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1. 发明授权

US08815490B2 Radiation-sensitive resin composition, polymer, and method for forming resist pattern 有权
标题翻译：辐射敏感性树脂组合物，聚合物和形成抗蚀剂图案的方法
公开(公告)号：US08815490B2
公开(公告)日：2014-08-26
申请号：US13309573
申请日：2011-12-02
申请人： Yasuhiko Matsuda , Tomohisa Fujisawa , Yukari Hama , Takanori Kawakami
发明人： Yasuhiko Matsuda , Tomohisa Fujisawa , Yukari Hama , Takanori Kawakami
IPC分类号： G03F7/004 , G03F7/20 , C08F12/20 , C08F18/20 , C08F14/18
CPC分类号： C08F20/26 , G03F7/0046 , G03F7/0392 , G03F7/0397 , G03F7/2041
摘要： The radiation-sensitive resin composition includes a first polymer, a second polymer and a radiation sensitive acid generator. The first polymer includes a repeating unit represented by formula (1). The second polymer includes an acid labile group and is dissociated by an action of acid so that alkali solubility is given by dissociation of said acid labile group. R1 represents a hydrogen atom, a methyl group or a trifluoromethyl group. R2 represents a single bond or a divalent linear, branched or cyclic, saturated or unsaturated hydrocarbon group having 1-20 carbon atoms. X represents a fluorine atom-substituted methylene group or a linear or branched fluoroalkylene group having 2-20 carbon atoms. R3 represents a hydrogen atom or a monovalent organic group.
摘要翻译：辐射敏感性树脂组合物包括第一聚合物，第二聚合物和辐射敏感性酸产生剂。第一聚合物包括由式（1）表示的重复单元。第二聚合物包括酸不稳定基团，并且通过酸的作用解离，使得碱溶解度通过所述酸不稳定基团的解离而给出。 R1表示氢原子，甲基或三氟甲基。 R2表示具有1-20个碳原子的单键或二价直链，支链或环状，饱和或不饱和的烃基。 X表示氟原子取代的亚甲基或具有2-20个碳原子的直链或支链的氟代亚烷基。 R3表示氢原子或一价有机基团。

2. 发明授权

US08802348B2 Radiation-sensitive resin composition 有权
标题翻译：辐射敏感树脂组合物
公开(公告)号：US08802348B2
公开(公告)日：2014-08-12
申请号：US12701592
申请日：2010-02-07
申请人： Noboru Otsuka , Takanori Kawakami , Yukio Nishimura , Makoto Sugiura
发明人： Noboru Otsuka , Takanori Kawakami , Yukio Nishimura , Makoto Sugiura
IPC分类号： G03F7/039 , G03F7/20 , G03F7/30 , G03F7/38
CPC分类号： C08F220/12 , G03F7/0397 , G03F7/2041
摘要： A radiation-sensitive resin composition includes (A) an acid labile group-containing resin which becomes alkali-soluble by an action of an acid, (B) a radiation-sensitive acid generator, and (C) a solvent. The resin (A) includes repeating units shown by formulas (1) and (2), wherein R1 and R2 represent a hydrogen atom or a substituted or unsubstituted alkyl group having 1 to 4 carbon atoms, R3 represents a substituted or unsubstituted alkyl group having 1 to 4 carbon atoms, X represents a hydrogen atom, a hydroxyl group, or an acyl group, m represents an integer from 1 to 18, and n represents an integer from 4 to 8.
摘要翻译：辐射敏感性树脂组合物包括（A）通过酸的作用变成碱溶性的酸不稳定基团的树脂，（B）辐射敏感性酸产生剂和（C）溶剂。树脂（A）包括由式（1）和（2）表示的重复单元，其中R 1和R 2表示氢原子或取代或未取代的具有1至4个碳原子的烷基，R 3表示取代或未取代的烷基， 1至4个碳原子，X表示氢原子，羟基或酰基，m表示1至18的整数，n表示4至8的整数。

