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    • 1. 发明授权
    • Photo mask and semiconductor device manufacturing method
    • 光掩模和半导体器件的制造方法
    • US07183128B2
    • 2007-02-27
    • US10323969
    • 2002-12-20
    • Shinji TsuboiShinji Ishida
    • Shinji TsuboiShinji Ishida
    • H01L21/00
    • G03F1/30G03F7/70433
    • A photo mask which is used for exposure of an isolated pattern and a dense pattern for a semiconductor substrate. The photo mask includes a transparent substrate, a pair of first patterns, a first assistant pattern and a plurality of second patterns. The pair of first patterns is separated from each other by a first distance, wherein one of the first pattern is arranged at one side of the isolated pattern, and another of the first pattern is arranged at another side. The first assistant pattern is provided apart from the one of the first pattern by the first distance. In the plurality of second patterns, each of the linear patterns is sandwiched between two of the second patterns that are adjacent to each other. One of the linear patterns is separated from adjacent the other of the linear patterns by a predetermined distance. A phase of light transmitted through the one of the first pattern and a phase of light transmitted through the assistant pattern are opposite to each other. A phase of light transmitted through one of the second patterns and a phase of light transmitted through another of the second patterns adjacent to the one of the second pattern are opposite to each other.
    • 用于暴露隔离图案的照相掩模和用于半导体衬底的致密图案。 光掩模包括透明基板,一对第一图案,第一辅助图案和多个第二图案。 所述一对第一图案彼此分开第一距离,其中所述第一图案中的一个布置在所述隔离图案的一侧,并且所述第一图案中的另一个布置在另一侧。 第一辅助图案与第一图案之一分开设置第一距离。 在多个第二图案中,每个线性图案被夹在彼此相邻的两个第二图案之间。 线性图案中的一个与另一个线性图案相隔一预定距离。 通过第一图案中的一个透射的光的相位和透过辅助图案的光的相位彼此相反。 通过第二图案之一透射的光的相位和透过与第二图案之一相邻的另一个第二图案的光的相位彼此相反。
    • 2. 发明授权
    • Socket
    • 插座
    • US5816828A
    • 1998-10-06
    • US780305
    • 1997-01-08
    • Kiyokazu IkeyaShinji Tsuboi
    • Kiyokazu IkeyaShinji Tsuboi
    • H01R33/76H05K1/14H05K3/32H05K3/36H05K7/10H01R9/09
    • H05K7/1023H05K1/141H05K3/325H05K3/361
    • A socket (2, 52) for attachment to a printed substrate (10, 60), has a central aperture therethrough. A connective part (3, 53) including a flexible insulative sheet (8, 58) is provided to cover the aperture and act as an electrically connective interface between an electrical part (31, 81) mounted in the socket and the printed substrate. The flexible sheet (8, 58) has a first contact means (5, 55) associated with a first surface of the flexible sheet for electrically connecting with leads (32, 82) of the electrical part and a second contact means (6, 56) associated with a second surface of the flexible sheet for electrically connecting with the printed substrate. An electroconductive member (7, 57) provides electrical connection between the first and second contact means. Such a socket is especially useful for testing electrical parts with high clock speeds and a large number of leads.
    • 用于附接到印刷基板(10,60)的插座(2,52)具有穿过其的中心孔。 提供包括柔性绝缘片(8,58)的连接部分(3,53)以覆盖该孔并用作安装在插座中的电气部件(31,81)和印刷基板之间的电连接接口。 柔性片材(8,58)具有与柔性片材的第一表面相关联的第一接触装置(5,55),用于电连接电气部件的引线(32,82)和第二接触装置(6,56 )与柔性片的第二表面相关联,用于与印刷的基底电连接。 导电构件(7,57)提供第一和第二接触装置之间的电连接。 这种插座对于测试具有高时钟速度和大量引线的电气部件特别有用。