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1. 发明申请

WO2013180696A1 DEVICE INCLUDING SUBSTRATE THAT ABSORBS STRESSES 审中-公开
标题翻译：装置，包括吸收器压力的衬底
公开(公告)号：WO2013180696A1
公开(公告)日：2013-12-05
申请号：PCT/US2012/039926
申请日：2012-05-30
申请人： HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. , WALMSLEY, Robert G. , WU, Jennifer , ZHANG, Zhuqing , BERNARD, Sheldon A.
发明人： WALMSLEY, Robert G. , WU, Jennifer , ZHANG, Zhuqing , BERNARD, Sheldon A.
IPC分类号： H01L23/02
CPC分类号： H01L23/562 , B81B7/0048 , H01L24/32 , H01L2224/83385 , H01L2924/1461 , H01L2924/15787 , H01L2924/00
摘要： A device including a semiconductor and a substrate. The substrate has a membrane and at least one structure that supports the semiconductor. The membrane surrounds the at least one structure and is thinner than the at least one structure to absorb stresses between the semiconductor and the substrate.
摘要翻译：一种包括半导体和衬底的器件。衬底具有膜和支撑半导体的至少一种结构。膜围绕至少一个结构并且比至少一个结构更薄以吸收半导体和衬底之间的应力。

2. 发明申请

WO2013002767A1 OUT-OF-PLANE TRAVEL RESTRICTION STRUCTURES 审中-公开
标题翻译：超平面旅行限制结构
公开(公告)号：WO2013002767A1
公开(公告)日：2013-01-03
申请号：PCT/US2011/042175
申请日：2011-06-28
申请人： HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. , MILLIGAN, Donald, J. , ALLEY, Rodney L. , HARTWELL, Peter, G. , WALMSLEY, Robert, G.
发明人： MILLIGAN, Donald, J. , ALLEY, Rodney L. , HARTWELL, Peter, G. , WALMSLEY, Robert, G.
IPC分类号： B81C1/00 , B81B7/02
CPC分类号： H02N1/00 , B81B3/0051 , B81B3/0054 , B81B2201/0235 , B81B2203/053 , B81C1/00388 , G01P2015/0871 , H01H3/60 , H01L29/84
摘要： The present disclosure includes structures and methods of forming structures for restricting out-of-plane travel. One example of forming such structures includes providing a first wafer (100, 220) comprising a bond layer of a particular thickness (101, 221) on a surface of a substrate material (105, 225), removing the bond layer (101, 221) in a first area (103-1, 103-2, 223) to expose the surface of the substrate material (105, 225), applying a mask to at least a portion of a remaining bond layer (109-1, 109-4, 229-1, 229-3) and a portion of the exposed surface of the substrate material in the first area (109-2, 109-3, 229-2) to form a second area exposed on the surface of the substrate material (105, 225), etching the second area to form a cavity (110, 230) in the substrate material (105, 225) and the bond layer (101, 221), and forming by the etching, in the cavity (110, 230), a structure (113-1, 113-2, 233 for restricting out-of-plane travel, where the structure (113-1, 113-2, 233) has a particular height from a bottom of the cavity (115, 235) determined by the particular thickness of the bond layer (101, 221).
摘要翻译：本公开包括形成用于限制飞机外行进的结构的结构和方法。形成这种结构的一个实例包括在衬底材料（105,225）的表面上提供包括特定厚度（101,221）的接合层的第一晶片（100,220），去除接合层（101,221））在第一区域（103-1,103-2,223）中以暴露所述衬底材料（105,225）的表面，将掩模施加到剩余接合层（109-1,109-和223）的至少一部分上， 4，229-1,229-3）和第一区域（109-2,103-3,229-2）中的基板材料的暴露表面的一部分，以形成暴露在基板表面上的第二区域蚀刻所述第二区域以在所述基底材料（105,225）和所述接合层（101,221）中形成空腔（110,230），并且通过所述蚀刻在所述空腔（110）中形成，230），用于限制平面外行进的结构（113-1,113-2,233），其中结构（113-1,113-2,233）具有距腔的底部的特定高度（ 115,235）由粘合剂l的特定厚度确定 ayer（101,221）。

