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    • 2. 发明申请
    • MICRO DEVICE PACKAGING
    • 微型设备包装
    • WO2010098771A1
    • 2010-09-02
    • PCT/US2009/035542
    • 2009-02-27
    • HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.ZHANG, ZhuqingHANSON, Steve P.CHEN, Chien-Hua
    • ZHANG, ZhuqingHANSON, Steve P.CHEN, Chien-Hua
    • H01L23/10H01L23/15G02B5/26G02B5/28
    • G02B5/284B81B2201/0292B81B2201/047B81C1/00888G02B1/11H01L2924/16235
    • In one embodiment, a method for making an optical micro device package includes: providing a substrate wafer having a plurality of solid state light sensors integrate therein; providing a transparent cover wafer coated with a material that alters the transparency characteristics of the cover wafer; forming a layer of light sensitive, photo definable adhesive material on the substrate wafer; selectively removing part of the layer of adhesive material in a pattern for a plurality of adhesive spacers between the substrate wafer and the cover wafer with each spacer surrounding a corresponding one of the light sensors; bonding the substrate wafer and the cover wafer together at the spacers to form a wafer assembly in which each spacer surrounds and seals a corresponding one of the light sensors within a cavity bounded by a spacer and the two wafers; and singulating individual device packages from the wafer assembly.
    • 在一个实施例中,一种用于制造光学微器件封装的方法包括:提供具有集成在其中的多个固态光传感器的衬底晶片; 提供涂覆有改变覆盖晶片的透明特性的材料的透明盖晶片; 在衬底晶片上形成一层光敏的可光定义粘合剂材料; 在衬底晶片和覆盖晶片之间的多个粘合剂间隔物的图案中选择性地去除粘合剂材料层的一部分,每个间隔物环绕相应的一个光传感器; 将衬底晶片和覆盖晶片在间隔件处结合在一起以形成晶片组件,其中每个间隔件在由间隔件和两个晶片限定的空腔内围绕并密封相应的一个光传感器; 以及从晶片组件分离单个器件封装。
    • 5. 发明申请
    • IMPRINT LITHOGRAPHY APPARATUS AND METHOD
    • IMPRINT LITHOGRAPHY APPARATUS和方法
    • WO2009078881A1
    • 2009-06-25
    • PCT/US2007/088250
    • 2007-12-19
    • HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.ZHANG, Zhuqing
    • ZHANG, Zhuqing
    • H01L21/027
    • G03F7/0002B82Y10/00B82Y40/00
    • An imprint lithography stamp (101, 201, 401, 501, 617) includes a base layer (301, 619); a functional layer (303, 621) of lithography features (307, 309, 403, 405, 503, 505) protruding from the base layer (301, 619); and a support layer (305, 623) comprising a regular pattern of sub-features (311, 313, 407, 409, 507, 509, 613, 615, 625) protruding from the lithography features (307, 309, 403, 405, 503, 505). An imprint lithography system (100, 200, 300) includes a substrate (104, 205, 513, 601) having a layer of resin material (511) deposited thereon; a stamp (101, 201, 401, 501, 617) having a base layer (301, 619), a functional layer (303, 621) of lithography features (307, 309, 403, 405, 503, 505) protruding from the base layer (301, 619) and a support layer (305, 623) comprising a regular pattern of sub-features (311, 313, 407, 409, 507, 509, 613, 615, 625) protruding from the lithography features (307, 309, 403, 405, 503, 505); and an imprinting device configured to press the stamp (101, 201, 401, 501, 617) into the resin material (511).
    • 压印光刻印模(101,201,401,501,617)包括基层(301,619); 从所述基底层(301,619)突出的光刻特征(307,309,403,405,503,505)的功能层(303,621); 以及包括从光刻特征(307,309,403,405,607)突出的子特征(311,313,407,409,507,509,613,615,625)的规则图案的支撑层(305,623) 503,505)。 压印光刻系统(100,200,300)包括其上沉积有树脂材料层(511)的衬底(104,205,513,601); 具有基底层(301,619)的印模(101,201,401,501,617),从所述印刷电路板的凸起部分突出的光刻特征(307,309,403,405,503,505)的功能层(303,621) 基底层(301,619)和支撑层(305,623),其包括从光刻特征突出的子特征(311,313,407,409,507,509,613,615,625)的规则图案 ,309,403,405,503,505); 以及构造成将印模(101,201,401,501,617)压入树脂材料(511)的压印装置。