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1. 发明授权

US06873175B2 Apparatus and method for testing pixels arranged in a matrix array 失效
标题翻译：用于测试以矩阵阵列排列的像素的装置和方法
公开(公告)号：US06873175B2
公开(公告)日：2005-03-29
申请号：US10379458
申请日：2003-03-04
申请人： Guillermo Toro-Lira , Makoto Shinohara , Takaharu Nishihara
发明人： Guillermo Toro-Lira , Makoto Shinohara , Takaharu Nishihara
IPC分类号： G01N23/225 , G01R31/302 , G01R31/305 , G09G3/00 , G01R31/00
CPC分类号： G09G3/006 , G01R31/305
摘要： An apparatus for testing plural pixels arranged in a matrix array on a TFT substrate comprises an electron gun for incidenting the electron beam to the TFT substrate, a secondary electron detector for detecting the amount of secondary electrons generated by incidenting the electron beam to the TFT substrate, and a stage for carrying the TFT substrate which is held thereon. The electron gun is placed against the TFT substrate held on the stage and incidents the electron beam to each basic scanning area. The electron gun scans the electron beam in one basic scanning area a predetermined number of times to obtain a secondary electron waveform necessary for testing the presence/absence of a defect in the pixel. The stage is always moved while the electron gun scans the electron beam in each basic scanning area, whereby the entire area of the TFT substrate is tested.
摘要翻译：一种用于测试在TFT基板上以矩阵阵列排列的多个像素的装置，包括用于将电子束入射到TFT基板的电子枪，用于检测通过将电子束入射到TFT基板而产生的二次电子量的二次电子检测器以及用于承载保持在其上的TFT基板的载物台。将电子枪放置在保持在平台上的TFT基板上，并将电子束发射到每个基本扫描区域。电子枪在一个基本扫描区域内扫描预定次数的电子束，以获得测试像素中缺陷的存在/不存在所需的二次电子波形。当电子枪扫描每个基本扫描区域中的电子束时，舞台总是移动，由此测试TFT基片的整个区域。

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