3. 发明申请

WO2010056442A3 A RESONATOR HAVING A STATOR COUPLED TO THREE STATOR VOLTAGES 审中-公开
公开(公告)号：WO2010056442A3
公开(公告)日：2010-05-20
申请号：PCT/US2009/059917
申请日：2009-10-08
申请人： HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. , WALMSLEY, Robert G , ZHANG, Wenhua , KIYAMA, Lennie K , HARTWELL, Peter
发明人： WALMSLEY, Robert G , ZHANG, Wenhua , KIYAMA, Lennie K , HARTWELL, Peter
IPC分类号： H03H9/24 , H01P7/00
摘要： A resonator includes a translator, a stator. and a control circuit. The control circuit is configured to provide first and second translator voltages and first through third stator voltages, wherein the translator is configured to move with respect to the stator at a resonant frequency of the resonator in response to the control circuit.

4. 发明申请

WO2010050976A1 OPTICAL INTERCONNECT COMPONENTS 审中-公开
标题翻译：光学互连组件
公开(公告)号：WO2010050976A1
公开(公告)日：2010-05-06
申请号：PCT/US2008/082110
申请日：2008-10-31
申请人： HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. , KUO, Huei, Pei , TAN, Michael, Renne Ty , WANG, Shih-yuan , WALMSLEY, Robert, G. , ROSENBERG, Paul, Kessler
发明人： KUO, Huei, Pei , TAN, Michael, Renne Ty , WANG, Shih-yuan , WALMSLEY, Robert, G. , ROSENBERG, Paul, Kessler
IPC分类号： G02B6/42 , G02B6/12
CPC分类号： G02B6/2817 , G02B6/4204
摘要： A component for an optical interconnect includes a waveguide having at least one surface that is configured at an angle equal to or less than 90° relative to an axis of the waveguide. A tap is operatively connected to the waveguide. The tap has an angled surface that is adhered to the angled surface of the waveguide. An angle of the angled surface of the tap is substantially identical to the angle of the angled surface of the waveguide. An axis of the tap is positioned at an angle that is two times the angle of the angled surface of the tap. An at least partially reflective coating established on at least a portion of the angled surface of the tap.
摘要翻译：用于光学互连的部件包括具有相对于波导的轴线等于或小于90°的角度的至少一个表面的波导。水龙头可操作地连接到波导。水龙头具有粘附到波导的成角度表面的成角度的表面。龙头的倾斜表面的角度基本上与波导的倾斜表面的角度相同。龙头的轴线定位成与龙头的倾斜表面的角度的两倍的角度。至少部分反射的涂层建立在水龙头的倾斜表面的至少一部分上。

5. 发明申请

WO2006017005A1 INTERCONNECTING INTEGRATED CIRCUITS USING MEMS 审中-公开
标题翻译：使用MEMS互连集成电路
公开(公告)号：WO2006017005A1
公开(公告)日：2006-02-16
申请号：PCT/US2005/022697
申请日：2005-06-28
申请人： HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. , SHARMA, Manish , WALMSLEY, Robert, G.
发明人： SHARMA, Manish , WALMSLEY, Robert, G.
IPC分类号： B81B7/00
CPC分类号： B81B7/0006 , B81B2201/014
摘要： A semiconductor device (100) comprises a plurality of integrated circuits (130a & 130b) and at least one MEMS device (110 & 120) interconnecting the integrated circuits (130a & 130b) for signal transmission between the circuits.
摘要翻译：半导体器件（100）包括多个集成电路（130a和130b）和至少一个互连集成电路（130a和130b）的MEMS器件（110和120），用于在电路之间进行信号传输。

