个目标的位移坐标。目标的位移坐标转换为舞台的位置坐标。

4. 发明申请

US20060274322A1 System and method for interferometer non-linearity compensation 有权
标题翻译：用于干涉仪非线性补偿的系统和方法
公开(公告)号：US20060274322A1
公开(公告)日：2006-12-07
申请号：US11142423
申请日：2005-06-01
申请人： David Chu , Lee Kalem , William Schluchter
发明人： David Chu , Lee Kalem , William Schluchter
IPC分类号： G01B11/02
CPC分类号： G01B9/02059 , G01B9/02003 , G01B9/02083
摘要： A method for non-linearity compensating interferometer position data generated from a measurement signal includes generating a first set of non-linearity parameters based on received digital position values. The method includes sensing whether a low velocity condition exists. A first one of the non-linearity parameters is updated based on an estimated magnitude of the measurement signal if the low velocity condition exists. At least one digital position value is compensated based on the updated non-linearity parameter if the low velocity condition exists.
摘要翻译：从测量信号生成的用于非线性补偿干涉仪位置数据的方法包括基于接收的数字位置值生成第一组非线性参数。该方法包括检测是否存在低速条件。如果存在低速条件，则基于测量信号的估计幅度来更新非线性参数中的第一个。如果存在低速条件，则基于更新的非线性参数来补偿至少一个数字位置值。

5. 发明申请

US20060245071A1 Lens correction element, system and method 审中-公开
标题翻译：镜头校正元件，系统和方法
公开(公告)号：US20060245071A1
公开(公告)日：2006-11-02
申请号：US11119471
申请日：2005-04-29
申请人： David George , William Schluchter , Robert Belt
发明人： David George , William Schluchter , Robert Belt
IPC分类号： G02B3/12
CPC分类号： G02B3/12
摘要： A lens assembly is provided that has an index-of-refraction invariant structure. In one embodiment, a void between two lenses or lens elements in a lens assembly is filled with a desired gas, liquid or vacuum, the gas, liquid or vacuum having a pre-determined index of refraction. Once the void has been filled with the desired gas or liquid or been drawn down to a complete vacuum, the void is sealed by any of numerous appropriate means to render it leaktight. The lens assembly may then be tested or calibrated to ensure an appropriate level of optical performance prior to subsequent deployment under actual field conditions. Because the vacuum or filled void disposed in the lens assembly provides optical performance that is index-of-refraction invariant, the lens assembly may be employed successfully under widely varying atmospheric conditions and yet still provide the same high quality results.
摘要翻译：提供了具有折射不变结构的透镜组件。在一个实施例中，透镜组件中的两个透镜或透镜元件之间的空隙填充有期望的气体，液体或真空，气体，液体或真空具有预定的折射率。一旦空隙填充了所需的气体或液体或被抽出到完全的真空状态，空隙就被许多适当的方法中的任何一种密封，以使其密封。然后可以对透镜组件进行测试或校准，以确保在实际现场条件下随后部署之前适当水平的光学性能。因为设置在透镜组件中的真空或填充的空隙提供作为折射率不变量的光学性能，所以可以在广泛变化的大气条件下成功地使用透镜组件，但仍然提供相同的高质量结果。

6. 发明申请

US20070041022A1 Interferometer for measuring perpendicular translations 失效
标题翻译：用于测量垂直平移的干涉仪
公开(公告)号：US20070041022A1
公开(公告)日：2007-02-22
申请号：US11205368
申请日：2005-08-16
申请人： William Schluchter
发明人： William Schluchter
IPC分类号： G01B9/02 , G01B11/02
CPC分类号： G01B9/02016 , G01B9/02003 , G01B2290/70 , G03F7/70775
摘要： An interferometer provides a large dynamic range for perpendicular displacement measurements. In operation, a measurement reflector on an object reflects a measurement beam to an overlying Porro prism, and a reference reflector on the object returns a reference beam to the interferometer. A second Porro prism in the interferometer can return the reference beam for a second pass to the reference reflector, while the measurement beam complete only one pass. Reductions in beam walk-off result from retroreflections in the Porro prisms and the matching effects that some object rotations have on measurement and reference beams. Perpendicular motion of the object relative to the first Porro prism causes a Doppler shift only in the measurement beam. Accordingly, a beat frequency found when combining the measurement and reference beams can indicate a residual Doppler shift associated with the motion in the perpendicular direction.
摘要翻译：干涉仪为垂直位移测量提供了大的动态范围。在操作中，物体上的测量反射器将测量光束反射到覆盖的波罗棱镜上，并且物体上的参考反射器将参考光束返回到干涉仪。干涉仪中的第二个波罗棱镜可以将参考光束返回给参考反射器，而测量光束只能完成一次通过。波罗的光束偏移减少导致波罗棱镜中的反射和一些物体旋转对测量和参考光束的匹配效应。物体相对于第一波罗棱镜的垂直运动仅在测量光束中产生多普勒偏移。因此，当组合测量和参考光束时发现的拍频可以指示与垂直方向上的运动相关联的残余多普勒频移。

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