3. 发明申请

US20130244185A9 RADIATION-SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING RESIST PATTERN, ORGANIC ACID AND ACID GENERATING AGENT 审中-公开
标题翻译：辐射敏感性树脂组合物，形成抗性图案的方法，有机酸和酸产生剂
公开(公告)号：US20130244185A9
公开(公告)日：2013-09-19
申请号：US13615842
申请日：2012-09-14
申请人： Yasuhiko MATSUDA , Takanori Kawakami
发明人： Yasuhiko MATSUDA , Takanori Kawakami
IPC分类号： C07C321/10 , G03F7/20
CPC分类号： G03F7/0045 , G03F7/0046 , G03F7/0397 , G03F7/2041
摘要： A radiation-sensitive resin composition includes an acid generating agent to generate an organic acid by irradiation with a radioactive ray. The organic acid has a cyclic hydrocarbon group and an organic group including a bond that is cleavable by an acid or a base to produce a polar group. The organic acid is preferably represented by a following formula (I). Z represents an organic acid group. R1 represents an alkanediyl group, wherein a part or all of hydrogen atoms of the alkanediyl group represented by R1 are optionally substituted by a fluorine atom. X represents a single bond, O, OCO, COO, CO, SO3 or SO2. R2 represents a cyclic hydrocarbon group. R3 represents a monovalent organic group having a functional group represented by a following formula (x). n is an integer of 1 to 3. Z—R1—X—R2—(R3)n (I) —R31-G-R13 (x)
摘要翻译：辐射敏感性树脂组合物包括通过用放射线照射产生有机酸的酸产生剂。有机酸具有环状烃基和包含可被酸或碱裂解以产生极性基团的键的有机基团。有机酸优选由下式（I）表示。 Z表示有机酸基。 R1表示烷二基，其中由R1表示的烷二基的一部分或全部氢原子任选被氟原子取代。 X表示单键O，OCO，COO，CO，SO 3或SO 2。 R2表示环状烃基。 R3表示具有由下式（x）表示的官能团的一价有机基团。 n为1〜3的整数。Z-R1-X-R2-（R3）n（I）-R31-G-R13（x）

4. 发明授权

US08084188B2 Radiation-sensitive resin composition 有权
标题翻译：辐射敏感树脂组合物
公开(公告)号：US08084188B2
公开(公告)日：2011-12-27
申请号：US12557529
申请日：2009-09-11
申请人： Noboru Otsuka , Takanori Kawakami
发明人： Noboru Otsuka , Takanori Kawakami
IPC分类号： G03F7/004
CPC分类号： G03F7/0397 , G03F7/0045 , Y10S430/106 , Y10S430/111
摘要： A radiation-sensitive resin composition includes an acid-dissociable group-containing resin, a radiation-sensitive acid generator, and a solvent. The acid-dissociable group-containing resin includes a copolymer containing a repeating unit. The reparing unit includes an acid-dissociable group-containing repeating unit in an amount of more than about 55 mol % of a total amount of the repeating units in the copolymer. A content of the copolymer in the acid-dissociable group-containing resin is about 90 mass % or more of a total amount of the acid-dissociable group-containing resin.
摘要翻译：辐射敏感性树脂组合物包括含酸解离基团的树脂，辐射敏感性酸产生剂和溶剂。含酸解离基的树脂包括含有重复单元的共聚物。修饰单元包括含量大于共聚物中重复单元总量的约55摩尔％的酸解离基团的重复单元。含酸解离基的树脂中的共聚物的含量为含酸解离基的树脂的总量的约90质量％以上。

