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1. 发明授权

US08959461B2 Pattern measurement device and pattern measurement method 有权
标题翻译：图案测量装置和图案测量方法
公开(公告)号：US08959461B2
公开(公告)日：2015-02-17
申请号：US14233003
申请日：2012-03-23
申请人： Takuma Shibahara , Michio Oikawa , Yutaka Hojo , Hitoshi Sugahara , Hiroyuki Shindo
发明人： Takuma Shibahara , Michio Oikawa , Yutaka Hojo , Hitoshi Sugahara , Hiroyuki Shindo
IPC分类号： G06F17/50 , H01J37/26 , G01B15/04 , G03F1/36 , H01L21/66 , G01N23/225
CPC分类号： H01J37/261 , G01B15/04 , G01N23/2251 , G03F1/36 , G03F7/70441 , G03F7/70625 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： A pattern measurement device includes: a storage section storing mask edge data of a circuit pattern and image data obtained by imaging the circuit pattern; an SEM contour extracting section receiving the image data, SEM contour of the circuit pattern, and cause an exposure simulator to generate estimated SEM contour data of an estimated SEM contour on the basis of the mask edge data and SEM contour data of the extracted SEM contour; a shape classifying section receiving the mask edge data, the SEM contour data, and the estimated contour data to classify the SEM contour data and the estimated SEM contour data into a one-dimensionally shaped contour and a two-dimensionally shaped contour; and an SEM contour sampling section receiving the SEM contour data and the estimated SEM contour data to sample the SEM contour data on the basis of types of the one-dimensionally and two-dimensionally shaped contours.
摘要翻译：图案测量装置包括：存储部分，其存储电路图案的掩模边缘数据和通过对电路图案进行成像获得的图像数据; 接收图像数据的SEM轮廓提取部分，电路图案的SEM轮廓，并且使得曝光模拟器基于提取的SEM轮廓的掩模边缘数据和SEM轮廓数据来生成估计的SEM轮廓的估计的SEM轮廓数据 ; 接收掩模边缘数据的形状分类部分，SEM轮廓数据和估计的轮廓数据，以将SEM轮廓数据和估计的SEM轮廓数据分类成一维轮廓和二维轮廓; 以及SEM轮廓采样部，其接收SEM轮廓数据和估计的SEM轮廓数据，以基于一维和二维轮廓的类型对SEM轮廓数据进行采样。

2. 发明申请

US20110038529A1 IMAGE PROCESSING APPARATUS AND IMAGE PROCESSING METHOD 有权
标题翻译：图像处理装置和图像处理方法
公开(公告)号：US20110038529A1
公开(公告)日：2011-02-17
申请号：US12834649
申请日：2010-07-12
申请人： Kei Utsugi , Takuma Shibahara , Takafumi Koike
发明人： Kei Utsugi , Takuma Shibahara , Takafumi Koike
IPC分类号： G06K9/00
CPC分类号： G06T3/0012
摘要： Image retargeting is appropriately performed on stereo pair images composed of at least two images such as in three-dimensional displays. A path of connected pixels in first image data is calculated based on pixel gradient energy. Each pixel in second image data corresponding to each pixel in connected pixels in the first image data is calculated as an initial search point, based on the stereo correspondence relationship between the first image data and the second image data. Pixels that minimize energy between pixels of the first image data and pixels of the second image data in the proximity of the initial search point is calculated as a path of connected pixels in the second image data. A path of optimal connected pixels in the first image data is calculated using the energy.
摘要翻译：对由三维显示器中的至少两个图像组成的立体对图像适当地执行图像重定向。基于像素梯度能量计算第一图像数据中的连接像素的路径。基于第一图像数据和第二图像数据之间的立体对应关系，将与第一图像数据中的连接像素中的每个像素对应的第二图像数据中的每个像素计算为初始搜索点。将第一图像数据的像素与初始搜索点附近的第二图像数据的像素之间的能量最小化的像素计算为第二图像数据中的连接像素的路径。使用能量计算第一图像数据中的最佳连接像素的路径。

