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    • 4. 发明申请
    • ELECTROSTATIC CHUCK AND METHOD OF MANUFACTURING ELECTROSTATIC CHUCK
    • 静电切割机及其制造方法
    • US20130201598A1
    • 2013-08-08
    • US13816050
    • 2011-08-11
    • Kaduko IshikawaJunji YonezawaToshihiro Aoshima
    • Kaduko IshikawaJunji YonezawaToshihiro Aoshima
    • H02N13/00
    • H02N13/00B23Q3/152H01L21/6833
    • An electrostatic chuck comprises: a dielectric substrate having a protrusion and a planar surface part. The protrusion is formed on a major surface of the dielectric substrate. An adsorption target material is mounted on the major surface. The planar surface part is formed in a periphery of the protrusion. The dielectric substrate is formed from a polycrystalline ceramics sintered body. A top face of the protrusion is a curved surface, and a first recess is formed in the top face to correspond to crystal grains that appear on the surface. The planar surface part has a flat part, and a second recess is formed in the flat part. A depth dimension of the first recess is greater than a depth dimension of the second recess. The electrostatic chuck can suppress the generation of particles and a method for manufacturing the electrostatic chuck is provided.
    • 静电卡盘包括:具有突起和平坦表面部分的电介质基板。 突起形成在电介质基板的主表面上。 吸附目标材料安装在主表面上。 平面部分形成在突起的周边。 电介质基板由多晶陶瓷烧结体形成。 突起的顶面是弯曲表面,并且在顶面形成第一凹部以对应于出现在表面上的晶粒。 平面部分具有平坦部分,并且在平坦部分中形成第二凹部。 第一凹部的深度尺寸大于第二凹部的深度尺寸。 静电卡盘可以抑制颗粒的产生,并且提供了制造静电卡盘的方法。
    • 6. 发明授权
    • Electrostatic chuck and method of manufacturing electrostatic chuck
    • 静电吸盘及制造静电吸盘的方法
    • US08971010B2
    • 2015-03-03
    • US13816050
    • 2011-08-11
    • Kaduko IshikawaJunji YonezawaToshihiro Aoshima
    • Kaduko IshikawaJunji YonezawaToshihiro Aoshima
    • H01T23/00H02N13/00B23Q3/152H01L21/683
    • H02N13/00B23Q3/152H01L21/6833
    • An electrostatic chuck comprises: a dielectric substrate having a protrusion and a planar surface part. The protrusion is formed on a major surface of the dielectric substrate. An adsorption target material is mounted on the major surface. The planar surface part is formed in a periphery of the protrusion. The dielectric substrate is formed from a polycrystalline ceramics sintered body. A top face of the protrusion is a curved surface, and a first recess is formed in the top face to correspond to crystal grains that appear on the surface. The planar surface part has a flat part, and a second recess is formed in the flat part. A depth dimension of the first recess is greater than a depth dimension of the second recess. The electrostatic chuck can suppress the generation of particles and a method for manufacturing the electrostatic chuck is provided.
    • 静电卡盘包括:具有突起和平坦表面部分的电介质基板。 突起形成在电介质基板的主表面上。 吸附目标材料安装在主表面上。 平面部分形成在突起的周边。 电介质基板由多晶陶瓷烧结体形成。 突起的顶面是弯曲表面,并且在顶面形成第一凹部以对应于出现在表面上的晶粒。 平面部分具有平坦部分,并且在平坦部分中形成第二凹部。 第一凹部的深度尺寸大于第二凹部的深度尺寸。 静电卡盘可以抑制颗粒的产生,并且提供了制造静电卡盘的方法。