5. 发明授权

US07460339B2 Inertial latch that restricts actuator rotation in a first direction but not in a second direction 失效
标题翻译：惯性闩锁，其限制致动器沿第一方向而不是在第二方向旋转
公开(公告)号：US07460339B2
公开(公告)日：2008-12-02
申请号：US10892944
申请日：2004-07-16
申请人： Takanori Kawakami , Shinichi Kimura , Satoshi Matsumura
发明人： Takanori Kawakami , Shinichi Kimura , Satoshi Matsumura
IPC分类号： G11B5/54 , G11B21/22
CPC分类号： G11B5/54
摘要： A rotating disk storage device has a mechanism for latching an actuator head suspension assembly (AHSA) positively in a retraction area upon occurrence of an external shock or runaway. In one embodiment, a latch mechanism comprises an AHSA which is supported pivotably, an elastic member which restricts a pivotal movement of the AHSA in a pivot direction A1 of the AHSA, an inertia member adapted to move pivotally in a corresponding pivot direction B2 when the AHSA moves pivotally in the pivot direction A1 while deforming the elastic member elastically, and a latch member having an engaging portion and adapted to move pivotally in a direction A2 opposite from the corresponding pivot direction B2 upon receipt of torque from the inertia member, thereby causing the engaging portion to move to a latching position. The AHSA has two to-be-engaged portions, i.e., a first to-be-engaged portion and a second to-be-engaged portion. Even in the event the engaging portion cannot engage the first to-be-engaged portion, it can engage the second to-be-engaged portion.
摘要翻译：旋转盘存储装置具有用于在发生外部冲击或失控时在执行器头部悬挂组件（AHSA）中积极地将其锁定在收回区域中的机构。在一个实施例中，闩锁机构包括可枢转地支撑的AHSA，弹性构件，其限制AHSA在AHSA的枢转方向A1上的枢转运动，惯性构件适于在相应的枢转方向B2上枢转地移动，当惯性构件 AHSA在枢转方向A1上枢转地移动，同时使弹性构件弹性地变形，以及闩锁构件，其具有接合部分，并且适于在从惯性构件接收到扭矩时沿与相应的枢转方向B2相反的方向A2枢转地移动，从而导致所述接合部分移动到闩锁位置。 AHSA具有两个被接合部分，即第一待接合部分和第二被接合部分。即使在接合部分不能接合第一被接合部分的情况下，其可以接合第二被接合部分。

6. 发明申请

US20050078404A1 Data storage device and actuator control method 有权
标题翻译：数据存储装置及执行机构控制方法
公开(公告)号：US20050078404A1
公开(公告)日：2005-04-14
申请号：US10957011
申请日：2004-09-30
申请人： Kenichi Kuramoto , Takanori Kawakami
发明人： Kenichi Kuramoto , Takanori Kawakami
IPC分类号： G11B21/12 , G11B5/54 , G11B5/596 , G11B21/02
CPC分类号： G11B5/54 , G11B21/12
摘要： Embodiments of the invention prevent the magnetic head from dropping to the magnetic disk when it is retracted. If the power supply Vcc to the drive is interrupted, a power supply voltage detecting section detects that the power supply to the drive is interrupted. A control section sets switches to the ON state in order to discharge the charged retract capacitor and supply the discharge current to a voice coil. The control section retains the switches in the ON state for a period which is determined based on the discharge period specifying control data stored in a register and the count signal from a counter. A voice coil motor, to which the current is supplied, turns the actuator in the unloading direction to retract the actuator to the ramp.
摘要翻译：本发明的实施例防止当磁头收回时磁头掉落到磁盘上。如果驱动器的电源Vcc中断，则电源电压检测部检测到驱动器的电源被中断。控制部将开关置于ON状态，以便对充电的收缩电容器进行放电，并将放电电流提供给音圈。控制部分将开关保持在基于存储在寄存器中的放电周期指定控制数据和来自计数器的计数信号确定的周期。提供电流的音圈电动机沿着卸载方向转动致动器，以将致动器缩回到斜坡。