3. 发明授权

US08942464B2 Pattern measuring apparatus, and pattern measuring method and program 有权
标题翻译：图案测量装置，图案测量方法和程序
公开(公告)号：US08942464B2
公开(公告)日：2015-01-27
申请号：US13700018
申请日：2011-03-28
申请人： Takuma Shibahara , Tsuyoshi Minakawa , Michio Oikawa , Yutaka Hojo , Hitoshi Sugahara , Hiroyuki Shindo
发明人： Takuma Shibahara , Tsuyoshi Minakawa , Michio Oikawa , Yutaka Hojo , Hitoshi Sugahara , Hiroyuki Shindo
IPC分类号： G06T7/00 , G01B21/20 , H01J37/22 , H01J37/28 , H01L21/66
CPC分类号： G06T7/0004 , G01B21/20 , G06T7/0006 , G06T2207/10061 , G06T2207/30148 , H01J37/222 , H01J37/28 , H01J2237/24578 , H01J2237/24592 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： The present invention provides a pattern measuring apparatus (600) that: acquires the image contour of a circuit pattern formed by transferring design data; classifies the acquired image contour into shape structures; calculates normal vectors for each shape structure; maps the shape structures to the image contour; uses at least one normal direction for each shape structure to stabilize the normal directions to the image contour; and uses the normal vectors for each shape structure to determine the position of a SEM contour.
摘要翻译：本发明提供一种图形测量装置（600），其获取通过传送设计数据形成的电路图案的图像轮廓; 将获取的图像轮廓分类为形状结构; 计算每个形状结构的法向矢量; 将形状结构映射到图像轮廓; 对于每个形状结构使用至少一个法线方向来稳定图像轮廓的法线方向; 并使用每个形状结构的法向量来确定SEM轮廓的位置。

4. 发明申请

US20130223723A1 PATTERN MEASURING APPARATUS, AND PATTERN MEASURING METHOD AND PROGRAM 有权
标题翻译：模式测量装置和模式测量方法与程序
公开(公告)号：US20130223723A1
公开(公告)日：2013-08-29
申请号：US13700018
申请日：2011-03-28
申请人： Takuma Shibahara , Tsuyoshi Minakawa , Michio Oikawa , Yutaka Hojo , Hitoshi Sugahara , Hiroyuki Shindo
发明人： Takuma Shibahara , Tsuyoshi Minakawa , Michio Oikawa , Yutaka Hojo , Hitoshi Sugahara , Hiroyuki Shindo
IPC分类号： G06T7/00
CPC分类号： G06T7/0004 , G01B21/20 , G06T7/0006 , G06T2207/10061 , G06T2207/30148 , H01J37/222 , H01J37/28 , H01J2237/24578 , H01J2237/24592 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： The present invention provides a pattern measuring apparatus (600) that: acquires the image contour of a circuit pattern formed by transferring design data; classifies the acquired image contour into shape structures; calculates normal vectors for each shape structure; maps the shape structures to the image contour; uses at least one normal direction for each shape structure to stabilize the normal directions to the image contour; and uses the normal vectors for each shape structure to determine the position of a SEM contour.
摘要翻译：本发明提供一种图形测量装置（600），其获取通过传送设计数据形成的电路图案的图像轮廓; 将获取的图像轮廓分类为形状结构; 计算每个形状结构的法向矢量; 将形状结构映射到图像轮廓; 对于每个形状结构使用至少一个法线方向来稳定图像轮廓的法线方向; 并使用每个形状结构的法向量来确定SEM轮廓的位置。