6. 发明申请

WO2010107436A1 THREE PHASE CAPACITANCE-BASED SENSING 审中-公开
标题翻译：三相电容传感器
公开(公告)号：WO2010107436A1
公开(公告)日：2010-09-23
申请号：PCT/US2009/037648
申请日：2009-03-19
申请人： HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. , WALMSLEY, Robert, G.
发明人： WALMSLEY, Robert, G.
IPC分类号： G01P15/08 , B81B7/02 , B81C3/00
CPC分类号： G01P15/125 , B81B3/0086 , B81B7/008 , B81B2201/0235 , B81B2203/0136 , G01P15/131 , G01P15/18 , G01P2015/0814 , G01P2015/082
摘要： Various systems and methods for sensing are provided. In one embodiment, a sensing system is provided that includes a first electrode array disposed on a proof mass, and a second electrode array disposed on a planar surface of a support structure. The proof mass is attached to the support structure via a compliant coupling such that the first electrode array is positioned substantially parallel to and faces the second electrode array and the proof mass is capable of displacement relative to the support structure. The first electrode array includes a plurality of first patterns of electrodes and the second electrode array includes a plurality of second patterns of electrodes. The sensing system further includes circuitry configured to provide an input voltage to each of the second patterns of electrodes to produce an electrical null position for the first electrode array.
摘要翻译：提供了用于感测的各种系统和方法。在一个实施例中，提供了一种感测系统，其包括设置在检测质量块上的第一电极阵列和设置在支撑结构的平坦表面上的第二电极阵列。检测质量通过柔性联接件附接到支撑结构，使得第一电极阵列基本上平行于第二电极阵列并面对第二电极阵列，并且检测质量块能够相对于支撑结构移位。第一电极阵列包括多个电极的第一图案，第二电极阵列包括多个第二图案的电极。感测系统还包括被配置为向每个第二电极图形提供输入电压以产生第一电极阵列的电零位置的电路。

7. 发明申请

WO2010050975A1 OPTICAL BEAM COUPLERS AND SPLITTERS 审中-公开
标题翻译：光束耦合器和分离器
公开(公告)号：WO2010050975A1
公开(公告)日：2010-05-06
申请号：PCT/US2008/082101
申请日：2008-10-31
申请人： HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. , KUO, Huei, Pei , TAN, Michael Renne, Ty , WANG, Shih-yuan , WALMSLEY, Robert, G. , ROSENBERG, Paul, Kessler
发明人： KUO, Huei, Pei , TAN, Michael Renne, Ty , WANG, Shih-yuan , WALMSLEY, Robert, G. , ROSENBERG, Paul, Kessler
IPC分类号： G02B27/10 , G02B6/27
CPC分类号： G02B6/2817 , G02B27/126 , G02B27/145
摘要： Beam couplers and splitters are disclosed herein. An embodiment of a beam coupler and splitter includes a first waveguide including a bevel and a bend, and a second waveguide including a bevel complementarily shaped to the first waveguide bevel. The first waveguide bevel is configured to totally internally reflect at least some light incident thereon. The second waveguide is coupled to the first waveguide such that i) the second waveguide bevel is adjacent to at least a portion of the first waveguide bevel, and ii) a predetermined coupling ratio is achieved.
摘要翻译：光束耦合器和分离器在本文中公开。光束耦合器和分离器的实施例包括包括斜面和弯曲部的第一波导和包括与第一波导斜面互补成形的斜面的第二波导。第一波导斜面被配置为完全内部反射入射到其上的至少一些光。第二波导耦合到第一波导，使得i）第二波导斜面与第一波导斜面的至少一部分相邻，以及ii）实现预定的耦合比。

