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    • 4. 发明授权
    • Apparatus for producing semiconductor film
    • 半导体膜制造装置
    • US5252132A
    • 1993-10-12
    • US796618
    • 1991-11-22
    • Masao OdaYoshiyuki GotoToyomi OsigeTatsuya IwasaYoshimi KinoshitaKatsuhisa KitanoKazuo Yoshida
    • Masao OdaYoshiyuki GotoToyomi OsigeTatsuya IwasaYoshimi KinoshitaKatsuhisa KitanoKazuo Yoshida
    • C23C16/48C30B25/10C30B25/14H01L21/00C23C16/00
    • H01L21/67115C23C16/481C23C16/488C30B25/105C30B25/14
    • A semiconductor film production apparatus includes a reaction vessel for containing a substrate and including a gas supply port for supplying a reaction gas to the vessel, a gas discharge port for discharging the reaction gas from the vessel after reaction, and a light-transmitting glass window; a light source disposed outside the reaction vessel for irradiating a substrate in the reaction vessel through the light-transmitting glass window to heat the substrate; a cylindrical substrate holder disposed in the reaction vessel for holding the substrate with a first surface facing the light source and a second surface, opposed to the first surface, exposed to the reaction gas; a ring plate having a central opening with an area smaller than the substrate and an outside diameter dividing the reaction vessel into two compartments, the ring plate contacting the first surface of the substrate; a carrier gas supply port for introducing a carrier gas between the substrate and the light-transmitting glass window; and a reaction gas supply nozzle disposed in the substrate holder connected to said gas supply port and opposing the second surface of the substrate.
    • 半导体膜制造装置包括:容纳基板的反应容器,具有用于向容器供给反应气体的气体供给口;反应后从反应容器排出反应气体的气体排出口;透光性玻璃窗 ; 设置在所述反应容器的外部的光源,用于通过所述透光玻璃窗照射反应容器中的基板以加热所述基板; 设置在所述反应容器中的圆柱形衬底保持器,用于保持所述衬底具有面向所述光源的第一表面和与所述第一表面相对的暴露于所述反应气体的第二表面; 环形板,具有中心开口,面积小于基板,外径将反应容器分成两个隔室,环板接触基板的第一表面; 用于在基板和透光玻璃窗之间引入载气的载气供给口; 以及反应气体供给喷嘴,其设置在与所述气体供给口连接并与所述基板的第二表面相对的所述基板保持件中。
    • 5. 发明授权
    • Method and apparatus for forming thin film
    • 用于形成薄膜的方法和装置
    • US5192370A
    • 1993-03-09
    • US542148
    • 1990-06-22
    • Masao OdaTatsuya Iwasa
    • Masao OdaTatsuya Iwasa
    • C23C16/50C23C16/44C23C16/452C23C16/455C23C16/511H01L21/205H01L21/31
    • C23C16/45517C23C16/452C23C16/45591Y10S156/916
    • Method of forming a thin film on a substrate by CVD (Chemical Vapor Deposition) method and an apparatus therefor, wherein a first gas is supplied from a reaction gas supply port in a reaction chamber, and an active species produced by exciting a second gas are supplied from an active species supply port in the reaction chamber, and a thin film is formed on the substrate by reaction of the first reaction gas and the active species, since a metal porous plate having a number of small holes is installed close to the substrate between the active species supply port and a heater so as to enclose at least the substrate and the active species supply port, the precursor forming reaction is limited to position on the surface of the substrate and diffusion of the precursor to the outer circumferential portion and the inner wall of the reaction chamber is prevented, thereby the low dust producing process to advance the thin film forming reaction is obtained without generating the reaction product of fine particle form which may cause the dust producing.
    • 通过CVD(化学气相沉积)法在基板上形成薄膜的方法及其装置,其中从反应室中的反应气体供给口供给第一气体,通过激发第二气体产生的活性物质 由反应室中的活性物质供给口供给,并且通过第一反应气体和活性物质的反应,在基板上形成薄膜,因为具有多个小孔的金属多孔板安装在基板附近 在活性物质供给口和加热器之间至少包围基材和活性物质供给口的情况下,前体形成反应被限制在基材表面上的位置和前体向外周部的扩散, 防止反应室的内壁,从而获得促进薄膜形成反应的低粉尘产生过程而不产生反应产物 可能导致粉尘产生的细颗粒形式。
    • 6. 发明授权
    • System for assisting driving of vehicle
    • 辅助驾驶车辆的系统
    • US09160981B2
    • 2015-10-13
    • US13636970
    • 2011-02-16
    • Haruhiko NishiguchiKei OshidaTakashi WatanabeTatsuya Iwasa
    • Haruhiko NishiguchiKei OshidaTakashi WatanabeTatsuya Iwasa
    • H04N7/18B60R1/06B60R1/12
    • H04N7/18B60R1/06B60R2001/1253B60R2300/8026
    • Disclosed is a device which is mounted on a vehicle, and captures a rear region of a vehicle and a blind spot region outside of a viewing range of a side mirror adjacent to the rear region of the vehicle. A captured image is subjected to image processing so that the blind spot region on the captured image is compressed. The image after subjected to the image processing is displayed so as to be visible to a driver. The blind spot region on the captured image is compressed so that a sudden change of position of a object in a horizontal direction on the captured image is suppressed, as against a change of distance from the vehicle to the object. Compression is performed so that the ratio of transition of position of the object in the horizontal direction on the captured image to transition of distance from the vehicle to the object is substantially the same as the ratio of transition of position of the object in the horizontal direction in the side mirror to transition of distance from the vehicle to the object. The phenomenon of the object's appearance as if the object suddenly accelerates in the vicinity of the vehicle is avoided.
    • 公开了一种安装在车辆上的装置,并且捕获车辆的后部区域和邻近车辆后部区域的侧镜的观察范围之外的盲点区域。 拍摄的图像经受图像处理,使得捕获的图像上的盲点区域被压缩。 显示经过图像处理后的图像,以便对驾驶员可见。 被捕获的图像上的盲点区域被压缩,从而抑制了被拍摄图像上的物体在水平方向上的位置的突然变化,与对车辆的距离的变化相对应。 进行压缩,使得物体在水平方向上的位置的转变与捕获的图像之间的距离与从车辆到物体的距离的转变的比率基本上与物体在水平方向上的位置的转变的比率相同 在侧视镜中,从车辆到物体的距离过渡。 避免了在车辆附近突然加速物体的外观现象。