5. 发明申请

US20090304266A1 CORRESPONDING POINT SEARCHING METHOD AND THREE-DIMENSIONAL POSITION MEASURING METHOD 有权
标题翻译：相应的点搜索方法和三维位置测量方法
公开(公告)号：US20090304266A1
公开(公告)日：2009-12-10
申请号：US12513846
申请日：2007-11-09
申请人： Takafumi Aoki , Takuma Shibahara , Hiroshi Nakajima , Koji Kobayashi , Atsushi Katsumata
发明人： Takafumi Aoki , Takuma Shibahara , Hiroshi Nakajima , Koji Kobayashi , Atsushi Katsumata
IPC分类号： G06K9/00
CPC分类号： G01C11/06 , G06K9/32 , G06T7/593 , G06T7/97 , G06T2207/30201
摘要： A plurality of images (I, J) of an object (M) when viewed from different viewpoints are taken in. One of the images is set as a standard image (I), and the other image is set as a reference image (J). One-dimensional pixel data strings with a predetermined width (W) are cut out from the standard image (I) and the reference image (J) along epipolar lines (EP1, EP2) calculated from a camera parameter (CPR) and the reference point (p). Calculating a phase-only correlation function from the cut one-dimensional pixel data strings will obtain a correlation peak position (Pa1). A positional shift amount (d) from the correlation peak position (Pa1) is obtained. A search is made for a corresponding point (q) corresponding to the reference point (p) based on this position shift amount (d).
摘要翻译：摄取从不同视点观看的物体（M）的多个图像（I，J）。其中一个图像被设置为标准图像（I），另一个图像被设置为参考图像（J ）。根据从摄像机参数（CPR）和参考点（CPR）计算的沿极线（EP1，EP2）从标准图像（I）和参考图像（J）切出具有预定宽度（W）的一维像素数据串（p）。从切割的一维像素数据串中计算相位相关函数将获得相关峰值位置（Pa1）。从相关峰值位置（Pa1）获得位置偏移量（d）。基于该位置偏移量（d），对与基准点（p）对应的对应点（q）进行搜索。

6. 发明授权

US08355564B2 Corresponding point searching method and three-dimensional position measuring method 有权
标题翻译：对应点搜索方法和三维位置测量方法
公开(公告)号：US08355564B2
公开(公告)日：2013-01-15
申请号：US12513846
申请日：2007-11-09
申请人： Takafumi Aoki , Takuma Shibahara , Hiroshi Nakajima , Koji Kobayashi , Atsushi Katsumata
发明人： Takafumi Aoki , Takuma Shibahara , Hiroshi Nakajima , Koji Kobayashi , Atsushi Katsumata
IPC分类号： G06K9/00
CPC分类号： G01C11/06 , G06K9/32 , G06T7/593 , G06T7/97 , G06T2207/30201
摘要： A plurality of images (I, J) of an object (M) when viewed from different viewpoints are taken in. One of the images is set as a standard image (I), and the other image is set as a reference image (J). One-dimensional pixel data strings with a predetermined width (W) are cut out from the standard image (I) and the reference image (J) along epipolar lines (EP1, EP2) calculated from a camera parameter (CPR) and the reference point (p). Calculating a phase-only correlation function from the cut one-dimensional pixel data strings will obtain a correlation peak position (Pa1). A positional shift amount (d) from the correlation peak position (Pa1) is obtained. A search is made for a corresponding point (q) corresponding to the reference point (p) based on this position shift amount (d).
摘要翻译：摄取从不同视点观看的物体（M）的多个图像（I，J）。其中一个图像被设置为标准图像（I），另一个图像被设置为参考图像（J ）。根据从摄像机参数（CPR）和参考点（CPR）计算的沿极线（EP1，EP2）从标准图像（I）和参考图像（J）切出具有预定宽度（W）的一维像素数据串（p）。从切割的一维像素数据串中计算相位相关函数将获得相关峰值位置（Pa1）。从相关峰值位置（Pa1）获得位置偏移量（d）。基于该位置偏移量（d），对与基准点（p）对应的对应点（q）进行搜索。