8. 发明申请

WO2014021868A1 DEVICE INCLUDING INTERPOSER BETWEEN SEMICONDUCTOR AND SUBSTRATE 审中-公开
标题翻译：包括半导体和衬底之间的间隔器的器件
公开(公告)号：WO2014021868A1
公开(公告)日：2014-02-06
申请号：PCT/US2012/049048
申请日：2012-07-31
申请人： HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. , WALMSLEY, Robert G. , ZHANG, Zhuqing , WU, Jennifer , BERNARD, Sheldon A. , CHOY, Silam J.
发明人： WALMSLEY, Robert G. , ZHANG, Zhuqing , WU, Jennifer , BERNARD, Sheldon A. , CHOY, Silam J.
IPC分类号： B81B3/00 , B81B7/00 , B81C1/00 , G01P15/02 , G01P15/08
CPC分类号： H05K1/18 , B81B7/0048 , B81B2201/0235 , G01P15/0802 , H01L24/32 , H01L2224/32014 , H05K13/0469 , H05K2203/06 , Y10T156/10
摘要： A device including a semiconductor, a substrate, and an interposer. The interposer is attached between the semiconductor and the substrate to absorb stresses between the semiconductor and the substrate.
摘要翻译：一种包括半导体，衬底和中介层的器件。插入器附接在半导体和衬底之间以吸收半导体和衬底之间的应力。

9. 发明申请

WO2010056442A2 A RESONATOR HAVING A STATOR COUPLED TO THREE STATOR VOLTAGES 审中-公开
标题翻译：具有与三个定子电压耦合的定常器的谐振器
公开(公告)号：WO2010056442A2
公开(公告)日：2010-05-20
申请号：PCT/US2009059917
申请日：2009-10-08
申请人： HEWLETT PACKARD DEVELOPMENT CO , WALMSLEY ROBERT G , ZHANG WENHUA , KIYAMA LENNIE K , HARTWELL PETER
发明人： WALMSLEY ROBERT G , ZHANG WENHUA , KIYAMA LENNIE K , HARTWELL PETER
IPC分类号： H03H9/24 , H01P7/00
CPC分类号： H02N1/004 , H03H9/24
摘要： A resonator includes a translator, a stator. and a control circuit. The control circuit is configured to provide first and second translator voltages and first through third stator voltages, wherein the translator is configured to move with respect to the stator at a resonant frequency of the resonator in response to the control circuit.
摘要翻译：谐振器包括平移器，定子。和控制电路。控制电路被配置为提供第一和第二转换器电压和第一至第三定子电压，其中转换器被配置为响应于控制电路在谐振器的谐振频率处相对于定子移动。

10. 发明申请

WO2010050967A1 COMPENSATING FREQUENCY MISMATCH IN GYROSCOPES 审中-公开
标题翻译：补偿频率误差在晶体中
公开(公告)号：WO2010050967A1
公开(公告)日：2010-05-06
申请号：PCT/US2008/081985
申请日：2008-10-31
申请人： HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. , ZHANG, Wenhua , WALMSLEY, Robert G.
发明人： ZHANG, Wenhua , WALMSLEY, Robert G.
IPC分类号： G01C19/00 , G01P9/04
CPC分类号： G01C19/5755 , G01C19/574
摘要： Gyroscopes that can compensate frequency mismatch are provided. In this regard, a representative gyroscope, among others, includes a top substrate comprising an outermost structure, a first driving structure and a first sensing structure. The first driving structure and the first sensing structure are disposed within the outermost structure. The first driving structure and the first sensing structure include a first driving electrode and a first sensing electrode that are disposed on a bottom surface of the first driving structure and first sensing structure, respectively. A portion of the mass on the top surface of the first sensing structure is removed. The gyroscope further includes a bottom substrate that is disposed below the top substrate. The bottom substrate includes a second driving electrode and a second sensing electrode that are disposed on a top surface of the bottom substrate and below the first driving electrode and the first sensing electrode.
摘要翻译：提供可以补偿频率不匹配的陀螺仪。在这方面，代表性陀螺仪其中包括包括最外面结构的顶部基底，第一驱动结构和第一感测结构。第一驱动结构和第一感测结构设置在最外面的结构内。第一驱动结构和第一感测结构包括分别设置在第一驱动结构和第一感测结构的底表面上的第一驱动电极和第一感测电极。去除第一感测结构的顶表面上的质量的一部分。陀螺仪还包括设置在顶部基板下方的底部基板。底部基板包括设置在底部基板的顶表面上并且在第一驱动电极和第一感测电极下方的第二驱动电极和第二感测电极。

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