7. 发明申请

US20050063091A1 Rotating disk storage device 失效
标题翻译：旋转磁盘存储设备
公开(公告)号：US20050063091A1
公开(公告)日：2005-03-24
申请号：US10892944
申请日：2004-07-16
申请人： Takanori Kawakami , Shinichi Kimura , Satoshi Matsumura
发明人： Takanori Kawakami , Shinichi Kimura , Satoshi Matsumura
IPC分类号： G11B21/22 , G11B5/54 , G11B17/00 , G11B21/02 , G11B21/12
CPC分类号： G11B5/54
摘要： A rotating disk storage device has a mechanism for latching an actuator head suspension assembly (AHSA) positively in a retraction area upon occurrence of an external shock or runaway. In one embodiment, a latch mechanism comprises an AHSA which is supported pivotably, an elastic member which restricts a pivotal movement of the AHSA in a pivot direction A1 of the AHSA, an inertia member adapted to move pivotally in a corresponding pivot direction B2 when the AHSA moves pivotally in the pivot direction A1 while deforming the elastic member elastically, and a latch member having an engaging portion and adapted to move pivotally in a direction A2 opposite from the corresponding pivot direction B2 upon receipt of torque from the inertia member, thereby causing the engaging portion to move to a latching position. The AHSA has two to-be-engaged portions, i.e., a first to-be-engaged portion and a second to-be-engaged portion. Even in the event the engaging portion cannot engage the first to-be-engaged portion, it can engage the second to-be-engaged portion.
摘要翻译：旋转盘存储装置具有用于在发生外部冲击或失控时在执行器头部悬挂组件（AHSA）中积极地将其锁定在收回区域中的机构。在一个实施例中，闩锁机构包括可枢转地支撑的AHSA，弹性构件，其限制AHSA在AHSA的枢转方向A1上的枢转运动，惯性构件适于在相应的枢转方向B2上枢转地移动，当惯性构件 AHSA在枢转方向A1上枢转地移动，同时使弹性构件弹性地变形，以及闩锁构件，其具有接合部分，并且适于在从惯性构件接收到扭矩时沿与相应的枢转方向B2相反的方向A2枢转地移动，从而导致所述接合部分移动到闩锁位置。 AHSA具有两个被接合部分，即第一待接合部分和第二被接合部分。即使在接合部分不能接合第一被接合部分的情况下，其可以接合第二被接合部分。

8. 发明授权

US09104102B2 Radiation-sensitive resin composition 有权
标题翻译：辐射敏感树脂组合物
公开(公告)号：US09104102B2
公开(公告)日：2015-08-11
申请号：US13560987
申请日：2012-07-27
申请人： Yasuhiko Matsuda , Takanori Kawakami , Kazuki Kasahara , Ken Maruyama
发明人： Yasuhiko Matsuda , Takanori Kawakami , Kazuki Kasahara , Ken Maruyama
IPC分类号： G03F7/004 , G03F7/039 , G03F7/11 , G03F7/20
CPC分类号： G03F7/0045 , G03F7/0046 , G03F7/0397 , G03F7/11 , G03F7/2041
摘要： A radiation-sensitive resin composition includes a compound represented by a following formula (1), and a first polymer that serves as a base resin. R1 represents a monovalent alicyclic hydrocarbon group having 3 to 20 carbon atoms, or the like. The M+ represents a monovalent cation. The first polymer (B) is preferably insoluble or hardly soluble in alkali, the polymer including a structure unit represented by a formula (5) or a structure unit represented by a formula (6), and a structure unit represented by a formula (7).
摘要翻译：辐射敏感性树脂组合物包含由下式（1）表示的化合物和作为基础树脂的第一聚合物。 R1表示碳原子数3〜20的一价脂环式烃基等。 M +表示一价阳离子。第一聚合物（B）优选不溶于或几乎不溶于碱，该聚合物包括由式（5）表示的结构单元或由式（6）表示的结构单元，和由式（7）表示的结构单元）。

