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1. 发明授权

US07184129B2 Positioning method, and positioning apparatus 失效
标题翻译：定位方法和定位装置
公开(公告)号：US07184129B2
公开(公告)日：2007-02-27
申请号：US10891037
申请日：2004-07-15
申请人： Tadayuki Kubo
发明人： Tadayuki Kubo
IPC分类号： G03B27/58
CPC分类号： G03F7/707 , G03B27/42 , G03F7/70816
摘要： A positioning method that includes a step of moving a stage apparatus for supporting a workpiece or an object to be measured from an auxiliary mount to a positioning mount using a rolling guide extending from the positioning mount onto the auxiliary mount, a step of lifting the stage apparatus moved to the positioning mount using a lifting unit to extract the rolling guide, and a step of lowering the stage apparatus onto the positioning mount, from which the rolling guide is extracted, to cause the stage apparatus to abut a reference member and to position the stage apparatus, while hydrostatically supporting the stage apparatus by a hydrostatic bearing unit. A positioning apparatus for performing a positioning method is also set forth.
摘要翻译：一种定位方法，其包括以下步骤：使用从所述定位支架延伸到所述辅助支架上的滚动导轨，将从辅助支架将待测量的工件或待测物体的支架装置移动到定位支架的步骤，装置使用提升单元移动到定位支架以提取滚动导轨，以及将平台装置降低到定位支架上的步骤，滚动导轨从该定位支架上取出，以使平台装置抵靠基准构件并将其定位同时通过静液压轴承单元对舞台装置进行水力静力支撑。还提出了一种用于执行定位方法的定位装置。

2. 发明授权

US06644855B2 Stage device, exposure apparatus, device manufacturing method and movement guidance method 有权
公开(公告)号：US06644855B2
公开(公告)日：2003-11-11
申请号：US10073594
申请日：2002-02-12
申请人： Shigeo Sakino , Mitsuru Inoue , Tadayuki Kubo
发明人： Shigeo Sakino , Mitsuru Inoue , Tadayuki Kubo
IPC分类号： F16C1700
CPC分类号： G03F7/70841 , F16C29/025 , F16C32/0614 , F16C33/748 , F16C2300/62 , G03F7/70716 , G03F7/70816 , H01J37/20 , H01L21/682
摘要： A stage device includes a table having a reference plane parallel to first and second directions; a driving body movable along the first direction; a moving body movable along the second direction with respect to the driving body; a static pressure bearing provided on the moving body; an exhaust groove provided surrounding the static pressure bearing; and a mechanism for delivering a gas of the static pressure bearing recovered by the exhaust groove between the moving body and the driving body. The adverse affects of piping on the moving body can be reduced and it is possible to position the moving body with high precision.

3. 发明授权

US06408045B1 Stage system and exposure apparatus with the same 失效
标题翻译：舞台系统和曝光装置相同
公开(公告)号：US06408045B1
公开(公告)日：2002-06-18
申请号：US09187408
申请日：1998-11-06
申请人： Shin Matsui , Shinji Ohishi , Eiji Osanai , Tadayuki Kubo
发明人： Shin Matsui , Shinji Ohishi , Eiji Osanai , Tadayuki Kubo
IPC分类号： G21K500
CPC分类号： G03F7/70766 , B23Q5/28 , B23Q11/0025 , B23Q11/0028 , G03F7/70716 , G03F7/709
摘要： A stage system includes a first stage movable along a reference plane, containing a vertical direction, and in the vertical direction or in a first direction close to the vertical direction, a second stage movable in a second direction intersecting with the first direction and relative to the first stage, a first driving mechanism for moving the first stage in the first direction, a second driving mechanism for moving the second stage in the second direction, a countermass movable in the first direction, and a third driving mechanism for moving the countermass in a direction opposite to the first direction.
摘要翻译：舞台系统包括沿着参考平面可移动的第一阶段，其包含垂直方向，并且在垂直方向或靠近垂直方向的第一方向上可移动第二阶段，该第二阶段可在与第一方向相交的第二方向上相对于第一级，用于沿第一方向移动第一级的第一驱动机构，用于沿第二方向移动第二级的第二驱动机构，可沿第一方向移动的反作用力;以及第三驱动机构，与第一方向相反的方向。

