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    • 9. 发明授权
    • Method of producing a piezoelectric component
    • 制造压电元件的方法
    • US07310861B2
    • 2007-12-25
    • US10808949
    • 2004-03-25
    • Robert AignerStephan MarksteinerWinfried Nessler
    • Robert AignerStephan MarksteinerWinfried Nessler
    • H04R17/00
    • H03H9/585H03H3/04H03H9/0095H03H9/589H03H9/60Y10T29/42Y10T29/49126Y10T29/49128
    • A method for producing a piezoelectric component comprising at least two stacked crystal filters comprises the steps of depositing of the layer stack above the bottom electrode and the subsequent patterning of the upper electrically conductive layer and, if appropriate, second piezoelectric layers. Thus, it is possible, in a simple manner, with a minimum of process steps, to produce a piezoelectric component comprising two stacked crystal filters which are directly connected to one another via their bottom and central electrodes. The piezoelectric component furthermore has the advantage that applications in which a high stop band attenuation is important can be realized with a relatively small number of filter stages. In this case, through the use of at least two stacked crystal filters, it is possible to achieve an excellent out-of-band rejection also for “single-ended signals”.
    • 一种用于制造包括至少两个层叠晶体滤波器的压电元件的方法包括以下步骤:在底部电极上沉​​积层叠层,并且随后对上部导电层进行图案化,以及如果合适的话,沉积第二压电层。 因此,以简单的方式,通过最小的工艺步骤可以产生包括通过其底部和中心电极彼此直接连接的两个堆叠的晶体滤波器的压电元件。 压电元件还具有这样的优点,其中高阻带衰减重要的应用可以用相对较少数量的滤波级来实现。 在这种情况下,通过使用至少两个堆叠的晶体滤波器,也可以实现“单端信号”的优异的带外抑制。