7. 发明申请

US20140224986A1 PATTERN MEASUREMENT DEVICE AND PATTERN MEASUREMENT METHOD 有权
标题翻译：图案测量装置和图案测量方法
公开(公告)号：US20140224986A1
公开(公告)日：2014-08-14
申请号：US14233003
申请日：2012-03-23
申请人： Takuma Shibahara , Michio Oikawa , Yutaka Hojo , Hitoshi Sugahara , Hiroyuki Shindo
发明人： Takuma Shibahara , Michio Oikawa , Yutaka Hojo , Hitoshi Sugahara , Hiroyuki Shindo
IPC分类号： H01J37/26
CPC分类号： H01J37/261 , G01B15/04 , G01N23/2251 , G03F1/36 , G03F7/70441 , G03F7/70625 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： A pattern measurement device includes: a storage section storing mask edge data of a circuit pattern and image data obtained by imaging the circuit pattern; an SEM contour extracting section receiving the image data, SEM contour of the circuit pattern, and cause an exposure simulator to generate estimated SEM contour data of an estimated SEM contour on the basis of the mask edge data and SEM contour data of the extracted SEM contour; a shape classifying section receiving the mask edge data, the SEM contour data, and the estimated contour data to classify the SEM contour data and the estimated SEM contour data into a one-dimensionally shaped contour and a two-dimensionally shaped contour; and an SEM contour sampling section receiving the SEM contour data and the estimated SEM contour data to sample the SEM contour data on the basis of types of the one-dimensionally and two-dimensionally shaped contours.
摘要翻译：图案测量装置包括：存储部分，其存储电路图案的掩模边缘数据和通过对电路图案进行成像获得的图像数据; 接收图像数据的SEM轮廓提取部分，电路图案的SEM轮廓，并且使得曝光模拟器基于提取的SEM轮廓的掩模边缘数据和SEM轮廓数据来生成估计的SEM轮廓的估计的SEM轮廓数据 ; 接收掩模边缘数据的形状分类部分，SEM轮廓数据和估计的轮廓数据，以将SEM轮廓数据和估计的SEM轮廓数据分类成一维轮廓和二维轮廓; 以及SEM轮廓采样部，其接收SEM轮廓数据和估计的SEM轮廓数据，以基于一维和二维轮廓的类型对SEM轮廓数据进行采样。

8. 发明授权

US08401278B2 Image processing apparatus and image processing method 有权
标题翻译：图像处理装置和图像处理方法
公开(公告)号：US08401278B2
公开(公告)日：2013-03-19
申请号：US12834649
申请日：2010-07-12
申请人： Kei Utsugi , Takuma Shibahara , Takafumi Koike
发明人： Kei Utsugi , Takuma Shibahara , Takafumi Koike
IPC分类号： G06K9/00
CPC分类号： G06T3/0012
摘要： Image retargeting is appropriately performed on stereo pair images composed of at least two images such as in three-dimensional displays. A path of connected pixels in first image data is calculated based on pixel gradient energy. Each pixel in second image data corresponding to each pixel in connected pixels in the first image data is calculated as an initial search point, based on the stereo correspondence relationship between the first image data and the second image data. Pixels that minimize energy between pixels of the first image data and pixels of the second image data in the proximity of the initial search point is calculated as a path of connected pixels in the second image data. A path of optimal connected pixels in the first image data is calculated using the energy.
摘要翻译：对由三维显示器中的至少两个图像组成的立体对图像适当地执行图像重定向。基于像素梯度能量计算第一图像数据中的连接像素的路径。基于第一图像数据和第二图像数据之间的立体对应关系，将与第一图像数据中连接的像素中的每个像素对应的第二图像数据中的每个像素计算为初始搜索点。将第一图像数据的像素与初始搜索点附近的第二图像数据的像素之间的能量最小化的像素计算为第二图像数据中的连接像素的路径。使用能量计算第一图像数据中的最佳连接像素的路径。

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