4. 发明申请

US20050018161A1 Positioning method, and positioning apparatus 失效
标题翻译：定位方法和定位装置
公开(公告)号：US20050018161A1
公开(公告)日：2005-01-27
申请号：US10891037
申请日：2004-07-15
申请人： Tadayuki Kubo
发明人： Tadayuki Kubo
IPC分类号： G03F9/00 , G03B27/42 , G03F7/20 , H01L21/027
CPC分类号： G03F7/707 , G03B27/42 , G03F7/70816
摘要： A positioning method that includes a step of moving a stage apparatus for supporting a workpiece or an object to be measured from an auxiliary mount to a positioning mount using a rolling guide extending from the positioning mount onto the auxiliary mount, a step of lifting the stage apparatus moved to the positioning mount using a lifting unit to extract the rolling guide, and a step of lowering the stage apparatus onto the positioning mount, from which the rolling guide is extracted, to cause the stage apparatus to abut a reference member and to position the stage apparatus, while hydrostatically supporting the stage apparatus by a hydrostatic bearing unit. A positioning apparatus for performing a positioning method is also set forth.
摘要翻译：一种定位方法，其包括以下步骤：使用从所述定位支架延伸到所述辅助支架上的滚动导轨，将从辅助支架将待测量的工件或待测物体的支架装置移动到定位支架的步骤，装置使用提升单元移动到定位支架以提取滚动导轨，以及将平台装置降低到定位支架上的步骤，滚动导轨从该定位支架上取出，以使平台装置抵靠基准构件并将其定位同时通过静液压轴承单元对舞台装置进行水力静力支撑。还提出了一种用于执行定位方法的定位装置。

5. 发明授权

US4204482A Comparator circuit adapted for use in a system for controlling the air-fuel ratio of an internal combustion engine 失效
标题翻译：适用于控制内燃机的空燃比的系统的比较器电路
公开(公告)号：US4204482A
公开(公告)日：1980-05-27
申请号：US898987
申请日：1978-04-21
申请人： Toshiro Harada , Tadayuki Kubo , Kazusato Kasuya , Yukihiro Watanabe
发明人： Toshiro Harada , Tadayuki Kubo , Kazusato Kasuya , Yukihiro Watanabe
IPC分类号： F02D41/14 , F02M51/00 , F02M7/12
CPC分类号： F02D41/1479 , F02D41/1481
摘要： Disclosed herein is a comparator circuit used in a system for controlling, in accordance with an air-fuel ratio signal from an O.sub.2 sensor arranged in an exhaust system of an internal combustion engine, the air-fuel ratio of the exhaust gas. The comparator has two inputs, one of which receives a signal having a phase which is the same as a signal from the O.sub.2 sensor, the other of which receives a delayed phase signal. The output of the comparator operates to provide, in accordance with the voltage level difference between the inputs, two deviation signals, one of which indicates that air-fuel ratio has deviated to the rich side of the air-fuel ratio the other of which indicates that the air-fuel ratio has deviated to the lean side of the air-fuel ratio.
摘要翻译：这里公开了一种比较器电路，用于根据布置在内燃机的排气系统中的O2传感器的空燃比信号来控制排气的空燃比的系统。比较器具有两个输入端，其中一个输入端接收与O2传感器信号相同的信号，另一个输入端接收延迟相位信号。比较器的输出操作以根据输入端之间的电压电平差提供两个偏差信号，其中之一表示空燃比已经偏离空燃比的富侧，另一个指示空燃比偏离空燃比的稀薄侧。

6. 发明授权

US07198141B2 Shock absorbing apparatus in a positioning apparatus 失效
标题翻译：定位装置中的减震装置
公开(公告)号：US07198141B2
公开(公告)日：2007-04-03
申请号：US10653287
申请日：2003-09-03
申请人： Tadayuki Kubo , Takeshi Sasaki
发明人： Tadayuki Kubo , Takeshi Sasaki
IPC分类号： F16C32/06
CPC分类号： F16F15/02 , F16C32/0603 , F16F7/00 , F16F2230/0047 , Y10T74/20354
摘要： A shock absorbing apparatus in a positioning apparatus including a stage apparatus is disclosed. The positioning apparatus includes a main body apparatus for mounting the stage apparatus thereto, and a chamber for maintaining a region, in which the stage apparatus is disposed, under a condition of vacuum or purged ambience. The shock absorbing apparatus includes a shock absorber provided at a stroke end of the stage apparatus, and a support member provided separately from the stage apparatus, to which the shock absorber is fixed. In the shock absorbing apparatus of the present invention, the shock absorbing apparatus is fixed to the support member provided separately from the stage apparatus including a driving system, and accordingly an increase in size of the stage apparatus can be prevented, and high-speed and highly-precise positioning of an object to be positioned can be performed in a non-atmospheric ambience.
摘要翻译：公开了一种包括舞台装置的定位装置中的减震装置。该定位装置包括用于将舞台装置安装到其上的主体装置和用于在真空或排气环境的条件下保持其中放置舞台装置的区域的腔室。该冲击吸收装置包括设置在平台装置的行程端的减震器，以及与减震器固定到该平台装置分开设置的支撑构件。在本发明的冲击吸收装置中，冲击吸收装置固定在与包括驱动系统的平台装置分开设置的支撑构件上，因此可以防止平台装置的尺寸增大，并且高速和可以在非大气环境中执行要定位的物体的高精度定位。

