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1. 发明申请

WO2011087762A1 EFFICIENT ACTIVE SOURCE IMPEDANCE MODIFICATION OF A POWER AMPLIFIER 审中-公开
标题翻译：功率放大器的有效的源极阻抗修正
公开(公告)号：WO2011087762A1
公开(公告)日：2011-07-21
申请号：PCT/US2010/061351
申请日：2010-12-20
申请人： ADVANCED ENERGY INDUSTRIES, INC. , VAN ZYL, Gideon , DORRENBACHER, John
发明人： VAN ZYL, Gideon , DORRENBACHER, John
IPC分类号： H03L5/02 , H03H11/00 , H05H1/46 , H03B5/04 , H03L1/00 , H03F1/08 , H05B6/08
CPC分类号： H03H7/40 , H03F1/56 , H05H2001/4682
摘要： A system, method, and apparatus for stabilizing interactions between an electrical generator and a nonlinear load are described. One illustrative embodiment includes an impedance element that is coupled to an output of the generator and a power source coupled to the impedance element. The power source applies power to, or across, the impedance element so as to reduce energy loss that would ordinarily occur due to energy dissipation by way of the impedance element. In many variations, the power source operates within a defined bandwidth so that a stabilizing effect is achieved outside of this bandwidth.
摘要翻译：描述了用于稳定发电机和非线性负载之间的相互作用的系统，方法和装置。一个说明性实施例包括耦合到发生器的输出的阻抗元件和耦合到阻抗元件的电源。电源将功率施加到阻抗元件上或跨越阻抗元件，以便减少由于通过阻抗元件的能量耗散而通常会发生的能量损失。在许多变型中，电源在限定的带宽内操作，使得在该带宽之外实现稳定效果。

2. 发明专利

ZA200704615B Security barrier 未知
公开(公告)号：ZA200704615B
公开(公告)日：2009-06-24
申请号：ZA200704615
申请日：2007-06-29
申请人： COENRAAD VAN ZYL GIDEON BOTMA
发明人： COENRAAD VAN ZYL GIDEON BOTMA
IPC分类号： E04C20090101 , E04G20090101

3. 发明申请

WO2012099774A1 IMPEDANCE-MATCHING NETWORK USING BJT SWITCHES IN VARIABLE-REACTANCE CIRCUITS 审中-公开
标题翻译：使用可变电阻电路中的BJT开关的阻抗匹配网络
公开(公告)号：WO2012099774A1
公开(公告)日：2012-07-26
申请号：PCT/US2012/021114
申请日：2012-01-12
申请人： ADVANCED ENERGY INDUSTRIES, INC. , VAN ZYL, Gideon , GUROV, Gennady G.
发明人： VAN ZYL, Gideon , GUROV, Gennady G.
IPC分类号： H03H7/40 , H03H11/30 , H01L21/3065 , H05H1/46
CPC分类号： H03H11/30 , H01J37/32183 , H03H5/12 , H03H7/38 , H03K17/16 , H03K17/60 , H03K17/68 , H05H1/46 , H05H2001/4682
摘要： This disclosure describes systems, methods, and apparatuses for impedance-matching radio frequency power transmitted from a radio frequency generator to a plasma load in a semiconductor processing chamber. Impedance-matching can be performed via a match network having a variable-reactance circuit. The variable-reactance circuit can comprise one or more reactive elements all connected to a first terminal and selectively shorted to a second terminal via a switch. The switch can comprise a bipolar junction transistor (BJT) or insulated gate bipolar transistor (IGBT) controlled via bias circuitry. In an on-state, the BJT base-emitter junction is forward biased, and AC is conducted between a collector terminal and a base terminal. Thus, AC passes through the BJT primarily from collector to base rather than from collector to emitter. Furthermore, the classic match network topology used with vacuum variable capacitors can be modified such that voltages do not overload the BJT's in the modified topology.
摘要翻译：本公开描述了用于将从射频发生器发送的射频功率阻抗匹配到半导体处理室中的等离子体负载的系统，方法和装置。可以通过具有可变电抗电路的匹配网络来执行阻抗匹配。可变电抗电路可以包括一个或多个无功元件，其全部连接到第一端子，并经由开关选择性地短路到第二端子。开关可以包括通过偏置电路控制的双极结型晶体管（BJT）或绝缘栅双极晶体管（IGBT）。在导通状态下，BJT基极 - 发射极结正向偏置，并且AC在集电极端子和基极端子之间传导。因此，AC主要通过BJT从集电器到基极而不是从集电极到发射极。此外，可以修改与真空可变电容器一起使用的经典匹配网络拓扑，使得电压不会在修改的拓扑中使BJT过载。

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