9. 发明授权

US08728706B2 Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compound 有权
标题翻译：辐射敏感树脂组合物，抗蚀剂图案形成方法，聚合物和可聚合化合物
公开(公告)号：US08728706B2
公开(公告)日：2014-05-20
申请号：US13420618
申请日：2012-03-15
申请人： Yuusuke Asano , Mitsuo Satou , Hiromitsu Nakashima , Kazuki Kasahara , Yoshifumi Oizumi , Masafumi Hori , Takanori Kawakami , Yasuhiko Matsuda , Kazuo Nakahara
发明人： Yuusuke Asano , Mitsuo Satou , Hiromitsu Nakashima , Kazuki Kasahara , Yoshifumi Oizumi , Masafumi Hori , Takanori Kawakami , Yasuhiko Matsuda , Kazuo Nakahara
IPC分类号： G03F7/039 , G03F7/20 , G03F7/30
CPC分类号： G03F7/0392 , C08F20/22 , G03F7/0046 , G03F7/038 , G03F7/0388 , G03F7/039 , G03F7/20 , G03F7/2041 , G03F7/30 , G03F7/32
摘要： A radiation-sensitive resin composition includes a first polymer including an acid-labile group, an acid generator to generate an acid upon exposure to radiation, and a second polymer including a fluorine atom and a functional group shown by a general formula (x). The second polymer has a fluorine atom content higher than a fluorine atom content of the first polymer. R1 represents an alkali-labile group. A represents an oxygen atom, —NR′—, —CO—O—# or —SO2—O—##, wherein the oxygen atom represented by A is not an oxygen atom bonded directly to an aromatic ring, a carbonyl group, or a sulfoxyl group, R′ represents a hydrogen atom or an alkali-labile group, and “#” and “##” indicates a bonding hand bonded to R1. -A-R1 (x)
摘要翻译：辐射敏感性树脂组合物包括包含酸不稳定基团的第一聚合物，暴露于辐射时产生酸的酸产生剂和包含氟原子的第二聚合物和由通式（x）表示的官能团。第二聚合物的氟原子含量高于第一聚合物的氟原子含量。 R1表示碱不稳定基团。 A表示氧原子，-NR' - ， - CO-O - 或-SO 2 -O - ，其中由A表示的氧原子不是直接与芳环键合的氧原子，羰基或亚砜基，R'表示氢原子或碱不稳定基团，“＃”和“##”表示与R1键合的键。 -A-R1（x）

10. 发明授权

US07897821B2 Sulfonium compound 有权
标题翻译：锍化合物
公开(公告)号：US07897821B2
公开(公告)日：2011-03-01
申请号：US12873265
申请日：2010-08-31
申请人： Tomoki Nagai , Eiji Yoneda , Takuma Ebata , Takanori Kawakami , Makoto Sugiura , Tsutomu Shimokawa , Makoto Shimizu
发明人： Tomoki Nagai , Eiji Yoneda , Takuma Ebata , Takanori Kawakami , Makoto Sugiura , Tsutomu Shimokawa , Makoto Shimizu
IPC分类号： C07C31/34
CPC分类号： C09D133/14 , C07C309/10 , C07C309/12 , C07C309/19 , C07C309/20 , C07C381/12 , C07D209/76 , C08F20/38 , C08F28/00 , C08F28/02 , C08F214/18 , C08F220/12 , C08F220/18 , C08F220/24 , C08F220/28 , C08F228/02 , C09D141/00 , G03F7/0045 , G03F7/0392 , G03F7/0397
摘要： A compound is shown by the following formula (5) in which at least one of Rf groups represents a fluorine atom or a linear or branched perfluoroalkyl group having 1 to 10 carbon atoms, A′ represents a substituted or unsubstituted, linear or branched alkylene group having 1 to 20 carbon atoms, an alkylene group having at least one hetero atom, or a single bond, G represents a divalent organic group having a fluorine atom or a single bond, Mm+ represents an onium cation, m represents a natural number of 1 to 3, and p represents a natural number of 1 to 8.
摘要翻译：下式（5）表示化合物，其中Rf基中的至少一个表示氟原子或具有1-10个碳原子的直链或支链全氟烷基，A'表示取代或未取代的直链或支链亚烷基具有1至20个碳原子，具有至少一个杂原子的亚烷基或单键，G表示具有氟原子或单键的二价有机基团，Mm +表示鎓阳离子，m表示1的自然数至3，p表示1至8的自然数。

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