7. 发明授权

US5280677A Positioning mechanism 失效
标题翻译：定位机制
公开(公告)号：US5280677A
公开(公告)日：1994-01-25
申请号：US29956
申请日：1993-03-09
申请人： Tadayuki Kubo , Eiji Osanai
发明人： Tadayuki Kubo , Eiji Osanai
IPC分类号： B23Q1/48 , G03F7/20 , B23Q16/00
CPC分类号： G03F7/70691 , B23Q1/48 , G03F7/709
摘要： A positioning device, includes a first positioning portion for moving an article in a direction substantially perpendicular to a predetermined plane and/or in a direction inclined with respect to the predetermined plane; a second positioning portion for moving the article in a direction substantially parallel to the predetermined plane, wherein the first positioning portion is mounted on the second positioning portion; a base member on which the second positioning portion is mounted; and a position detecting system for controlling movement of the article through the first positioning portion, the position detecting system being operable to measure displacement with respect to the surface of the base member.
摘要翻译：一种定位装置，包括：第一定位部分，用于沿大致垂直于预定平面的方向和/或相对于预定平面倾斜的方向移动物品; 第二定位部分，用于沿着与所述预定平面大致平行的方向移动所述物品，其中所述第一定位部分安装在所述第二定位部分上; 安装有第二定位部的基部构件; 以及位置检测系统，用于控制物品通过第一定位部分的移动，位置检测系统可操作以测量相对于基底构件的表面的位移。

8. 发明授权

US5142172A Rectilinear-motion driving device for voice coil motor 失效
标题翻译：音圈马达直线运动驱动装置
公开(公告)号：US5142172A
公开(公告)日：1992-08-25
申请号：US682960
申请日：1991-04-10
申请人： Michio Horikoshi , Kazuo Watanabe , Tadayuki Kubo
发明人： Michio Horikoshi , Kazuo Watanabe , Tadayuki Kubo
IPC分类号： B23Q1/26 , B23Q1/38 , B23Q1/56 , B23Q5/28 , F16C29/02 , H02K5/16 , H02K33/18 , H02K41/035
CPC分类号： F16C29/025 , F16C32/06 , H02K41/0356 , B26D2007/0043 , H02K7/085
摘要： A linear-motion driving device includes a movable shaft, a gas bearing for supporting the movable shaft, a housing for supporting the gas bearing, and a motor having a voice coil for displacing the movable shaft. The bearing housing is disposed inside the voice coil.
摘要翻译：线性运动驱动装置包括可动轴，用于支撑可动轴的气体轴承，用于支撑气体轴承的壳体和具有用于移动可动轴的音圈的马达。轴承座设置在音圈的内部。

9. 发明授权

US5317221A Linear driving device 失效
标题翻译：线性驱动装置
公开(公告)号：US5317221A
公开(公告)日：1994-05-31
申请号：US936840
申请日：1992-08-28
申请人： Tadayuki Kubo , Kazuo Watanabe , Michio Horikoshi
发明人： Tadayuki Kubo , Kazuo Watanabe , Michio Horikoshi
IPC分类号： H02K41/035 , H02K41/00
CPC分类号： H02K41/0356
摘要： A linear driving device includes a hydrostatic gas bearing, a shaft supported by the bearing, and a voice-coil motor for driving the shaft in a direction of movement. The bearing and the shaft are disposed within the voice-coil motor. The device further includes a locking mechanism for constraining the movement of the shaft in its direction of movement. In addition, the voice-coil motor includes a coil assembly having a coil. The coil assembly forms a closed space surrounded by the coil. The coil assembly has a plurality of exhaust holes therein communicating with the outside from the closed space.
摘要翻译：线性驱动装置包括静压气体轴承，由轴承支撑的轴和用于沿运动方向驱动轴的音圈电动机。轴承和轴设置在音圈马达内。该装置还包括用于限制轴在其运动方向上的运动的锁定机构。此外，音圈电动机包括具有线圈的线圈组件。线圈组件形成由线圈包围的封闭空间。线圈组件具有从封闭空间与外部连通的多个排气孔。

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