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    • 3. 发明授权
    • Package substrate for electrolytic leadless plating and manufacturing method thereof
    • 电解无铅电镀用封装基板及其制造方法
    • US06872590B2
    • 2005-03-29
    • US10626437
    • 2003-07-24
    • Jong-Jin LeeTae-Gui Kim
    • Jong-Jin LeeTae-Gui Kim
    • H01L23/12H01L21/48H05K3/02H05K3/06H05K3/24H05K3/42H01L21/44
    • H05K3/243H01L21/4846H01L21/4857H01L2224/32225H01L2224/48091H01L2224/48227H01L2224/73265H01L2924/01019H01L2924/01078H01L2924/01079H01L2924/15311H05K3/064H05K3/426H05K3/427H05K2201/0352H05K2203/072H05K2203/0723H05K2203/1394H05K2203/1476H01L2924/00014H01L2924/00
    • Disclosed is a package substrate for electrolytic leadless plating, characterized in that a wire bonding pad onto which a semiconductor chip is mounted is subjected to electrolytic leadless Au plating, and a solder ball pad is subjected to OSP metal finishing or electroless Au plating without use of plating lead lines, upon preparation thereof. A method of manufacturing the package substrate is also disclosed. The method includes Cu plating a whole surface of a base substrate having through-holes, developing a first dry film laminated onto the through-holes, removing a copper foil not covered with the first dry film, stripping the first dry film, exposing and developing a second dry film on the substrate so that only an upper portion to be subjected to electrolytic Au plating is exposed, grounding an electrolytic Au plating terminal to a solder ball pad, Ni—Au plating the wire bonding pad, removing the second dry film by a stripping solution, exposing and developing a third dry film, removing the exposed copper foil by an etching solution, removing the third dry film by a stripping solution, performing a series of processes of coating, exposing, developing and drying a solder resist, and subjecting the solder ball pad to OSP metal finishing.
    • 公开了一种用于电解无铅电镀的封装衬底,其特征在于,对其上安装有半导体芯片的引线焊盘进行电解无铅镀Au,并且焊球垫经受OSP金属整理或无电镀Au,而不使用 电镀引线在制备时。 还公开了一种制造封装衬底的方法。 该方法包括对具有通孔的基底基板的整个表面进行镀铜,形成层压在通孔上的第一干膜,除去未被第一干膜覆盖的铜箔,剥离第一干膜,曝光和显影 在基板上的第二干膜,使得只有待进行电解Au电镀的上部暴露,将电解Au电镀端子接地到焊球垫,Ni-Au电镀引线接合焊盘,通过以下步骤除去第二干膜 剥离溶液,曝光和显影第三干膜,通过蚀刻溶液除去暴露的铜箔,通过剥离溶液除去第三干膜,进行一系列涂布,曝光,显影和干燥阻焊剂的工艺,以及 对焊锡球进行OSP金属加工。