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    • 10. 发明授权
    • Nitride-based semiconductor laser device and method of forming the same
    • 基于氮化物的半导体激光器件及其形成方法
    • US06743702B2
    • 2004-06-01
    • US10058378
    • 2002-01-30
    • Takenori GotoYasuhiko NomuraTsutomu YamaguchiKiyoshi Oota
    • Takenori GotoYasuhiko NomuraTsutomu YamaguchiKiyoshi Oota
    • H01L21265
    • H01S5/0425H01L21/28575H01S5/32341
    • A highly reliable semiconductor laser device having a low operating voltage is obtained by increasing adhesive force of the overall electrode layer to a nitride-based semiconductor layer without deteriorating a low contact property. This nitride-based semiconductor laser device comprises a nitride-based semiconductor layer formed on an active layer and an electrode layer formed on the nitride-based semiconductor layer, while the electrode layer includes a first electrode layer containing a material having strong adhesive force to the nitride-based semiconductor layer and a second electrode layer, formed on the first electrode layer, having weaker adhesive force to the nitride-based semiconductor layer than the first electrode layer for reducing contact resistance of the electrode layer with respect to the nitride-based semiconductor layer. Thus, the adhesive force of the overall electrode layer to the nitride-based semiconductor layer is increased due to the first electrode layer, and lower contact resistance is attained due to the second electrode layer. Therefore, the device can be improved in reliability and reduced in operating voltage.
    • 通过增加整个电极层对氮化物基半导体层的粘合力而不降低接触性能,可获得具有低工作电压的高度可靠的半导体激光器件。 该氮化物系半导体激光装置包括在有源层上形成的氮化物系半导体层和形成在氮化物系半导体层上的电极层,而电极层包括第一电极层,该第一电极层含有对 氮化物基半导体层和第二电极层,形成在第一电极层上,与用于降低电极层相对于氮化物基半导体的接触电阻的第一电极层相比,对氮化物基半导体层具有较弱的粘附力 层。 因此,由于第一电极层,整个电极层对氮化物基半导体层的粘附力增加,并且由于第二电极层而获得较低的接触电阻。 因此,可以提高器件的可靠性和降低工作电压。