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1. 发明授权

US5474410A Multi-chamber system provided with carrier units 失效
标题翻译：多室系统配有承载单元
公开(公告)号：US5474410A
公开(公告)日：1995-12-12
申请号：US212821
申请日：1994-03-14
申请人： Masahito Ozawa , Masami Mizukami , Masanobu Kanazashi , Toshihiko Takasoe , Masaki Narushima , Masao Kubodera
发明人： Masahito Ozawa , Masami Mizukami , Masanobu Kanazashi , Toshihiko Takasoe , Masaki Narushima , Masao Kubodera
IPC分类号： H01L21/00 , H01L21/677 , H01L21/68 , B65G1/06
CPC分类号： H01L21/67167 , H01L21/67766 , H01L21/67775 , H01L21/681 , Y10S414/136 , Y10S414/137 , Y10S414/139 , Y10S414/14
摘要： A cassette carrier unit for carrying a cassette, in which a plurality of substrates are housed, into and out of cassette chambers of the multi-chamber system including a hand on which the cassette is mounted. A multi-joined arm for supports the swingable hand, and a base supports the multi-joined swingable arm. The multi-joined arm includes a first shaft member rotatably attached to the hand, a second shaft member rotatably attached to the base, a third shaft member rotated associating with the first shaft member but in a direction reverse to the direction in which the first shaft member is rotated, and a fourth shaft member rotatably attached to the base and to which rotation drive force is transmitted. A first arm is rotatably attached to the first shaft member at the front end thereof and to the second shaft member at the base end thereof. A second arm is arranged substantially parallel to the first arm and fixed to the third shaft member at the front end thereof and to the fourth shaft member at the base end thereof. When the first and second arms are swung, the hand is swung in a direction reverse to the direction in which the first and second arms are swung.
摘要翻译：用于将容纳多个基板的盒带入和插入多室系统的盒室中的盒式载体单元，其包括安装有盒的手。用于支撑可摆动的手的多连接臂，以及支撑多重可摆动臂的基座。所述多接合臂包括可旋转地附接到所述手的第一轴构件，可旋转地附接到所述基座的第二轴构件，与所述第一轴构件旋转相关联但与所述第一轴构件的方向相反的方向旋转的第三轴构件构件旋转，第四轴构件可旋转地安装到基座并且传递旋转驱动力。第一臂在其前端处可旋转地附接到第一轴构件，并且在其基端处可旋转地附接到第二轴构件。第二臂基本上平行于第一臂布置并在其前端固定到第三轴构件，并在其基端固定到第四轴构件。当第一和第二臂摆动时，手沿与第一和第二臂摆动的方向相反的方向摆动。

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